VFS

side Direct manual override D side Pilot valve manual override 2n-Rc , 1 2 3 4 R 1 1 2 Stations 250 250 D side U side Exhaust cleaner (Option) D side mounting U side mounting 4-Rc 1 8 n: Stations 2-Rc 3 4 Stations L L1 L2 Formula L1 = 51 x n + 92 L2 = 51 x n + 110 2 194 212 3 245 263 4 296 314 5 347 365 6 398 416 7 449 467 8 500 518 9 551 569 10 602 620 ( ): 2(B)/4(A) port Rc 3/4 3-8-96 97

Table of Contents

VQ1000 (VV5Q17)-Plug Lead Unit, Cassette Type (F, P, T, S kit) . 3 3 4 9 10 10 11 12 12 14 16 18 20 22 28 30 32 32 33 34 34 35 36 61 62 64 65 67 68 70 36 37 38 38 40 44 48 52 56 74 74 75 76 76 78 80 82 84 86 89 92 94 96 97 100 104 104 106 108 110 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-

KJ

(inch) H (Width across flats) Mounting plate thickness 11 mm or less Connection thread Min. port size Connection thread UNF L Mounting hole Weight (g) M Model 2-Applicable tubing KQ2E01-00 KQ2E03-00 KQ2E05-00 KQ2E07-00 KQ2E09-00 KQ2E11-00 KQ2E13-00 1 8 1 2 17.46 32.5 32.5 34 34.5 38 42.5 44.5 13.5 13.5 15 15 20 23 26 26 26 33 33 52 70 97 15.5 16 16.5 17 18.5 21 22 2.5 3 3.5 4.6 6 7 9.6 -20

Free Mount Cylinder for Vacuum Series ZCUK

Unit: g Model Bore size (mm) Cylinder stroke (mm) 5 10 15 20 25 30 40 50 63 (68) 69 (79) 75 (85) 81 (91) 87 (97) 93 (103) 10 103 (128) 163 (193) 115 (145) 127 (157) 139 (169) 151 (181) 16 180 (214) 300 (340) 348 (388) 396 (436) 204 (244) 228 (267) 252 (292) 276 (316) ZC(D)UKC 20 577 (636) 655 (714) 304 (358) 499 (558) 343 (402) 382 (441) 421 (480) 460 (519) 25 514 (587) 814 (892) 934

Free Mount Cylinder Series CU

Applicable models D-A73, A73H, A73C, C73, C73C, E73A, Z73, R73 D-97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) However, when using a 2 color indication auto switch (DA79W, A59W, B59W), be aware that the switch will constantly remain ON if the connections are reversed.

Parallel Style Air Gripper Series MHZ

Applicable model: D-A73, A73H, A73C, C73, C73C, E73A, Z73 D-R73, R73C, 97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed.

Model Selection 1

Reducing insert bushing Reducing type 17-5-92 21 Series LQ 1 2, LVN, TL/TIL High Purity Fluoropolymer Fittings/Needle Valve/Tubing Series LQ1 Variations P. 17-5-97 Port size Tubing O.D.

VXD21/22/23

97 62 64 64 160 170 180 135 140 155 67.5 70 77.5 168 (185) 182 (197) 194 (209) 51.5 54.5 59 100 105 120 36 42 53 23 25.5 25.5 35 40 40 12 14 14 41.5 44.5 44.5 ( ): N.O. 17-3-41

Series VQ Metal Seal/Rubber Seal Body Ported

Ambient and fluid temperature Effective area (Cv) Max. operating frequency (1) Note 1) As per JISB83751981 (Supply pressure: 0.5MPa) Dimensions Single unit Manifold Dimensions Equation L1=11n+20 n: Station (Max. 24 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 31 50 60.5 86 112.5 123 108 125 135.5 119 137.5 148 141 162.5 173 97 125 135.5 130 150 160.5 152 175 185.5 53 75 85.5

45

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

C92

136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32 32 40 40 54 72 30 32 40 40 52 52 60 65 12 16 20 20 25 30 32 40 G1/8 G1/4 G1/4 G3/8 G3/8 G1/2 G1/2 G3/4 13,5 15,5 17 17 22 19,5 25 30 58 64,5 77 80,5 92 97

VZ3000

: Side Ported VV5Z3-42Station 1-C6 Manual override (Non-locking) Grommet (G), (H) M5 x 0.8 (PE port) MAX. 5.5 (One-touch fitting) VK VZ VF (Pitch) VFR (Mounting hole) (1(P), 3/5(R) port) 4-Rc 1/4 VP4 VZS G: 300 mm H: 600 mm VFS (Lead wire length) VS4 VQ7 EVS VFN 2n-One-touch fitting (4(A), 2(B) port) Applicable tubing model: T0604 (Pitch) (mm) Stations 2 3 65 52 81 68 20 353 340 L1 L2 4 97

Valve Single Unit

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

One-touch Fittings

P.73 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V How to Order P.82 Variations P.83 Dimensions P.84 Inch P.81 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V Gasket Seal (Uni Thread) Connection thread Applicable tubing How to Order P.88 Variations P.89 Dimensions P.90 Made to Order/Clean Series/ Spare Parts P.93 Rc G NPT NPTF Metric P.87 2 3.2 4 6 8 10 12 16 V V How to Order P.96 Variations P.97

Combination Cylinder

Bore e f 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 185 185 190 1 to 50 12.5 12.5 12.5 12.5 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 1 to 50 68 72 72 77 20 25 32 40 68 72 72 77 35 35 35

Refrigerated Thermo-chiller

P. 95 P. 95 P. 96 P. 96 P. 96 P. 97 P. 97 Options Analog Communication . DeviceNet Communication . NPT Fittings . DI Control Kit . Circulating Fluid Automatic Recovery . Specific Product Precautions . P. 98 P. 98 P. 98 P. 98 P. 99 P. 100 to 102 75 Series HRZ Model Selection Guide to Model Selection 1. How much is the temperature in degrees centigrade for the circulating fluid?

Modular Type Air Filters Series AF

.: Gray O S O S M5 x 0.8 1/8 1/4 Barb fitting Applicable tubing: T0604 10 one-touch fitting Width across flats 17 Width across flats 14 Model Standard specifications Optional specifications Bracket mount With auto drain P A B C D E G J M N Q R S T U V B AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 M5 x 0.8 25 67 7 12.5 25 12.5 85 AC 1/8, 1/4 40 97 10 20 40 20 30 27 22 5.4 8.4 40 2.3 28 115 1/4

ZP

M6 x 1 I: M8 x 1 Y U C U C U C U C U C ZPR20 20 ZPR40 40 23 14 28 25 15 43 18.5 32 42.8 60.6 25 86.5 15 76.5 6.5 3.3 1.7 29 39.8 57.6 83.5 73.5 4 ZPR50 ZPR25 25 50 53 19.5 33 43.8 61.6 87.5 77.5 7.5 3.8 1.8 ZPR32 29.5 32 35 14.5 40.3 58.1 84 74 4.5 2.3 Deep Deep Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 ZPR40D 40 43 29 42.5 53.3 71.1 97

Compact Cylinder Series CQS

Applicable models D-A73, A73H, A73C, C73, C73C, E73A, Z73, R73 D-97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) However, when using a 2 color indication auto switch (DA79W, A59W, B59W), be aware that the switch will constantly remain ON if the connections are reversed.

AC Servo Motor Driver (SSCNET /H Type)

Setting value of [Pr.97] SSCNET setting Driver Setting value of [Pr.100] Servo series 0 SSCNET LECSS-S 1MR-J3-B 1 SSCNET/H LECSS2-T 32MR-J4-B Pr.100 Servo series Be sure to set up servo driver. Communication with servo driver is not started by the initial value 0 in default value.