HRX-OM-I051

Page 5-7 Maintenance screen 1, 2 Not used during system operation. Not allowed to use unless otherwise specified. Page 5-9 Option screen 1, 2 Allows the setting of option. Page 5-9 The alarm message is displayed in the event of an error in this system. Not displayed if no error. Alarm Display screen Page 5-10 System Information screen Displays the status of system startup and shutdown.

MLGP

The lock ring is tilted by the spring force. 2. The tilting is increased by the load and the piston rod is securely locked. MLGP Ball bushing bearing Retraction Locking 9-11-2 9-11-3 3 Series MLGP Specific Product Precautions 1 Be sure to read before handling. Selection Pneumatic Circuit Warning 6.

MLGP

The lock ring is tilted by the spring force. 2. The tilting is increased by the load and the piston rod is securely locked. MLGP Ball bushing bearing Retraction Locking 9-11-2 9-11-3 3 Series MLGP Specific Product Precautions 1 Be sure to read before handling. Selection Pneumatic Circuit Warning 6.

JXCx-OMT0002

5 5 DHCP mode Note 2) 2 5 6 Unused : : : 9 9 9 Note 1) The mode to set IP address by DHCP server.

CLQ

The lock ring is tilted by the spring force. 2. The tilting is increased by the load and the piston rod is securely locked. Unlocking port: Air supplied 1.

Fieldbus system EtherNet/IP compatible SI Unit

is an error in unit 4. 5 1: There is an error in unit 5. 6 1: There is an error in unit 6. 7 1: There is an error in unit 7. 0 1: There is an error in unit 8. 1 1: There is an error in unit 9. 2 Reserved 3 Reserved 3 Unit 4 Reserved 5 Reserved 6 Reserved 7 Reserved : The data of diagnostic content: "0" means No error and "1" means Error. -88No.EX-OMZ0024 In EX600-SEN1/2 compatibility mode

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ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

C95

4, 8, 12, 16 250 10 200 10 125 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 25 25 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 100 + 100(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 55 35 55 + 55(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 30(n-2)/2 n = 2, 4

Vacuum

Nole 2) When voltage output is selected, a simullaneous selection of switch oulput and current output is not available.

HRX-OM-S004

Sets SERIAL mode.2 (Operation and setting are performed by serial communication.) 1: When the contact input signal 1 is external switch signal, it is not possible to set to DIO mode. 2: When the serial protocol is simple communication protocol 2 and the contact input 1 is external switch signal or contact input 2 is remote signal, it is not possible to set to SERIAL mode.

Plug-in Unit

ON when normal data is received. ON when data is sent. ON when data is received. ON for transmission error and incorrect settings. BLINKING for change in station or transmission speed settings. Description B RATE STATION NO. PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

JXCx-OMT0062

Alarm Detection for CC-Link Communication" for details. 6 Position *1) Numerical data input flag 0 7 Acceleration *2) 8 Deceleration *2) 9 Pushing force *2) A Trigger LV *2) B Pushing speed *2) C Moving force *2) D Area 1 *1) E Area 2 *1) F In position *1) It is a data sending flag at Numerical data instructions operation. When waiting for the sending, this terminal is OFF.

High Vacuum Angle Valve, XL Series

(actuation port [2]-(7) is released) Conversely, by applying pressure to actuation port [2]-(7), the piston (8), sealed by the cylinder seal (13) and the piston seal (9), is operated closing the valve (15) which is sealed by the valve seal (14).

CXS

0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.

VCC

L1 8 VNH L2 4 x 9 (for M8 mounting) VND 2 port valve 3 port valve Cleaning valve + Gate valve < >: Pilot port is C6.

C95

8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

MB1

9 !5 i q r y e @3@0 t!7@2!8wu!4!3 1 1MBK32 only A Rod sectional view A-A' A' !2!1 Parts list No. Description Material Note Description Material Note No.

CNA

There is no mention in cylinder part no. 2.

AC Servo Motor Driver (SSCNET /H Type)

Reverse rotation is indicated by a minus (-) sign. -9 to 9 pulse 2 Motor speed The motor speed is displayed. The value rounded off is displayed in 0.1r/min. Reverse rotation is indicated by a minus (-) sign. -7200 to 7200 r/min 3 Droop pulses The number of droop pulses in the deviation counter is displayed. Reverse rotation is indicated by a minus (-) sign. -9 to 9 pulse -54- No.

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ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM