Vacuum

.1, .r"iF. stde .orri"tg) 9 i!

JXCx-OMT0002

JXC-OMT0002-C Flow chart (Reference) (1)Select Step No.1. (Turn IN0 ON.) (2)Turn the DRIVE ON. Controller The Motor starts to move to the position set in Step No.1. (3)Step No.1 is turned ON. Signal name (2)(6)(10)(14)(18)(22) (OUT0 is turned ON) DRIVE (1)(9)(17) (4)INP is turned OFF. IN0 (1)(9)(17) (5)BUSY is turned ON. IN1 (19)(11)(3) PLC (6)Turn the DRIVE OFF.

JXCx-OMT0062

Example) 1 byte Binary Decimal Hexadecimal (BIN) (OCT) (HEX) 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 0 0 0 0 0 0 1 0 2 2 0 0 0 0 0 0 1 1 3 3 0 0 0 0 0 1 0 0 4 4 0 0 0 0 0 1 0 1 5 5 0 0 0 0 0 1 1 0 6 6 0 0 0 0 0 1 1 1 7 7 0 0 0 0 1 0 0 0 8 8 0 0 0 0 1 0 0 1 9 9 0 0 0 0 1 0 1 0 10 A 0 0 0 0 1 0 1 1 11 B 0 0 0 0 1 1 0 0 12 C 0 0 0 0 1 1 0 1 13 D 0 0 0 0 1 1 1 0 14 E 0 0 0 0 1 1 1 1 15 F 0 0

AC Servo Motor Driver (SSCNET /H Type)

is displayed in units of 1 pulse.

Fieldbus system EtherNet/IP compatible SI Unit

System 4 1: Diagnosis of SI unit is generated. 5 1: Diagnosis of IO-Link master unit is generated. 6-7 Reserved 0 1: There is an error in unit 0. 1 1: There is an error in unit 1. 2 1: There is an error in unit 2. 3 1: There is an error in unit 3. 4 Unit 4 1: There is an error in unit 4. 5 1: There is an error in unit 5. 6 1: There is an error in unit 6. 7 1: There is an error in unit 7.

CLQ

For details, refer to page 9-15-1.

Cylinder with Lock

6 @5 @8 @9 #6 r #3 #4 o q$6y#9 #1 $4 #0 B A w !3 !4 !7 !8 @0 !9 @1 @3 @4 @6 #8 #7 $0 $1 $2 $3 $5 $7 $8 $9 @9 @7 #5 @2 B section (Release piston bushing) A section: 50 to 100 100 80 63 50 40 !2 !2 Component Parts Component Parts No.

HRX-OM-S004

Sets SERIAL mode.2 (Operation and setting are performed by serial communication.) 1: When the contact input signal 1 is external switch signal, it is not possible to set to DIO mode. 2: When the serial protocol is simple communication protocol 2 and the contact input 1 is external switch signal or contact input 2 is remote signal, it is not possible to set to SERIAL mode.

High Vacuum Angle Valve, XL Series

Conversely, by applying pressure to actuation port [2]-(7), the piston (8), sealed by the cylinder seal (13) and the piston seal (9), is operated closing the valve (15) which is sealed by the valve seal (14) (actuation port [1]-(7) is released).

AC Servo Motor Driver (Pulse input type/Positioning type)

When a different rotation direction is set, smoothing zero (command output) is confirmed and the rotation direction is then reversed. Setting "1" in point table No. 7 results in an error. Auxiliary function 0, 1 Manuf .1 Do not change.

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Plug-in Unit

ON when normal data is received. ON when data is sent. ON when data is received. ON for transmission error and incorrect settings. BLINKING for change in station or transmission speed settings. Description B RATE STATION NO. PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Diagnostic content 0 There is an error in unit 0. 1 There is an error in unit 1. 2 There is an error in unit 2. 3 There is an error in unit 3. 4 There is an error in unit 4. 5 There is an error in unit 5. 6 There is an error in unit 6. 7 There is an error in unit 7. RWr(n+1) 8 There is an error in unit 8. 9 There is an error in unit 9.

CNA

1 o q $8 y $1 r #5 $6 #2 #7 #3 #4 B A CL MLGC CNA CB #1 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !9 @2 @6 $2 @3 !4 %0 !3 #9 CV/MVG A section (Release piston bushing) B section (Piston guide bushing) CXW 100 80 63 50 40 50, 63, 80, 100 CXS @9 CXT !2 !2 MX Description Material Note Component Parts Description Material Note Component Parts MXU No. No.

SFOD-OMT0010

Signal name Category (OUT0 output is turned ON) (2)(6)(10)(14)(18)(22) DRIVE (4)INP output is turned OFF. (1)(9)(17) Input IN0 (5)BUSY output is turned ON. (1)(9)(17) IN1 PLC (6)Turn the DRIVE input OFF. (19)(11)(3) OUT0 (19)(11)(3) (7)INP output is turned ON. OUT1 Output (23)(20)(15)(12)(7)(4) (8)BUSY output is turned OFF.

MB1

8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)3/8 Rc(PT)1/2 Basic type, Foot type, Front flange type, Rear flange type Single clevis type, Double clevis type Mounting bracket Note) When there is no air cushion, the unit is equipped with rubber bumpers.

VCC

Qty. 1 6 11 2 7 12 3 8 13 4 9 14 5 10 15 2 port valve is specified for the gate valve and the cleaning valve. 7 valves + 1 valve + 4 valves = 12 valves 668

Programless Controller Series LECP1

Power supply cable (LEC-CK1-1) is an accessory.

C95

9 9 63 to 100 Replacement Parts: Seal Kit No. Description Material Qty. NBR Bore size (mm) Kit no. Contents CS95-32 Piston seal 32 #8 1 NBR CS95-40 Tube gasket 40 #9 2 NBR CS95-50 Kits include items Rod seal A 50 $0 1 NBR CS95-63 #0 and #8 to $1.

CXS

3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.