ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

Cylinder with Turntable ø63, ø80, ø100 Series MGT

A96 A93 A90 5 V Yes IC circuit Individual -X Grommet No 2-wire 100 V Relay, PLC 24V 12 V IC circuit 100 V or less Solid state auto switches marked are produced upon receipt of order.

CEx-OMB0075

L 3 m Connector Nil w/ connector Stroke(mm) Made To Order Fluoro rubber packing (Ex.) 2-2-2 Applicable Auto-Switch Models Z w/o connector 25, 50, 75, 100 Mark Auto-Switch Model Mark Auto-Switch Model Mark Auto-Switch Model A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW 2-color D-M9PW A96 Reed D-A96 M9B Solid State D-M9B M9BW Indication Solid State D-M9BW A90V Auto-Switch D-A90V

CEP1

, , 50~300mm/s , 7 ? , , 9 6-2 ? 3,4,9 ? , , 3 ? , ,, 3,9 ? 50~300mm/s 7 ,? , 3,9 ? , 3,9 , ? , , 4 ? , 2,3

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Standard stroke (mm) 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 40, 50 Auto switch specifications Lead wire length (m) Load voltage Indicator light Auto switch type Electrical entry Applicable load Wiring (output) Special function Type 0.5 (Nil) 3 (L) 5 (Z) DC AC Perpendicular In-line 5V 12V IC circuit A90 100V or less No A90V Reed switch Solid state switch 2-wire 24V

CLS

100 V, 200 V Solid state switch Reed switch 3-wire (NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire (NPN) Terminal conduit 12 V Relay, PLC IC circuit Yes 5 V, 12 V With diagnostic output (2-color indicator) 24 V 12 V Grommet 5 V, 12 V Water resistant (2-color indicator) 12 V 5 V, 12 V With diagnostic output (2-color indicator) IC circuit A96 A93 A90

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

How to Order 20 30 B CQSX D Without auto switch With auto switch 20 B 30 A90 CDQSX D Number of auto switches With auto switch (with built-in magnet) 2 pcs. 1 pc. "n" pcs.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

/5 to 100 50 to 100/10 to 100 12, 16, 20, 25 32, 40, 50, 63 80, 100 RQ Double rod CQ2W 7-6-25 MU Spring return/ 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 D7-6-42 Spring extend CQ2 -X Non-rotating Rod 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 12, 16, 20 25, 32, 40 50, 63 Single rod CQ2K 7-6-62 20Double acting Data 12, 16, 20 25, 32, 40 50, 63 12,

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 12, 16, 20 25, 32, 40 50, 63 Single rod CQ2K 7-6-62 20Double acting Data 12, 16, 20 25, 32, 40 50, 63 12, 16/5 to 30 20, 40/5 to 50 50, 63/10 to 50 Double rod CQ2KW 7-6-76 Axial Piping (Centralized Piping Type) 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50 to 100/10 to 100 12, 16, 20, 25 32, 40, 50, 63, 80, 100 Single

NCG/CG1

speed 50 to 400 mm/s 50 to 1000 mm/s Relief port size Auto switch can be mounted.

17

50 40 40 32 32 25 22 (10) 22 (10) 25 Load mass m lbs (kg) Load mass m lbs (kg) 20 20 11 (5) 11 (5) 16 16 12 12 2.2 (1) 2.2 (1) 0.22 (0.1) 0.22 (0.1) 10 50 100 200 10 50 100 200 Eccentric distance L (mm) Eccentric distance L (mm) (3) 50 stroke or less, V = 400 mm/s (4) Over 50 stroke, V = 400 mm/s 220 (100) 220 (100) 100 100 110 (50) 110 (50) 80 80 63 63 50 50 22 (10) 22 (10) 40 40 11 (5)

Compact Guide Cylinder

/MGPKM Horizontal Mounting m m MGPKFM12 to 50 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 100 100 50 50 50 50 32, 40 32, 40 32, 40 10 10 32, 40 25 25 Load mass m [kg] Load mass m [kg] 20 20 25 20 16 16 25 20 12 12 16 1 1 16 12 12 0.1 10 30 50 51 100 200 0.1 10 30 50 51 100 200 Stroke [mm] Stroke [mm] L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 100 100 50 50 50 50

Compact Cylinder with Lock Series CLQ

A B B RLQ 93.5 30.5 40.5 83.5 93.5 10 to 50 75, 100 Rod end nut 50 40.5 43.5 MLU Head Side flange style: CLQG50 MLGP ML1C 67 50 35 B + Stroke 9 8 4 x 6.6 76 89 A + Stroke Head Side Flange Style (mm) Stroke range Without auto switch With auto switch Bore size (mm) A A B B Rod end nut 92.5 30.5 40.5 82.5 92.5 10 to 50 75, 100 50 40.5 33.5 Double clevis style: CLQD50 7 4 x M6 x 1 Cap bolt 14

CLQ

If it is long, this may cause unlocking malfunction and reduce the lock's service life, etc. 100 100 50 50 Load weight (kg) Load weight (kg) 100 100 80 80 10 10 63 63 5 5 50 50 40 40 32 32 1 1 0.5 MPa 0.4 MPa 0.5 MPa 0.4 MPa 25 25 0.5 0.5 20 20 100 500 Maximum speed (mm/s) 100 500 Maximum speed (mm/s) Extension Locking, Rubber Bumper Retraction Locking, Rubber Bumper 200 200 100 100 W 50

1.63

25 26 100 101 200 Stroke (mm) Stroke (mm) MGPWL32 to 63, MGPWA32 to 63 (27) L = 50 mm, V = 400 mm/s or less (28) L = 100 mm, V = 400 mm/s or less 100 100 63 63 63 63 63 Load mass m (kg) Load mass m (kg) 63 50 50 50 50 50 10 10 50 40 40 40 40 40 40 32 32 32 32 32 32 1 1 10 50 51 100 101 200 10 50 51 100 101 200 Stroke (mm) Stroke (mm) 510 Compact Guide Cylinder/Wide Type MGPW Series Construction

CQM

-35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 110 135 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75

Compact Cylinder with Lock Series CLQ

75, 100 Rod end nut 52.5 40.5 50 43.5 Front flange type: CLQF50 50 67 A + Stroke 18 9 B + Stroke 35 4-6.6 89 76 Front flange type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B A B 93.5 30.5 40.5 83.5 93.5 10 to 50 75, 100 Rod end nut 40.5 50 43.5 Rear flange type: CLQG50 50 67 4-6.6 89 76 8 9 A + Stroke B + Stroke 35 Rear flange type (mm) Stroke range Without