SMC Corporation of America
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(Page 77) 8200 0x2008 0 R Temperature PD conversion equation: a F32 N 8210 0x2012 0 R Temperature PD conversion equation: b F32 N 8220 0x201C 0 R Flow peak value S16 N 0xFF9C to 0x0258 (-100 to 600) 8230 0x2026 0 R Flow bottom value S16 N 8400 0x20D0 0 R Pressure PD conversion equation: a F32 N Refer to "Inclination and intercept to the unit specification".

VXP Note 2) Cv Effective area (mm2) Flow rate characteristics Max. operating pressure differential Min. operating pressure Port size Body material Orifice diameter (mm) Model Max. system Weight (g) pressure (MPa) differential Note 1) (MPa) AC DC C b 2.0 2.4 2.4 1.3 0.9 1.5 5.0 5.5 9.5 VXR 390 390 390 350 350 350 740 740 860 1390 5430 6840 8440 8.5 9.2 9.2 5.6 4.8 7.2 18.0 20.0 38.0 1/4 (8A

Station n L1 L2 Station 2 66 46 Station 20 408 388 3 85 65 4 104 84 5 123 103 6 142 122 7 161 141 8 180 160 9 199 179 10 218 198 11 237 217 12 256 236 13 275 255 14 294 274 15 313 293 16 332 312 17 351 331 18 370 350 19 389 369 63 Series SYJ7000 Type 40: Bottom Ported/SS5YJ7-40Stations -01 [ ]: AC Approx. 300 (Lead wire length) Grommet (G) L1 L2 4-4.5 (For mounting) 10 1.5 (DIN 2.8) 15.3

(Pitch) n x Rc 1/8 (R port) L Dimension n L n: Stations 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 VV061 VV100 V100 S070 VQD VQD-V VK VK VT 1415 A VK300 Series Type 40 Manifold/Base Mounted (Bottom ported) VV3K3-40Stations -

WETTED MATERIALS Polysulfone, Silicone, Buna-N TEMPERATURE RANGE 40 150 F (4 66 C) REPEATABILITY < +/1% F.S.

End Lock Cylinder Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2Q 40, 50, 63, 80, 100 Series CBA2 How to Order L L 150 150 Y7BW 50 50 H H N N CBA2 CDBA2 Without auto switch With auto switch Number of auto switches With auto switch Nil S n 2 pcs. 1 pc. n pcs.

Flow Direction Symbols on Body Meter-out type Meter-in type Flow Rate and Effective Area Symbol JIS Symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 Metric size 4, 6 8, 10 1/8" 5/32" 3/16" 1/4" 6 6, 8 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size Flow rate l/min (ANR) Controlled flow (Free flow) 500 600 700 1200 1300 175 295 350 75 {N R/min}

1/8 (R port) S070 VQ L Dimension n: Stations VKF n L 20 399 388 19 380 369 18 361 350 17 342 331 16 323 312 15 304 293 14 285 274 13 266 255 12 247 236 11 228 217 10 209 198 9 190 179 8 171 160 7 152 141 6 133 122 5 114 103 4 95 84 3 76 65 2 57 46 1 38 27 L1 L2 VQZ VZ VS VFN 4-5-7 8 Series VK300 Type 40 Manifold Base Mounted (Bottom ported) VV3K3-40Stations -01 Grommet: G DIN terminal: D

1/8 2(A) port VKF 23 8 19.5 VQZ VZ VS VFN L Dimension n: Stations n L L1 L2 L3 1 37 27 13 2 56 46 32 3 75 65 51 4 94 84 70 5 6 132 122 108 7 151 141 127 8 170 160 146 9 189 179 165 10 208 198 184 11 227 217 203 12 246 236 222 13 265 255 241 14 284 274 260 15 303 293 279 16 322 312 298 17 341 331 317 18 360 350 336 19 379 369 355 20 398 388 374 113 103 89 4-13-9 10 Series VKF300 Dimensions

For IITV00-n Total weight (g) Stations (n) x 100 + 130 (Weight of end block A, B assembly) + Weight (g) of DIN rail Note 2) Specifications other than the following are optional.

O P Q J K L M N O P Q Part no.

wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 5 Series VKF300 Dimensions

wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 5 Series VKF300

Dimensions (mm) A B C D E F G K L M N P Model IDFA100F IDFA125F Port size R2 670 460 335 107 700 1120 1276 267 1375 20 712 752 R2 1/2 700 655 350 78 935 IDFA150F E D B 10 note) A G F C N M L K Note) In addition to the overall length of the body, the filter mounting part (bracket) projects 10 mm.

Option VFS 2 position single solenoid F: With foot bracket (2 position single type only) Body option VS4 1 0: Individual exhaust for the pilot valve VQ7 2 position double solenoid EVS Note) Do not remove the factory installed bracket from models with the bracket option. 2 VFN PE port 3(R) port 3: Common exhaust type for main and pilot valve 3 position closed center Thread type 3 Nil Rc F N

40 74.0 39.0 + st 125 N 50 76.0 44.5 + st 195 N 63 91.0 44.5 + st 310 N 80 93.0 53.0 + st 500 N 100 104.0 57.5 + st 785 N e.g. 63mm bore, 100mm stroke, Ws = 20N Ws = (2kgs) 20N 144.5 91 FB1 = 20 (1+ ) = 51.76N Replacement parts: Seal kits 32 includes order No. from to , 40 100 includes from to FB1 = 51.76N 310N (from table) Therefore, side load is allowable Order No. 32 CS95-32 40 CS95

L A T C A N X 1 5 2 Made to Order Note3) Card Motor controller Note2) NIL Standard product X152 I/O cable (without shield) Option Parallel I/O NIL Direct mounting [N] NPN D Note1) DIN rail mounting P PNP I/O cable length Note3) NIL Without cable 1 1 m 3 3 m 5 5 m Note 1) The DIN rail is not included, this must be ordered separately.

(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Weight(kg) 3.15 3.35 3.55 3.75 3.95 4.15 4.35 4.55 4.75 4.95 5.15 5.35 5.55 5.75 5.95 6.15 6.35 6.55 6.75 6.95 0.53 Additional weight for lock(kg) 4 Model LEFS40 Stroke(mm) 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 Weight(kg) 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33

Electric Actuator / Miniature Rod type 2.1 Specification Model LEPY 6 LEPY 10 Stroke [mm] 25, 50, 75 Screw lead [mm] 4 8 5 10 Basic 14 20 7 10 25 50 12.5 25 Pushing force [N] Note1) Note 6) Compact 24 40 12 20 Horizontal Basic 2 1 6 3 Compact 4 2 Work load [kg] Note2) Note3) Note6) Vertical Basic 0.5 0.25 1.5 1.0 Compact 1.5 1.0 Basic 10 to 150 20 to 300 Note4) 10 to 200 20 to 350 Note4

slpm 6 slpm 10 slpm 15 slpm 20 slpm 10 to 20 slpm 21 to 50 slpm 51 to 100 slpm 101 to 200 slpm 201 to 350 slpm Tolerance of metered flow 25 slpm N/A 1) Tested with Helium gas inlet pressure 125 psig (0.9 MPa) 2) At 80 psig (0.55 MPa) N2 110 Diaphragm Valve for Ultra High Purity Air operated type (Two Step) Series AP3571 & 4571 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow