5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1 5 6 7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L n Formula: L1 = 11.5n + 55.5, L2 = 11.5n + 73 n: Stations (Maximum 24 stations) Dimensions 24 331.5 349 375 385.5 23 320
(mm)
8 #4 !9 @0 #8 #1 @8 @2 r $0 #6 #5 $2 @6 @7 $5 !5 !0 !6 !2 $3 u $1 #9 y #3 @9 #0 !4 @4 @3 @5 @1 !7 e !1 $4 o i w q t 40 Extension locking (F) #3 @9 #0 !4 @2 #7 !8 #4 #1 !9 #8 @0 @8 #2 r $0 #5 #6 $2 @6 @7 !3 $5 !5 !0 !6 !2 $3 u $1 #9 y !7 e $6 $4 !
1/8 1/4 10-SYJ72M 1/8 1/8 1/8 1/8 C6 C8 Type 10-SS3YJ7-40 Type 10-SS3YJ7-41 Base mounted for internal pilot 10-SYJ74M 1/4 1/4 Type 10-SS3YJ7-42-01 Type 10-SS3YJ7-42-C6 1/4 Type 10-SS3YJ7-42-C8 Note) The values are for individually operated 2 position type manifold bases.
/Set 2 121 Get/Set 4 1 122 Get/Set 4 2 123 Get/Set 4 124 Get/Set 1 IO *1 Polled I/O IO Output Input 0 4 byte 4 byte 1 10 byte 2 20 byte 3 12 byte 4 byte 4 10 byte 5 20 byte 6 20 byte 4 byte 7 10 byte 8 20 byte 9 36 byte 4 byte 10 10 byte 11 20 byte 125 Get/Set 2 JOG *1 IO 20 - 3IO IO Number Type Name 100 Input 101 Input 102 Input 14 110 Output 111 Output 112 Output 12 113
Normal output, reversed output Switch output (During SIO mode) Maximum load current 80 mA Maximum applied voltage (NPN output) 30 VDC Internal voltage drop (Residual voltage) 1.5 V or less (Load current 80 mA) Delay time 3 5 ms or less, 0 to variable from 60 s/0.01 s increments Response time 4 3 ms or less Hysteresis Variable from zero 5 Protection Over current protection Input type Voltage
input Voltage free input of 0.4 V or less (reed or solid state type) for 30 ms or longer 2-screen display (Main screen: 4-digit, 7-segment, 2-colour; red/green, Display method Sub screen: 6-digit, 11-segment, White) Display updating frequency 5 times/sec.
OUT2: Orange) Digital filter 4 Variable at 0 to 30 s/0.01 step -86No.PS-OMV0009-E Product No.
filter 4 Variable at 0 to 30 s/0.01 step -82No.PS-OMV0004-H Product No.
Proper tightening torque N.m Nominal thread size 1/6 rotation after tightening by hand M5 13.6N.m R 1/4, NPT 1/4, G 1/4, URJ 1/4, TSJ 1/4 3. Apply wrench only to the metal part of the main housing when installing the pressure switch onto the system piping.
4 Variable at 0 to 30 s/0.01 step -83No.PS-OMY0007-A Product No.
Normal output Reversed output P_1 = A (A B)/4 n_1 = B + (A B)/4 A = Maximum pressure H_1 = (A B)/2 H_1 = (A B)/2 B = Minimum pressure In the OUT2 setting, the above P_1, n_1 and H_1 will be P_2, n_2 and H_2 respectively.
Ion polarity Switch setting Positive ion emission 8 Negative ion emission 9 4) Wiring of power supply cable Connect the dedicated power supply cable.
(12 V ) 600 (24 V ) 50 3 ()Low 0.4 V 5 ms 3 1/2 7 LCD 2 (/) 2% F.S.1 digit(253 ) ON OUT1OUT2 1 2 3 -50No.PS-OMM0002CN-F ISE80() ISE80H() ZSE80() ZSE80F() IP65 050 -1060 () 3585RH AC250 V 1 2 M (DC50 V ) 3F.S.(25 ) 3 (N.P) 3.52 m 4 (A.B) 0.15 mm 2(AWG26) 5 (R.T.S.V) 0.95 mm CE UL/CSA RoHS 02 N02 F02 C01 A2 B2 R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 () 117 g 118 g 114 g
Screw shall be tightened 1/4 to 1/2 turns more after touched correctly.
KBZ1-06 16 Rc 3 8 Applicable tubing Bulkhead Female Connector: KBE Female Connector Union: KBH T Connection thread Applicable tubing O.D. 4 Model Model KBH1-R1S KBH2-R1S KBH2-R2S KBE1-04 KBE1-06 KBE2-06 R 1 8 Air Supply Port: KBE, KBH, KBB, KBS, KBL (P. 15-3-114, 115) 6 KBH2-R3S KBH3-R2S KBH3-R3S KBH3-R4S KBH4-R3S KBH4-R4S R 1 2 R 3 8 R 1 2 R 3 8 R 1 4 R 3 8 R 1 4 KBE2-08 KBE2-10 KBE3-08
Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
Add/dEC OUT1 (29 ) OUT1 OUT1 ( [n2dH]) ( [n2AH]) 3 1 3 6 6 1 6 3 1 1 4. [F 2] OUT2 -37No.PF-OMN0011CN-C d. ([ tP]) 4. [F 2] OUT2 e. ([ tPL]) [ tPH] or [ tnH] ([ tPH]) 4.