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Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

D o n o t m a k e a n y a l t e r a t i o n s t o t h i s p r o d u c t . Alterations made to this product may lead to a loss of durability and damage to the product, which can lead to human injury and damage to other equipment and machinery.

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Connector SS5Y3-50(R)F -01l(D) Stations U D B 1 2 D side U side L3 L4 (DIN rail mounting hole pitch: 12.5) 5.3 Manual override 45.1 (Pitch) P = 12.5 Applicable connector: D-sub equivalent ( ) JIS-X-5101 MIL-C-24308 ( ) Push-turn locking slotted type: Press, then rotate it.

08/10 Dual flow fitting SSQ2000-52AP. 44 P. 46 P. 47 P. 48 C10 N11 P R D side U side Individual SUP spacer SSQ2000-P-3Silencer (for EXH port) EXH block plate SSQ2000-B-R Port plug VVQZ2000-CP P. 44 P. 46 P. 47 P. 48 C8 L8 P R D side SMC AN200 U side Special wiring specification (-K) D-sub connector Individual EXH spacer SSQ2000-R-3Back pressure check valve (-B) SSQ2000-BP Built-in silencer

comparator) Setting range 0xFF9C to 0x044C (-100 to 1100) 1043 0x0413 0 R/W S16 600 Y tWH1 (Temp. window comparator hysteresis) Setting range 0x0 to 0x0258 (0 to 600) Setting of OUT1 hysteresis (Temp. window comparator) 1044 0x0414 0 R/W U16 100 Y -82No.PF-OMV0006-B Product individual parameters (continued) Index Sub Access 1 Parameter Data Data Initial value storage 3 Set value 4 Remarks

D-A7wH D-A80H D-F7w D-J79 D-A9wV D-A7w D-A80 D-A73C D-A80C D-F7wW D-J79W D-F7BAL D-F79F D-F7NTL D-M9wWV D-M9wAVL D-F7wWV D-F7BAVL D-M9wV D-F7wV D-J79C Number of auto switches D-A9w D-A79W D-P3DWw With 1 pc. 5 5 10 10 15 15 20 15 With 2 pcs. 5 10 10 15 15 20 20 15 The applicable auto switches for the CDQ2 R/ V (water resistant) are the D-M9 A(V)L type.

Bar + High voltage power supply module + Controller IZT 40 34 D 1 6H R 3 F U IZT 41 34 D 1 6H R 3 F U Transistor InputOutput IZT 41 34 D 1 6H R L T R F U IO-Link Model Symbol Model Emitter cartridge type / Materials Bar length Symbol Type Type Symbol Length (mm) Symbol Length (mm) 40 Standard type D High speed static Tungsten 16 22 160 220 82 820 neutralization cartridge L E Silicon

Auto Switch Mounting Height [mm] Auto switch model D-F5m D-J59 D-F59F D-F5mW D-J59W D-F5BA D-F5NT D-Y59m D-Y7P D-Y7mW D-Y7BA D-Z7m D-Z80 D-M9m D-M9mW D-M9mA D-A9m D-A9mV D-M9mV D-M9mWV D-M9mAV D-A5m D-A6m D-A59W D-Y69m D-Y7PV D-Y7mWV D-P3DWA D-P4DW D-G39 D-K39 D-A3m D-A44 Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 27.5 23 30.5 23 32.5 25 35 24.5

Digital flow switch Air combination Spacer Spacer with bracket Pipe adapter PF3A701H AC30#-D Y300-D Y300T-D E300-#03-D PF3A702H AC40#-D Y400-D Y400T-D E400-#04-D : For more information about the options, refer to our website (URL https://www.smcworld.com). -17No.PF-OMX0007-A Do not apply torsion or bending moment other than the weight of the product itself.

Magnet 2 Pieces S 1 Piece n n Pieces M O U N T I N G See NCJ2 Accessories Section A P P L I C A B L E A U T O S W I T C H B Basic D Double Clevis L Axial Foot F Rod Side Flange P O R T L O C AT I O N O N H E A D C O V E R B O R E/S T D S T R O K E(H U N D R E D T H S O F A N I N C H) R In-Line Perpendicular 10 (3/8) 050. 100. 150, 200, 300, 400, 500, 600 16 (5/8) 050, 100, 150, 200, 300,

32 30 D Z CQ2 B R 32 to 100 30 M9BA B CDQ2 32 Z R D With auto switch With auto switch (Built-in magnet) Number of auto switches Mounting B A L F G D Nil S n 2 pcs. 1 pc. n pcs.

R port R port P port P port A, B port A, B port Type of connection Type of connection VV5Q11 VV5Q21 16 Series VQ1000/2000 Kit (D-sub connector) F VV5Q11 VV5Q21 D-sub connector reduces installation labor for electrical connections.

, D-Z76, D-Z80 D-Y59A/Y69A, D-Y59B/Y69B, D-Y7P/Y7PV D-Y7NW, D-Y7NWV, D-Y7PW/Y7PWV, D-Y7BW/Y7BWV Auto switch specifications Reed switch Solid state switch 10-16-1 2 Series MVGQ Valve Mounted Cylinder Precautions Be sure to read before handling.

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 <R type> <R type> 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

R port R port P port P port A, B port A, B port Type of connection Type of connection VV5Q11 VV5Q21 381 A VQ1000/2000 Series Kit (D-sub connector) F VV5Q11 VV5Q21 D-sub connector reduces installation labor for electrical connections.

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 <R type> <R type> 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

Symbol Name Initial value Unit PC02 *ZTY Home position return type 0h PC03 *ZDIR Home position return direction 0001h PC04 ZRF Home position return speed 500 r/min PC05 CRF Creep speed 10 r/min PC06 ZST Home position shift distance 0 m PC07 *ZPS Home position return position data 0 10STM m PC12 JOG Jog speed 100 r/min PC24 *COP3 Function selection C-3 0h PC30 *DSS Remote register-based position