VZ3000

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

A_HEC-OM-K001

Remote off alarm 5 Fig.6-4 occurrence 6.1 How to Identify Alarm 6-1 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.2 Alarm indication BLINK E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig. 6-1 Alarm indication in the event ERR14 occurs BLINK E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig. 6-2 Alarm indication in the event ERR14 occurs during PB range setting input LIGHT W R N P

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(mm) Auto switch model Bore size Bore size Auto switch model 20 to 32 40 to 80 63 80 D-A9/A9V 20 25 32 40 50 8 9.5 8 8 8.5 9.5 9.5 D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL Note) q BMP1-032 w BMG2-012 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL BMY3-016 4.5 4.5 5 5 5 6.5 6 D-Z7/Z80 D-Z7/Z80 D-Y5/Y7P D-Y7W D-Y6/Y7PV D-Y7WV D-Y7BAL 10 10 11 13 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL q BMP1-032 6 5 6

5 Port Solenoid Valve SY Series

rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Transfer

D-X 719

Cylinder with Lock

Auto Switch Mounting Height [mm] Auto switch model D-F5m D-J59 D-F59F D-F5mW D-J59W D-F5BA D-F5NT D-Y59m D-Y7P D-Y7mW D-Y7BA D-Z7m D-Z80 D-M9m D-M9mW D-M9mA D-A9m D-A9mV D-M9mV D-M9mWV D-M9mAV D-A5m D-A6m D-A59W D-Y69m D-Y7PV D-Y7mWV D-P3DWA D-P4DW D-G39 D-K39 D-A3m D-A44 Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 27.5 23 30.5 23 32.5 25 35 24.5

CLS

model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F D-A59W D-F5NTL Bore size (mm) Bore size (mm) A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 2 75.5 69.5 74.5 70 116 126 4.5 4.5 9.5 9.5 0 0 2 140 140 2 81 76.5 80 76.5 124 134 4.5 4.5 9.5 9.5 0 0 2 160 160 2 89 87.5 88 87.5 134.5 144.5 4.5 4.5 9.5 9.5 0 0 2 180 180 7.5 97.0

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

AC Servo Motor Driver (Pulse input type/Positioning type)

When the servo motor rotation speed of point table No.3 is changed from 2500 (r/min) to 1000 (r/min) . display a. When the "MODE" button on the driver operation is pressed, the display will be shifted as shown below. Select "P-1". U UP P D DO OW WN N b.

PFxx-OMA1007

to "AMS20/30/40/60A-R/N/F#D" for dimensions other than "A" and "F".

AC Servo Motor Driver (CC-Link Type)

Symbol Name Initial value Unit PC02 *ZTY Home position return type 0h PC03 *ZDIR Home position return direction 0001h PC04 ZRF Home position return speed 500 r/min PC05 CRF Creep speed 10 r/min PC06 ZST Home position shift distance 0 m PC07 *ZPS Home position return position data 0 10STM m PC12 JOG Jog speed 100 r/min PC24 *COP3 Function selection C-3 0h PC30 *DSS Remote register-based position

Step Motor Controller

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D L11 L21 Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

Compact Guide Cylinder

D-G

C95Series

OIl-Delay time 200 +/50mS Series CD5 Auto Switches D-A64 D-A59W D-853, A53 Reed Type Internal Circuit ~"e C) t ~R.o Reed sWltch Luminous diode Z"'" diode Zener dtlXle Surge absOtber D-A54, D-A44 D-A67 Reed sw~ch Zener dlode Indicator light I Operation R., ON Black (+) OperaUng (-) "'"!

DOC1023125

D o n o t m a k e a n y a l t e r a t i o n s t o t h i s p r o d u c t . Alterations made to this product may lead to a loss of durability and damage to the product, which can lead to human injury and damage to other equipment and machinery.

Guide Cylinder Series MGG

Contact P/A in this case. 1 Guide Cylinder Series MGG Models and Specifications JIS symbol Models and strokes Long stroke (mm) Standard stroke (mm) Model Bearing type Bore size (mm) 20 250, 300, 350, 400 75, 100, 125, 150, 200 25 350, 400, 450, 500 MGGM Slide bearing 32 350, 400, 450, 500, 600 40 350, 400, 450, 500, 600, 700, 800 75, 100, 125, 150, 50 350, 400, 450, 500, 600, 700, 800, 900

Metal Seal/Rubber Seal Series VQ Body Ported

(One label for each) D side U side SUP/EXH block bush assembly SUP Block bush assembly 5(R1) 1(P) 3(R2) D side U side R1 P R2 VVQ1000-87A-B-50 Shut off label 7.8 ~ =6.5 2(B) 4(A) 2(B) 4(A) When ordering a block bush incorporated with the manifold, a block indication label is attached to the manifold. 2.8 10.5 R P R R P R R P R SUP passage blocked EXH passage blocked SUP/EXH passage

Industrial Filters

ORIENTATION 2 x R DRAIN A B C FQ1 OUT IN OUT R3/4 FN Rp1/4 203 203 R3/4 EB ES DRAIN R3/4 90 90 260 DRAIN FGES type (V-band type) (mm) FGEL type (V-band type) (mm) FGET type (Bolt tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931

Cylinder with Lock

Auto Switch Mounting Height (mm) D-B5 D-B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7BAL D-Y7W D-A9 D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL D-P4DWL D-A3 D-G39 D-K39 D-A44 D-Y69 D-Y7PV D-Y7WV D-A5 D-A6 D-A59W D-A9V D-P3DW Bore size (mm) Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Hs Hs Hs Ht 40 50 63 80 100 30 30 31 30 34 30 30 30 30

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 <R type> <R type> 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.