HRS100/150

Applicable model Minimum operating flow rate [L/min] (50/60 Hz) HRS-BP007 HRS100-28/42 HRS150-q To circulating fluid return port y To circulating fluid outlet r t w u r t r e r Parts List No.

SFOD-OMT0009CN

600 700 800 600 700 800 [mm/s] 500 250 1000 900 630 550 500 420 330 250 230 180 [mm/s] 10 5 20 12 6 () [mm/s] 17 9 33 20 10 () LEFS32 H A B [mm] 24 16 8 [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 [mm/s] 24 16 8 () [mm/s] 39 26 13 () 108 No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm

JXCx-OMT0001CN

600 700 800 600 700 800 mm/s 500 250 1000 900 630 550 500 420 330 250 230 180 [mm/s] () 10 5 20 12 6 [mm/s] () 17 9 33 20 10 LEFS32 H A B [mm] 24 16 8 [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 mm/s 1200 930 750 610 500 500 410 340 250 200 170 [mm/s] () 24 16 8 [mm/s] () 39 26 13 -108No.JXC-OMT0001CN-C LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 mm/s

SFOD-OMT0010

600 700 800 600 700 800 Max. speed [mm/s] 500 250 1000 900 630 550 500 420 330 250 230 180 Min. speed [mm/s] (Independent and 10 5 20 12 6 interpolation) Min. speed [mm/s] 17 9 33 20 10 (Speed tuning control) Model LEFS32 Lead symbol H A B Lead [mm] 24 16 8 Stroke [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 Max. speed [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 Min. speed

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Note 3) This data is considered typical but not guaranteed. 10-9 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w

Refrigerated Air Dryers Series IDF/IDU

1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AMH AME IDFA55E, IDFA75E AMF A R B SF SFD Q E LLB D AD GD G F C M N L P K 4 x 13 R Dimensions (mm) A B C D E F G K L M N P Q Model IDFA55E IDFA75E Port size 800 (868) R 2 470 855 (128) (273) (110) 13 500 75 700 526 (110) 519 900 (968) 67 Series IDFAE Options 1 For How to Order optional models, refer to pages 62 and 65.

Series IDG

0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet air flow rate l/min (ANR) Outlet air flow rate

ML2B

(ML2B) (CE1-R) DO-ring Parts sorting: To classify the different types of parts.

energy saving effect

Applicable model Minimum operating flow rate [L/min] To circulating fluid outlet r t HRSH100-20 w HRSH150-HRSH200-HRSH250-W25 r q HRS-BP005 y HRSH250-AHRSH300-A40 To circulating fluid return port r t u r e Parts List No.

mb1

3 r !5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

PF2A/PF2W

PF2A511/521/551 Component Parts Material ADC NBR PBT Stainless steel PBT PBT No. q w e r t y Description Attachment Seal Spacer Mesh Body Sensor Flow direction Operating Unit Descriptions Connectors Connectors shown below are applicable (female contact).

Modular F.R.L. Unit

r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.

Mechanically Jointed Rodless Cylinder Series MY1

MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Air Cylinder Series CA2

7 r !4 !8 !6 !2 t u !5 o !1 !

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

4 q y r !3 !2 t o w e !0 !5 !6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 25, 32 Option @4 @1 @3 @0 !9 @2 Scraper Stroke adjuster u w !1 !8 (32 only) No. Description Material Note Component Parts No.

CLS

8 t #6 #7 #8#5#9 r $7 %5 MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ^3 $2 ^9 &0 ^8 CNA 180, 200, 250 For iron tube Description Material Note Component Parts CNS No. No.

MTS

8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Rod cross section for 12, 16, 20, and 25 D-X 20Rod cross section for 32 and 40 Data With end lock 12 to 40 y !7 !6 q !

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

LG1H

AC servo motor S6 S R Standard cable (Absolute encoder) 100 W PNP 1pc. Robotic cable (flexible cable) PNP 2pcs.

Modular F.R.L. Unit

Note 2) Use a bushing (part no: 131368) when connecting R 1/8 pressure gauge to R 1/16 gauge port. Note 3) Not applicable to AW10. Accessory part no.