MB

, 250, 300, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400

energy saving effect

r Power supply: 200 VAC Note 5) q Facility water temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: 20C, r Load: Same as the cooling capacity, t Circulating fluid flow rate: Rated flow, y Power supply: 200 VAC, u Piping length: Shortest Note 6) With the pressure control mode by inverter.

HRS100/150

, r Power supply: 200 VAC Note 5) q Facility water temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: 20C, r Load: Same as the cooling capacity, t Circulating fluid flow rate: Rated flow, y Power supply: 200 VAC, u Piping length: Shortest Note 6) When circulating fluid outlet port pressure return port pressure = 0.25 MPa.

Membrane Air Dryer

300 400 500 0 100 200 300 Outlet air flow rate (L/min [ANR]) Outlet air flow rate (L/min [ANR]) IDG50A, 50HA IDG60, 60H Outlet air atmospheric pressure dew point (oC) Outlet air atmospheric pressure dew point (oC) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 P1 = 0.5 MPa P1 = 0.5 MPa 10 10 P1 = 0.7 MPa P1 = 0.7 MPa 20 20 IDG60 30 30 IDG60H IDG50A 40 40 IDG50HA 50 50 0 200 400 600 800 0 200 400 600 800

7

R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

Table of Contents

Male thread type Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Part no.

VZ100/300/500

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

Series AP500

No pressure gauge (Connections: 1/4 inch face seal male) 0 Porting Configuration -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig V3 L 1 H 2 4 10 40 -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa r r e Sample Order Number Port w q w

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

7 5.5 32 2 14 44 40 Up to 200 7 6.6 38 2 18 53 40 Up to 200 8 6.6 46 2 25 61 50 End boss is machined on the flange for E.

42

/set) When supplying two different pressures to one manifold, this is used to shut off between stations with different pressures. 11.8 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked SUP passage blocked Indication labels to confirm the blocking position are attached.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Floating Joint

: JA JA180 200--X530 Center of sphere M M U U D Width across flats F 60 B E H G P A R Dimensions (mm) DMaximum operating tensile and compressive force (N) Center of sphere R Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B D E F G H Weight (kg) Nominal size Pitch -X 180 JA180-40-150-X530 40 1.5 191 61 96 16 36 28 70 118 49 3 71000 5.3 Technical Data 200 JA200

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

REA/REB

, 300 500 10 150, 200, 300, 400, 500 750 15 1 axis 200, 300, 400, 500, 600 1000 20 200, 300, 400, 500, 600, 800 25 1200 25 2 axes 200, 300, 400, 500, 600, 800, 1000 1500 32 Note 1) Strokes exceeding the standard strokes are available as a special order.

Air Cylinder

With auto switch Single acting, Spring extend 6 r o u i e w y t !6 !5 !8 !1 !0 !2 !4 !3 !7 ! ! With auto switch 10, 16 r o u i e w y t !6 !5 !0 !2 !3 !4 !7 !8 !1 ! With auto switch Component Parts No.

Smooth Cylinder/Low Speed Cylinder

Through-hole: CQ2YB/CDQ2YB Both ends tapped style: CQ2YA/CDQ2YA CDQ2YA Both Ends Tapped (mm) O1 thread Bore size (mm) R R O1 R 32 M6 x 1.0 10 40 M6 x 1.0 10 50 M8 x 1.25 14 2 x P (Rc,NPT,G) (Port size) H thread effective depth C Auto switch Lead wire min. bending radius 10 4 x N through 8 x O counterbore F Q D Z M E J W E M K L B + Stroke A + Stroke Rod end male thread Width across flats

0.4

(R2) (R1)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQC2301 VQC2401 VQC2300 VQC2400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQC2501 VQC2500 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC2A01 VQC2B01 2(B) 4(A) 4(A) 2(B) r 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) VQC2C01 2(B) 4(A) 1(P) 5(R1) 3(R2)

Compressed Air Cleaning Filter Series

P Q S R Drain cock Gray: N.C.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40