CM2

With Rod Boot Data l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 36 17 32 72 85 97

VQ7-6/7-8

type Rubber seal type VQ7-6-FG-SVQ7-6-FG-S-R VQ7-6-FG-DVQ7-6-FG-D-R FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R VQ7-6-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

33

To circulating fluid return port e r Part no. Applicable model HRS-BP001 HRSE012-A-(-T) HRSE018-A-(-T) HRSE024-A-(-T) To circulating fluid outlet q r Parts List No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

C95Series

Rod Center Mounting Basic Fool ,r ' flange , trunn~~~ 1 !

PF2A/PF2W

Maximum measured Maximum measured Minimum measured Minimum measured Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2 PF2A511--2 PF2A521--2 PF2A551--2 10 50 100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214

Clean Air Module

AME Digital flow switch AMF Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Filter Restrictor Regulator ZFC SF SFD LLB LLB AD GD Nominal filtration rating: 0.01 m Nominal filtration rating: 0.01 m (Filtration

VQC

Individual EXH spacer VVQ1000-R-1-C6 EXH shutoff position: Specify 2 positions.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

DSM-60S DSM-60S DSM-75S DSM-75S (H) Cast iron r t y u i o !

CE

3 @3 r t @5 e !1 @1 @1 @4 @6 !4 @6 !4 u @8 !5 @0 !8 !9 i Parts list Parts list Description Material Note Description Material Note No. No.

5 Port Solenoid Valve, Series VQC

Note 4) For external pilot option, "-R", indicate the external pilot specification "R" for the applicable valves as well. Note 5) The built-in silencer type does not satisfy the IP67 standard.

AC Servo Motor Driver (Pulse input type)

Symbol Name Initial value Unit PC01 STA Acceleration time constant 0 ms PC02 STB Deceleration time constant 0 ms PC05 SC1 Internal speed command 1 100 r/min PC06 SC2 Internal speed command 2 500 r/min PC07 SC3 Internal speed command 3 1000 r/min PC08 SC4 Internal speed command 4 200 r/min PC09 SC5 Internal speed command 5 300 r/min PC10 SC6 Internal speed command 6 500 r/min PC11 SC7 Internal

Solid State Auto Switches

Refer to page 500 for CDA2-Z, page 557 for CDA2 and CDBA2. Dimensions (mm) D-G5NB 11.2 33 4 SMC 14 12 9.5 Indicator light 6.5 4.5 mounting hole DD14.3 Most sensitive position (16) 1619 Made to Order Specifications: Solid State Auto Switch Refer to SMC website for the details of the products conforming to the international standards.

EXxx-OMZ0016

Connection status of the NFC reader/writer When the PC detects the NFC reader/writer connected to its USB port, "R/W detected" is displayed. Otherwise, "R/W not-detected" is displayed.

Speed Controller with One-touch Fitting

0 q r !2 ASD q t AS y !3 r t AS-FE u w i KE i o AS-FG y !0 u AS-FP w e AS-FM Meter-in type Meter-out type !4 !1 Meter-in type Meter-out type AS-D Seal method: Sealant For R, NPT thread Seal method: Sealant For R, NPT thread AS-T e !1 ASP !0 o q r ASN !2 t AQ q w ASV r y AK u t VCHC i i ASR ASQ !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

600 1000 2000 3000 6000 12000 PF2M7(-L) 0.001 L/min 0.01 1 0.02 2 0.01 L/min 0.05 5 Dry air N2 Ar CO2 0.1 10 Thermal type (MEMS) 0.3 25 0.1 L/min 0.5 50 1 100 1 L/min 2 200 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PFMC(-L) Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/

ISO Cylinder

20 20 8 36 22 6 M8 x 1.25 71 84 96 109 134 159 25 22 10 36 22 8 M10 x 1.25 74 87 99 112 137 162 187 Auto Switch Made to Order Bore size Stroke Item Reference (Wh) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 12.5 25 37.5 50 75 100 23.5 10.5 51 64 76 89 114 139 25 12.5 25 37.5 50 75

Power Clamp Cylinder

30 to 90 CKZT80-A015B 30 to 90 80 CKZ80-42 3680N-R A B C 30 to 105 CKZ80-42 3680N-R D E F 30 to 105 For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended.

Bag Filter

Foundation bolt L1 (mm) Nominal thread size d M16 L1 R Applicable model d1 S L Part No. (Approx.) (Approx.) FGF-OP05 Hexagon nut d FGF1-20 16 40 71 31.5 400 R d1 FGF3-40 AI-3S M20 20 50 90 40 500 FGF5-60 S Note) 3 foundation bolts are required per filter unit. If ordering only foundation bolts, order 3 bolts using the above part number.

HRX-OM-X084

Model number Serial number Type and quantity of refrigerant How to read the serial number y R 001 April 2020 W R 001 Year Symbol Remarks Month Symbol Remarks Serial no. 4 R Repeated from O to Z in alphabetical order, with O for January and Z for December 2020 y 2021 Z 5 S Repeat ed from A to Zin alphab etical order 2022 A 6 T Fig 1-1 Position of product label HRR Series 1.4 Product Label