LEC-OM07605CN

PA10] ON DB RD ONRDON SA OFFSAOFFSAON ((X0.05)+20)r/min 20r/min VLC VLCONOFF ZSP ZSPON[Pr. PC07] 1) OFF 70 r/min 2) 3 20 r/min ON 50 r/min () [Pr. PC07] 0 r/min [Pr. PC07] ON -50 r/min 20 r/min OFF () -70 r/min 4 ZSP ON () OFF 50r/min(1)ZSPON 70r/min(2)ZSPOFF 50r/min(3)ZSPON-70r/min(4)ZSPOFF ZSPON 2Or/min 3 16 3.

2/3 Port Valve

R P A Energized closed (N.O.) R P A Common (C.O.)

Power Valve: Economy Valve Series VEX5

Basic type Select type Model VEX5504 06 10 VEX57-10 12 VEX59-14 20 P1 P1 VEX VEX Description Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Air operated External pilot solenoid valve 3(R) 3(R) Pressure gauge 1(P) 3(R) 3(R) 1(P) P2 P2 P3 P1 P1 3(R) 3(R) 3(R) 3(R) 1(P) 1(P) P2 P2 Note) With this valve, the port 3(R) is a supply port and port 1(P) is an exhaust port. 2441

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

7 r Bumper Urethane rubber Piston rod Hard anodized Aluminum alloy !8 t Hard chromium electronplated Wear ring Resin Tube rod Carbon steel tube !

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

Hand Valve Series VH 1

/400 VM 8 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 VR 4 3 VH 1 9 VHS 7 4 (B) 3 (R) 1 (P) 2 (A) 2 VH600 6 5 4 1 7 1 (P) 2 (A) 4 (B) 2 3 (R) Component Parts Material VH200/300/400 Zinc die-casted Aluminium die-casted Description No.

Hand Valve Series VH

400 VM 8 5 6 VR 4 3 VH 1 9 VHS 7 4 (B) 3 (R) 1 (P) 2 (A) 2 VH600 6 5 4 1 7 1 (P) 2 (A) 4 (B) 2 3 (R) Component Parts Material VH200/300/400 Zinc die-casted Aluminium die-casted Description No.

CP95

, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500

CP95

, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500

Industrial Filters

ORIENTATION 2 x R DRAIN A B C FQ1 OUT IN OUT R3/4 FN Rp1/4 203 203 R3/4 EB ES DRAIN R3/4 90 90 260 DRAIN FGES type (V-band type) (mm) FGEL type (V-band type) (mm) FGET type (Bolt tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931

mb1

3 r !5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

70astamb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

V

Max Vacuum Pressure* 0.5 0.7 1.0 1.3 mmHg (Torr) 5 12 24 40 Max Suction S Type 660 (100) 8 20 34 70 Flow Rate L Type 360 (400) / / / / L Type 400 (400) 10 20 34 68 Air Consumption S Type 660 (100) 10 20 34 68 L Type 360 (400) H O W T O O R D E R ZH V A C U U M E J E C T O R *Vacuum pressure is quoted as mmHg below atmospheric (Torr Absolute) 1 Torr = 0.0197PSI D ZH D I M E N S I O N S M

Table of Contents

LVA LVH A R P 3 port N.C. PA LVD N.C.

LEC-OM071xx

Pn081 Pn100 2 Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 Speed Loop Integral Time Constant Pn101 15 to 51200 0.01 ms 2000 Immediately Tuning Pn102 2 Position Loop Gain 10 to 20 0.1/s 400 Immediately Tuning Pn103 2 Moment of Inertia Ratio 0 to 20 1% 100 Immediately Tuning 5.8.1 Pn104 2 2nd Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 2nd Speed Loop Integral Time

ISO Cylinder

401 to 500 20 20 8 36 22 6 M8 x 1.25 71 84 96 109 134 159 25 22 10 36 22 8 M10 x 1.25 74 87 99 112 137 162 187 Auto Switch Made to Order Bore size Stroke Item Reference (Wh) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 12.5 25 37.5 50 75 100 23.5 10.5 51 64 76 89 114 139 25 12.5 25

Modular F.R.L. Units

IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

0.4

-STA1) 120 80 4 46.2 ERR T/R RUN (35) 0 1 DIP SW.

100

6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

LEC-OM069xx

Pn081 Pn100 2 Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 Speed Loop Integral Time Constant Pn101 15 to 51200 0.01 ms 2000 Immediately Tuning Pn102 2 Position Loop Gain 10 to 20 0.1/s 400 Immediately Tuning Pn103 2 Moment of Inertia Ratio 0 to 20 1% 100 Immediately Tuning 5.8.1 Pn104 2 2nd Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 2nd Speed Loop Integral Time Constant