3 Port Solenoid Valve Metal Seal Series VZ200 1

wire length) With light/surge voltage suppressor Max.10 80 82.5 74.9 300 300 (Lead wire length) S070 L side 18 15.4 Manual override (Non-locking) VQ 300 7 4 2-4.3 mounting hole With light surge voltage suppressor (Lead wire length) 17.3 31.4 VKF 2-M5x0.8 4-Rc 1/8 26 VQZ R side 49.5 VZ VS Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 33 2 43 65 3 59 81 4 75 97 5 91 113 6 107 129

VZ3000

Grommet (G), (H) VZ3 20-M5 G H 3 4 5 VZ3420 VK Manual override (Non-locking) VZ3520 VZ (Lead wire length) (Mounting hole for manifold) VF G: 300 mm H: 600 mm VFR VP4 VZS VFS VS4 (Mounting hole) VQ7 2-M5 x 0.8 (PE port) EVS VFN (Piping port) L plug connector (L) VZ3 20-L-M5 M plug connector (M) VZ3 20-M-M5 3 4 5 3 4 5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196

17

MGPA80-300 MGPA20-300 0.5 0.3 MGPA80-250 MGPA80-200 0.4 0.25 MGPA20-200 0.2 MGPA20-150 0.3 MGPA80-100 MGPA80-150 0.15 MGPA20-100 0.2 0.1 MGPA20-50 MGPA80-50 0.1 0.05 0 0 0 20 40 60 0 50 100 150 200 Load from lateral direction (N) Load from lateral direction (N) MGPA25 MGPA100 0.6 Plate displacement amount (mm) Plate displacement amount (mm) 0.7 MGPA100-400 0.6 0.5 MGPA25-400 MGPA100-300

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

SNJ-016B SN-020B SN-032B SN-040B Applicable bore size (mm) 15 20 25, 32 40 10 Series CY3R Direct Mount Type Magnetically Coupled Rodless Cylinder How to Order CY3R 25 300 Y7BW Number of auto switches Direct mount type Nil 2 pcs. Piping type S 1 ps, Nil Both sides piping type n "n" pcs.

0.4

Selection of Function [N] is not required.

MXW

Load (N) Load (N) Data MXW20/25 MXW20/25 MXW20/25 0.10 0.03 0.03 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXW25 MXW20 MXW25 MXW20 0.08 MXW25 MXW20 0.02 0.02 0.06 0.04 0.01 0.01 0.02 0 0 0 300 200 100 400 500 100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 8-7-5 6 Long Stroke Slide Table Series MXW 8, 12, 16, 20, 25

Air Slide Table Series MXW

, MXW25 MXW20, MXW25 0.10 0.03 0.03 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXW25 MXW20 MXW25 MXW20 0.08 MXW25 MXW20 0.02 0.02 0.06 0.04 0.01 0.01 0.02 0 0 0 300 200 100 400 500 100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 152 Series MXW Air Slide Table Option Specifications Stopper Bolt Assembly Stopper bolt assembly

Cylinder with Lock Series CNS

) 1 10 75 80 85 D-A9V 10 + 30 (n 2) 2 75 + 30 (n 4) 2 80 + 30 (n 4) 2 85 + 30 (n 4) 2 n (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) (n = 2, 4, 6, 8 ) 2 (Different surfaces, Same surface) 1 15 105 110 115 D-M9 D-M9W 15 + 40 (n 2) 2 105 + 40 (n 4) 2 110 + 40 (n 4) 2 115 + 40 (n 4) 2 n (n = 2, 4, 6, 8 ) (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) 2 (Different

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

32 18 (35% increase) 13.3 40 37 (61% increase) 23 LEKFS 70 LEKFS40 60 61% increase Steel ball rotation center 50 Work load [kg] 37 kg 40 Rail guide (Rolling contact surface) 30 LEFS40 20 23 kg 10 Mep LEFS m 0 0 100 200 300 L = 300 400 500 600 Overhang [mm] MTable displacement amount reduced to 1/2 Load position [mm] Load [N] Table Displacement Amount of displacement Size Table displacement

VM

N F.O.F. 4-4.5 mounting hole 2.0 mm O.T.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

200 100 0.05 0.1 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-14-13 13 Mechanically Jointed Rodless Cylinder Short Type/Basic Type Series MY3A/3B 16, 25, 40, 63 How to Order MY3 A 16 300 LS M9B Type Number of auto switches Nil S n Short type (Rubber bumper) Basic type (Air

Plate Cylinder

5 to 300 5 to 300 5 to 300 5 to 300 (mm) (mm) Rod End Female Thread P TN TF Model MM N NC ND NE NS NX NY S ZZ MM M6 x 1 depth 12 ZZ 69 72 75 92 96 H 14 14 15 18 21 Model MUB25 MUB32 MUB40 MUB50 MUB63 MUB25 MUB32 MUB40 MUB50 MUB63 NPT1/8 NPT1/8 NPT1/4 NPT1/4 26 28 36 42 46 6 6.5 8 10 11 91 98 105 127 131 43 45 44 54 53 55 58 60 74 75 16.5 18 18.5 24 24 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18

IDG

Note 2) They are not applicable in case the thread type is N or F.

ZP

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

C85

Same side Different sides Different sides 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-C7 D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7 50 15 10 50 + 45(n 2) D-C80 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF ) 10 + 35 (n = 2, 4...) ( n2 2 15 + 45 (n = 2, 4...) ( n 2 ) 2 10 5 65 15 10 65 + 50(n 2) D-F7V D-J79 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-J79C D-A79W 60 + 55(n 2) 60 15 10 D-F7W D-J79W ) 15 + 35 (n

C85

Same side Different sides Different sides 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-C7 D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7 50 15 10 50 + 45(n 2) D-C80 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF ) 10 + 35 (n = 2, 4...) ( n2 2 15 + 45 (n = 2, 4...) ( n 2 ) 2 10 5 65 15 10 65 + 50(n 2) D-F7V D-J79 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-J79C D-A79W 60 + 55(n 2) 60 15 10 D-F7W D-J79W ) 15 + 35 (n

SMC Pneumatic Clean Series

"n" pcs.

CNG

301 to 400 20 to 300 301 to 400 22 19.5 17 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l ZZ H e f h ZZ 20 25 32 40 M4 x 0.7 depth 7 5 6 M8 x