MB MRQ L1 = L1 = L1 L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1 = L1 Q1 = M L1 = K axis T axis L1 Q1 Q1 (mm) Q1 Q1 L1 L1 Size Thread M 3 x 0.5 M 4 x 0.7 M 5 x 0.8 M 6 x 1 M 8 x 1.25 M10 x 1.5 Rc 1/8 Q1 (mm) 20 30 15 10 40 J axis Z axis (mm) Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 4.2 5 6.8 8.5 8.2 2.5 2.5 3.3 2.5 3.3 4.2 5 20 10 15 30 40 Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x
2-5H7 depth 5 (96.7) (49.6) 60 132.2 100 110.8 35.5 (60) 94 96.7 35.5 D-m D-m 71.5 43.5 Motor 60 102 60 42 E-MY E-MY (60) 60 128 7.5 8.2 60 60 5.5 2 x 9.5 counterbore depth 5.4 7.5 50 5 71.7 17.5 7.1 (Max. 10.1) 4 x M5 x 0.8 depth 9 37 6 9.5 5H7 Long hole depth 5 T-slot section for mounting 6 198 + Stroke 2 x 2 x 5.5 through hole Encoder cable on actuator side (4 wires) Noise filter Note
ZY 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.
Axial piping available (6, 10) Compact Type Dual-Rod Cylinder Series CXSJ 6, 10, 15, 20, 25, 32 How to Order Piping Standard piping (6 to 32) Axial piping (6, 10) Nil Nil TN TF Standard piping Axial piping Port thread type Nil Port position M thread Rc1/8 NPT1/8 G1/8 6 to 25 P Port position 32 CXS P 6 M 50 F9BW J S Number of auto switches Compact type Nil S n 2 1 n M L Bearing type Slide
Cable length (L) 1.5 m 3 m 5 m SOL.A SOL.B () () (+) (+) 8 6 AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 4 stations Cable 20 core x 28AWG Triangle mark indicator position 7 5 3 1 2 4 6 8 SOL.A () () (+) (+) 19 17 5 stations SOL.B SOL.A () () (+) (+) 15 13 For other commercial connectors, use a 20 pins with strain relief conforming to MIL-C-83503. 6 stations SOL.B SOL.A () () (+) (+) 11 9 Connector
V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N o r m a l Fig. 6-3 Alarm indication in the event temp. upper and lower limit occurs LIGHT W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E Remote off Fig. 6-4 Alarm indication in the event Remote off occurs 6.2 Alarm indication 6-2 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.3 Content of Alarms Table 6-2 Content of alarm (1/2) Temp.
B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 10 20.5 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 16 22.5 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 20 24.5 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 25 33.5 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 30, 40 40.5 22 Applicable bore size (mm) Part no.
6 @0 #3 r #0 t o w !7 @2 @3 !8 #4 #5 !2 #6 #2 u e !1 !3 #1 @6 @8 @5 @7 @9 @4 Parts list Parts list Material Material No. Description Note Note No.
(mm) Q1 = M C1 = C Q2 Y L2 max Size (mm) L2-(3 x P) 10 X L1 max Q1 Size 3 5.5 to 8 Y-1 Y= 10 15 7.5 to 14 X-3 3, 4 7.5 to 9 Y-1.5 3 L2= 15 C2 = C 20 10 to 18 X-4 3, 4, 5 9 to 10 Y-1.5 L1-(3 x P) 3, 4 X = 20 30 12 to 20 X-4.5 3, 4, 5, 6 11 to 13 Y-2 3, 4, 5 L1 = Q2 = M 30 40 14 to 22 X-5 3, 4, 5, 6, 8 14 to 15 Y-4.5 3, 4, 5, 6 21 Series CRB2 Axial: Top (Long shaft side) Axial: Bottom (Short
No. 20 21 22 23 24 25 26 27 28 460.5 82.9 29 L dimension 348 62.6 360.5 64.9 373 67.1 385.5 69.4 398 71.6 410.5 73.9 423 76.1 435.5 78.4 448 80.6 Weight (g) 61 Series SJ2000/3000 M Flat ribbon cable assembly AXT100 FC 1 2 3 M D-sub connector (25 pins)/Cable assembly AXT100 DS25 015 030 050 L 6 Red Triangle mark location 44 16 8 Approx. 10 2 26 25 1 W 13 1 25 14 47.04 55 (15.6) Terminal no
M-type plug connector (M) P.2 (A) 2 M-type plug connector (M) Rubber Metal VQZ100 + 1 (P) 3 (R) N.O.
C2SF-C C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C2SF-C Drain AD27-C AD27-C C2SF-J C3SF-J C4SF-J Polycarbonate C2SF-J C3SF-J AF50, AF60 C3SF-W C4SF-W C3SF-W C2SF-CJ C2SF-CJ C3SF-6 C4SF-6 C2SF-6 C1SF-6 AD17-6 C1SF-2 AD17-2 C3SF-6 C2SF-6 C1SF-6 OUT IN C2SF-6C C2SF-6C AD37-6 AD47-6 AD27-6 AD37-6 AD17-6 AD27-6 AD38-6
C2SF-C C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C2SF-C Drain AD27-C AD27-C C2SF-J C3SF-J C4SF-J Polycarbonate C2SF-J C3SF-J AF50, AF60 C3SF-W C4SF-W C3SF-W C2SF-CJ C2SF-CJ C3SF-6 C4SF-6 C2SF-6 C1SF-6 AD17-6 C1SF-2 AD17-2 C3SF-6 C2SF-6 C1SF-6 OUT IN C2SF-6C C2SF-6C AD37-6 AD47-6 AD27-6 AD37-6 AD17-6 AD27-6 AD38-6
/Z1 Option T1 Option T Flow Sensor t t EV1 EV2 PTSensor PS1 PS2 PS3 PT FL WH WH BK BK DOUT2(temp) DOUT( flow) PM DC(+) DC(-) M M OUT OUT OUT + + + 3 3 3 2 2 2 1 1 1 3 2 3 2 1 1 4 2 1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL RS232C DIO RS485 FG 13 15 16 12 10 11 14 6 8 9 3 5 7 4 1 13 15 16 12 10 11 14 1 1 11 6 8 9 3 8 3 9 6 9 3 6 7 2 5 2 5 7 10 12
Applicable shaft type: W CRQ2 MSQ (mm) MSZ Q2 Y L2 max Size (mm) Q1=M Q2=M CRQ2X MSQX 10 X Q1 L1 max Size M 4 7 to 8 Y-3 Y= 10 15 9 to 14 M4 X-5 M 5 8.5 to 9 Y-3.5 L2= L1= MRQ 15 20 M5 11 to 18 X-6 M 6 10 Y-4 X= 20 30 M6 13 to 20 X-7 M 8 13 Y-5 30 40 M8 16 to 22 X-8 M10 15 Y-6 Symbol: A5 Symbol: A6 The long shaft can be further shortened by machining it into a stepped round shaft.
6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.
Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A
For details about fixing method, refer to Wiring/Cables in the Electric Actuators Precautions. o Actuator cable length Nil Without cable 1 1.5 m 3 3 m 5 5 m 8 8 m* LER Nil: Left LEH LEY -X5 !0 Controller/Driver type*1 A 10 m* 11LEFS 11LEFS C 20 m* !