Guide Cylinder Series MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A #2 !0 !9 @0 @1 #1 A' Ball bushing bearing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 Slide bearing y Long stroke 100 @7 80, 100 View A-A Component Parts Component Parts Description No. Description No.

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6

Slide Tables MX Series

N347 Slide Tables MXH, MXS, MXQ, MXF, MXW, MXP MX Series Integrated Cylinder and Guide Bearing 6 Styles Multiple Mounting and Porting Configurations Bore Sizes from 6mm to 25mm Wide Range of Options Q Q Table of Contents Q Q Q MX Series Features .pages 4-5 Q Safety Instructions . pages 6-22 MXH .pages 9-11 MXS.pages 12-14 MXQ.pages 15-17 MXF .page 18 MXW.page 19 MXP.pages 20-21

MNB

The above screw kit is also included when D-F5BA type switches are shipped separately. 9-6-25 26 Series MNBW Construction $3 #8 @9 #2 $9 @3 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r @8 $0 w #9 $2 A C B $1 #4 !4 !3 #3 @6 #8 y $4 #5 #6 $6 !0 u @5 !6 @1 !1 $7 o $8 e B section C section #0 #1 A section !2 !2 !2 32 100 80 63 50 40 80, 100 80, 100 Description Material Note Component Parts No.

MNB

The above screw kit is also included when D-F5BA type switches are shipped separately. 9-6-25 26 Series MNBW Construction $3 #8 @9 #2 $9 @3 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r @8 $0 w #9 $2 A C B $1 #4 !4 !3 #3 @6 #8 y $4 #5 #6 $6 !0 u @5 !6 @1 !1 $7 o $8 e B section C section #0 #1 A section !2 !2 !

60

6 23.0 7.9 0.95 0.5 26.0 1.10 8 3 0.33 670 830 670 830 640 7.9 0.33 3 4.5 15 23.0 0.61 3/8 (10A) 15.0 0.61 4.5 1.0 790 640 790 640 790 6 0.95 3/8 (10A) 23.0 0.95 6 Note) Weight of grommet type.

Modular Type Regulators Series AR

Note 6) Note 6) Note 6) Note 6) Note 5) Note 5) Note 5) Note 5) Note 5) Note 5) Z Note 5) Z Note 4) Note 1) Option B, G, H are not assembled and supplied loose at the time of shipment.

VDW

Model Port size P B B1 E F C D J K M Grommet Q R 20 VDW1 VDW2 M5 42.5 15 4 11 15.5 30 20 10 6 11 M2.5 M5, 1/8 52 5 15 17 36.5 22 11 8 13.5 M3 Body material Stainless Steel Grommet D 300 Q F Full wave rectifier (AC type) R E C A 2 x P Port size B B1 M 2 x J thread depth K (mm) Mounting method Electrical entry Model Port size P A B D E F B1 C J K M Grommet Q R 52 VDW1 VDW2 12 20 15 6 11 M2.5

Fieldbus system EtherCAT compatible SI Unit

020 mA 7 420 mA 3 010 V 4 05 V 080E 5 15 V 6 020 mA 7 420 mA 0 C(Celsius) 080F 1 F(Fahrenheit) 4 2 wires 0810 5 3 wires 6 4 wires 0 Direct(No Swap) 1 Swap 16bit 0811 2 Swap 32bit 3 Swap all 0 Deactivated 1 IOL_Manual 0812 2 IOL_Autostart 3 DI_C/Q 4 DO_C/Q 0 No Device check 1 Type compatible Device V1.0 0813 2 Type compatible Device V1.1 3 Type compatible Device V1.1 , Backup + Restore 4 Type

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

6 @6 @3r !8 @4 !9 w !3 !0 @2 ut !5 !4 @0 !1 !2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 @0!5 @9@3@4 r!8w!9 !3 i!0 @2ut!6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !4 y e !1 !2 @3 @1 q !4y e !1 !2q @1 CXSL20 to 32 @0 !5!6@3@4r!

Smooth Cylinder/Low Speed Cylinder

4 6 21.5 4 6 6 4 8 1.5 [1] 6 3.5 6 3.5 22.5 10 7.5 10 25 7.5 2.5 10 7.5 4.5 3.5 [1] 7 5.5 7 5.5 24.5 11 9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.

Free Mount Cylinder

6 Seal kit includes !4, !5, !6.

CRBU

Refer to pages 11-13-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 6 for Precautions on every series. Component Parts Note No. q w e r t y u i o !0 !

SZ3000

Refer to page 6 for the weight of DIN rails. 18 Cassette Type Manifold Series SZ3000 Manifold Exploded View Type 60 (non-plug-in) manifold U side q e DIN rail holding screw r t w D side DIN rail holding screw y Description No. Part No.

Air Slide Table Series MXP

6 !5 i q w !0 !3 o r !4 u Component Parts Component Parts Note No. Description Note No.

Series AP500

Pressure gauge unit 2) w q w q w q Unit psig/bar MPa Code No code MPA Sample Order Number Port AP1001S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 2PW 3PW 3PW 4PW 2) Pressure gauge unit MPa or psig/bar selectable.

HRL

Select the proper size of cable according to an actual condition. 5 Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series Operation Display Panel Items displayed on the home screen and setting items are shown in List of check items in inspection monitor menu. w q e r o !0 !1 !2 !3 !4 t y u i !5 !6 !7 !8 !

REA/REB

9 @1 q !5 !4 y i !0 !6 @0 #3 r #0 t o w !7 @2 @3 !8 #4 #5 !2 #6 #2 u e !1 !3 #1 @6 @8 @5 @7 @9 @4 Parts list Parts list Material Material No. Description Note Note No.

High Purity Chemical Valve

Metric 3, 4, 6 6, 8, 10 10, 12 Inch Valve type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 Symbol Type Basic type N.C.

EXxx-OMW0014CN

IO-Link DI DO StandardIO StandardIO 2 0x00 . 9-4 X0 X1 X2 X3 IO-Link 1 2 3 4 IO-Link 2 (I/Q) Bit 1 Bit 3 Bit 5 Bit 7 EX245-LA1 (EX245-LB1 0) 4 (C/Q) Bit 0 Bit 2 Bit 4 Bit 6 DO 2 4 (C/Q) Bit 0 Bit 2 Bit 4 Bit 6 DI() 9.5.