Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: M, Plumbing Thread Nominal: M5, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.5, Insulation Class: B, Pipe opening type (details): Body Ported Type,

Electric Actuator

to 500 10 LEFS16 100 to 400 10 4 5 to 250 5 Series LECP6 20 7.5 12 to 500 12 LEFS25 100 to 600 20 15 6 to 250 6 Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (

7ND9071en

mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm or 3/8" 67.0 67.0 60 121 7380 1 10 mm or 3/8" 75 189 11500 1 10 mm or 3/8" 502 195 11900 1 10 mm or 3/8" 130.0

70pvpump

LVD Refer to the separate pamphlet P-E00-5A for further details.

Brake mechanism added

0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Pushing completed position End position 50 - 10.

Step Motor Controller (Servo / 24 VDC)

Product Specifications 3.1 Basic specifications The basic specifications of this controller are as follows: Item Specifications Compatible motor Step Motor (Servo / 24 VDC) Power voltage: 24 VDC +/-10% Max. current consumption: 3A (Peak 5A) *3) Power supply *1) *2) (for both of motor drive power control power, stop, lock brake release) Parallel input 11 inputs (photo-coupler isolation) Parallel

High performance type Step Motor Controller (Servo/24 VDC)

Product Specifications 3.1 Basic specifications The basic specifications of this controller are as follows Item Specifications Compatible motor Step Motor (Servo / 24 VDC) Power voltage: 24 VDC +/-10% Max. current consumption: 3A (Peak 5A) *2) Power supply *1) (for both of motor drive power control power, stop, lock brake release) Parallel input 11 inputs (photo-coupler isolation) Parallel

Compact manifold regulator ARM5 Series

IN side OUT side Fitting size Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y 4, 5/32 2.5 6 11 35.5 6 3 12.5 19 35.5 3 6.5 11 36 1/4 3 12.5 19 35.5 6.5 6 11.5 38.5 8, 5/16 5 13.5 21 38.5 ARM5AB Centralized supply type (DIN rail mount) n = Number of stations for regulator block L2 L2-10.5 L1=(14 x n)+56 11.5 Y Pressure gauge (Accessory) 10 10 14 14 16 10 10 5.3 W V T

pa

LVD Refer to the separate pamphlet P-E00-5A for further details.

Ejector Valve Unit, Series ZYY/ZYX

10 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) ZY -10S Max. vacuum pressure: 84KPa {630mmHg} Y3 X3 ZY -10L Max. vacuum pressure: 53KPa{400mmHg} Y3 X3 Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow

Ejector Valve Unit Series ZYY/ZYX

-20 -20 10 -20 0 0 5 10 15 20 25 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S Y3 X3 ZY -10L Y3 X3 Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics -100 -100 -100 -100 Suction flow rate (l/min(ANR)) Air consumption

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

ZS-20-5A-501 pc.

LECP6_C

(P.16) 9 - 4ON DC24V LED POWER ALARM LEDPWR LEDALM CN4 I/O 12.P.48 5() , () 6 10 - 3. 3.1.

Return Filter

Table 6-9 Rating Soldering terminal Rated voltage Resistance load 250 VAC 5A (3) Other performance Table 6-10 Other specifications Item Specifications Insulation resistance 100 M or more (Measured by 500 VDC, insulation resistance tester. ) Contact resistance 30m or less Between terminals with the same pole AC1000V 50/60Hz 1min Between charged metal part and ground AC1500V 50/60Hz 1min Withstand

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Top ported, Options: external pilot, built-in silencer, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MANIFOLD, VALVE, NEW SY3000 MFLD, UJ, NEW SY3000 MFLD, FITTING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Top ported, Options: external pilot, built-in silencer, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MANIFOLD, VALVE, NEW SY3000 MFLD, UJ, NEW SY3000 MFLD, FITTING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Top ported, Options: external pilot, built-in silencer, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MANIFOLD, VALVE, NEW SY3000 MFLD, UJ, NEW SY3000 MFLD, FITTING

EX180-SMJ3_5_eng

DG DG DG SLD SLD SLD CC-Link-dedicated cable FG CC-Link-dedicated cable 5 FG FG DIP SW.1 DIP SW.2 ON EX180 Series for CC-Link 6 1 Figure 2 PWR(V) PWR L ERR 0 1 2 3 4 5 6 7 8 9 10 1 2 1 Thank you for purchasing an SMC EX180 Series Fieldbus device (Hereinafter referred to as "SI unit").

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MANIFOLD, VALVE, NEW SY3000 MFLD, UN, NEW SY3000 MFLD, FITTING