Symbol: 11 (Body Ported), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Bracket: 1 (Bracket), Lead Wire Length: Grommet, 300mm; Light/Surge: No, CE Compliant: Q (CE Compliant)

Symbol: Body Ported, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: None, Bracket: Bracket, Lead Wire Length: Grommet, 300mm; Light/Surge: No, CE Compliant: CE Compliant

Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: M, Plumbing Thread Nominal: M5, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.5, Insulation Class: B, Pipe opening type (details): Body Ported Type, Voltage: 24 V DC, Option: Bracket, Power Consumption(W): Inrush: 2.5 / Holding: 1,

Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: M, Plumbing Thread Nominal: M5, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.5, Insulation Class: B, Pipe opening type (details): Body Ported Type, Voltage: 24 V DC, Option: Bracket, Power Consumption(W): Inrush: 2.5 / Holding: 1,

Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: M, Plumbing Thread Nominal: M5, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.5, Insulation Class: B, Pipe opening type (details): Body Ported Type, Voltage: 12 V DC, Option: Bracket, Power Consumption(W): Inrush: 2.5 / Holding: 1,

Table of Contents

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

ZP

M6 x 1 A8 M8 x 1 G J J 04 4 06 6 08 8 Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

One-touch Fittings

[mm] 4 1/8 KQ2D04-01P 12 8.2 15.8 22.6 21.5 13.3 5.7 6 3.2 8.2 6 6 3.6 9.1 1/4 KQ2D04-02P 17 8.2 15.8 26 22.5 13.3 5.7 6 3.2 8.2 6 6 3.6 19 O N L1 M 6 1/8 KQ2D06-01P 12 10.4 16.8 23.6 23.6 13.3 6.7 6 3.2 10.4 13.9 11 5.4 9.7 1/4 KQ2D06-02P 17 10.4 16.8 27 24.6 13.3 6.7 6 3.2 10.4 13.9 11 5.4 19.3 3/8 KQ2D06-03P 21 10.4 16.8 26.5 24.1 13.3 6.7 6 3.2 10.4 13.9 11 5.4 27.6 Q 8 1/8 KQ2D08-01P

Table of Contents

6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

Table of Contents

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Table of Contents

1 !5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

NCQ2/CQ2

1, !2, !3, !6, 1@, @8 50 grease pack. 63 Warranty and Operating Instructions 80 100 CBQ2B100-PS Seal kit includes !0, !1, !2, !3, !6, 1@, @8.Order the seal kit based on each bore size. The seal kit does not include a grease pack, order it separately.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Table of Contents

6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Note Note No. q Description Material No. Description Material Bushing B !

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VFR200-F(-Q) 2 to 8 VFR2 10-G VFR210-E VFR210-T VFR210-D(-Q) VFR210-L VFR210-M Note) Side/Bottom 1 4 1 4 1 8, C6, C8 Non plug-in type VV5FR2-10(-Q) 2 to 15 Note) Side ported and bottom ported cannot be taken at the same time.

Modular F.R.L. Units

Applicable Model Applicable Model Model AF20-A AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Model AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 30 AF A X425 2 03 B 30 AF A 2 03 B X430 q w t y e r For high pressure q w y e r t Semi-standard: Select one each for a to c.

Compact Cylinder

Weight (g) (g) Additional Weight Weight 12 16 20 25 32 40 50 63 80 100 1 1.5 1 0.7 0 49 54 52 29 Cylinder stroke (mm) Bore size (mm) Both ends tapped Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 43 64 94 134 182 269 45 175 116 96 56 1 3 2 1.3 0 62 67 63 35 3 6 4 2 2 147 131 124 78 3 12 8 3 3 169 153 144 114 6 26 17 5 3 12 142 180 165 151 6 27 17 7 7 12 154 214 198 196 6 53 32 13

Table of Contents

6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

smcmaintenancepartslist

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

2/3 Port Valve

Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.