Brake mechanism added

, 8, ) Note 1) 90 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 20 + 35 (n 2) (n = 2, 3, 4, ) (Different surfaces) D-A44C n 75 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 55 + 50 (n 2) (n = 2, 3, 4, ) (Same surface) 1 10 75 80 90 2 (Different surfaces, Same surface) 1 15 90 95 80 85 105 D-Z7/Z80 D-Y59/Y7P D-Y7W (n =

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

0 0 1 0 1 6 0 0 0 1 1 0 6 0 0 0 1 1 0 7 0 0 0 1 1 1 7 0 0 0 1 1 1 8 0 0 1 0 0 0 8 0 0 1 0 0 0 9 0 0 1 0 0 1 9 0 0 1 0 0 1 10 0 0 1 0 1 0 10 0 0 1 0 1 0 11 0 0 1 0 1 1 11 0 0 1 0 1 1 12 0 0 1 1 0 0 12 0 0 1 1 0 0 13 0 0 1 1 0 1 13 0 0 1 1 0 1 14 0 0 1 1 1 0 14 0 0 1 1 1 0 15 0 0 1 1 1 1 15 0 0 1 1 1 1 16 0 1 0 0 0 0 16 0 1 0 0 0 0 17 0 1 0 0 0 1 17 0 1 0 0 0 1 18 0 1 0 0 1 0 18 0 1 0 0 1

Step Motor Controller (Servo / 24 VDC)

0 0 1 0 0 0 9 0 0 1 0 0 1 9 0 0 1 0 0 1 10 0 0 1 0 1 0 10 0 0 1 0 1 0 11 0 0 1 0 1 1 11 0 0 1 0 1 1 12 0 0 1 1 0 0 12 0 0 1 1 0 0 13 0 0 1 1 0 1 13 0 0 1 1 0 1 14 0 0 1 1 1 0 14 0 0 1 1 1 0 15 0 0 1 1 1 1 15 0 0 1 1 1 1 16 0 1 0 0 0 0 16 0 1 0 0 0 0 17 0 1 0 0 0 1 17 0 1 0 0 0 1 18 0 1 0 0 1 0 18 0 1 0 0 1 0 19 0 1 0 0 1 1 19 0 1 0 0 1 1 20 0 1 0 1 0 0 20 0 1 0 1 0 0 21 0 1 0 1 0 1 21 0 1

High performance type Step Motor Controller (Servo/24 VDC)

1 0 0 0 9 0 0 1 0 0 1 9 0 0 1 0 0 1 10 0 0 1 0 1 0 10 0 0 1 0 1 0 11 0 0 1 0 1 1 11 0 0 1 0 1 1 12 0 0 1 1 0 0 12 0 0 1 1 0 0 13 0 0 1 1 0 1 13 0 0 1 1 0 1 14 0 0 1 1 1 0 14 0 0 1 1 1 0 15 0 0 1 1 1 1 15 0 0 1 1 1 1 16 0 1 0 0 0 0 16 0 1 0 0 0 0 17 0 1 0 0 0 1 17 0 1 0 0 0 1 18 0 1 0 0 1 0 18 0 1 0 0 1 0 19 0 1 0 0 1 1 19 0 1 0 0 1 1 20 0 1 0 1 0 0 20 0 1 0 1 0 0 21 0 1 0 1 0 1 21 0 1 0 1

pa

PAP: Clean room LVH Note 1) 1 to 12 l for 3/8" tubing type. Note 2) The above values are for a normal temperature and using clean water. LVD Refer to the separate pamphlet P-E00-5A for further details.

Compact manifold regulator ARM5 Series

Length 136016-1A 136016-2A 136016-3A 136016-4A 136016-5A 136016-6A 136016-7A 136016-8A 136016-9A 136016-10A 16 14 1 SRH 28 2 42 3 SRP 56 4 70 5 SRF Tie-rod for centralized supply block 84 6 98 7 ITV 112 8 126 9 IC 140 10 For 1 station 14 mm x 1 station = 14 mm Length ITVH For adding a regulator Tie-rod part no.

Ejector Valve Unit Series ZYY/ZYX

Y 3 X 3 ZZY 45 J 1 U Note 1) With ejector Number of ejectors 1 to 10 Enter the following together with the manifold number: 1. Part no. of solenoid for SY3000/SX3000 2. Part no. of ejector valve for ZYY3000/ZYX3000.

Ejector Valve Unit, Series ZYY/ZYX

00 18 ZSE1 00 14 ZSE1 00 55 ZSE1 00 15 ZSE1 00 16 Model X129 (X130) X129 (X130) X129 (X130) X129 (X130) X129 (X130) X129 (X130) X129 (X130) Diffusion type semiconductor pressure sensor Sensor type 0 to 101kPa {0 to 760mmHg} Set pressure range 1 to 10% of set pressure (variable) Hysteresis 1 to 10% of set pressure (variable) 3% full span or less (fixed) 1% full span or less Repeatability

LECP6_C

(1) D 51 - 1-149 RESET SVON (1) D 1-150 D RESET SVON (1) 1-192 E ON(SVON ON) 1-193 E ONSVON ON 1-194 E 1-195 E 1-196 E EEPROM 1-197 E EEPROM 10 CPU CPU CPU 1-198 CPU E 1 SV1.00 RESETSVONSETUP 52 - 13. / A 50mm () () 5m 5m 10% 15m 20% 53 - 14 / 14.1 LE () EMG 1000 1 54 - /Best Pneumatics No UL UL1310 Class2 14.2 55 - 14.3 90~100 DC24VSVON a) b) c) d) e) 56 -

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

1 2 1 to 10% of set press.

Return Filter

Symbol Differential pressure indication Symbol Nominal filtration 0 None 4 Differential pressure indicator standard 074 74m 5 Differential pressure indication switch 105 105m 003 3m Table1-1 Port size (Rc) 005 5m Non-standard 010 10m Port size Threaded connection 020 20m Symbol 040 40m 149 149m 06 3/4 270 270m 08 1 10 1 1/4 12 1 1/2 16 2 20 2 1/2 24 3 10 / 17 FGX-OM-F001-A 2.

EX180-SMJ3_5_eng

(URL http://www.smcworld.com) or contact SMC directly. 625 kbps 0 0 1 3 FG SLD DG DB DA Shield Yellow White Blue 2.5 Mbps 1 0 0 2 4 5 Mbps 1 0 1 10 Mbps 0 0 1 FG SLD DG DB DA Safety Instructions HOLD/CLR setting Shield Yellow White Blue Terminating resistor Communication connector for CC-Link (1 pc.)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: 10 (1000mm), CE Compliant: Q (CE Compliant)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: 10 (1000mm), CE Compliant: Q (CE Compliant)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: 10 (1000mm), CE Compliant: Q (CE Compliant)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: 10 (1000mm), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: 10 (1000mm), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: 10 (1000mm), CE Compliant: Q (CE Compliant)

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: 1000mm, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: 1000mm, CE Compliant: CE Compliant