Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: Q (CE Compliant)

Symbol: 2 Port, N.C., Function: Power-saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Function: Power-saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Function: Power-saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Function: Power-saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Function: Power-saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Function: Power-saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Function: Power-saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Function: Power-saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Function: Power-saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Function: Power-saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Function: Power-saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: CE Compliant

Electric Actuator

(Terminal no.) (16.6) (23.7) Cable length (L) [m] 1 3 5 8 A B C Connector A (7.0) 1 3 2 4 (12.7) (5.6) 1.5 3 5 8 3 2 1 (13.5) 1 4 A 1 2 (6.7) B 10 (18) 15 (14.7) 15 16 (30.7) (1 1) L Connector B 20 (10) Connector D Produced upon receipt of order Connector A terminal no. 1 2 3 Connector C terminal no. 1 2 3 Signal Cable color Red White Black U V W Connector B terminal no.

7ND9071en

[6 mm or 1/4" (x)] 1.2* 2.1* 2C 1.08 66 3/8 10 mm or 3/8" 2.4 3.0 3C 2.18 133 3/8 10 mm or 3/8" 4.8 5.2 4C 4.34 265 3/8 10 mm or 3/8" 3.2 3.7 5C 8.7 531 3/8 10 mm or 3/8" 7.5 11.0 6C 17.5 1068 3/4 10 mm or 3/8" 12.0 20.0 Air supply piping 10 mm or 3/8" for all actuators.

70pvpump

Port size on the side of main fluid Rc 3/8 G 3/8 NPT 3/8 NPTF 3/8 3/8" tubing 3/8" tubing 3/8" tubing 3/8" tubing 1/2" tubing 1/2" tubing 1/2" tubing 1/2" tubing Connection size in the side of air 03 F03 Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads PA331 (Assembled in normal environment) PAP331 (Assembled in clean room) For areas where it is not possible to manually operate the reset button

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield (3) Cable color Terminal No.

pa

Port size on the side of main fluid Rc 3/8 G 3/8 NPT 3/8 NPTF 3/8 3/8" tubing 3/8" tubing 3/8" tubing 3/8" tubing 1/2" tubing 1/2" tubing 1/2" tubing 1/2" tubing Connection size in the side of air 03 F03 Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads PA331 (Assembled in normal environment) PAP331 (Assembled in clean room) For areas where it is not possible to manually operate the reset button

High performance type Step Motor Controller (Servo/24 VDC)

6 B A-2 B-3 A-3 Yellow 5 3m 3 Green 3 Blue 4 5m 5 Shield (3) Vcc B-4 Brown 12 Actuator cable type GND A-4 Black 13 A B-5 Red 7 Nil Robot cable A A-5 Black 6 B B-6 Orange 9 S Standard cable B A-6 Black 8 3 (4) B-1 A-1 B-3 A-3 Red 4 Black 5 Brown 1 Blue 2 Electric actuator side Controller side (8) A1 (1) B1 14.2 1 (2) 2 10.2 (17.7) 14 18 L A6 B6 5 6 A1 B1 A3 B3 1 2 (5.7) (4) 15 16 11 30.7

Step Motor Controller (Servo / 24 VDC)

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

Return Filter

Maintenance parts (3) Replacement O-ring and seal bracket. See 3. Specifications 1 (7) O-ring Refer to 6. Maintenance parts (3) Replacement O-ring and seal bracket. See 3. Specifications 1 (8) Seal washer Refer to 6. Maintenance parts (3) Replacement O-ring and seal bracket. See 3. Specifications 1 11 / 17 FGX-OM-F001-A 3.