5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

(A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 VQ Note 2) 8 2 1 (P) 3 (R2) 1 (P) 3 (R2) 5 (R1) 5 (R1) 5 (R1) 1 (P) 3 (R2) VQ4 Metal seal Rubber seal 3 position closed center 3 port for mixture mounting (N.O.) (A) 4 (B) 2 (A) 4 (B) 2 Note) For inch size one-touch fittings and optional thread type, refer to page 933.

IDX-OM-M051

/2 R1/2 36 129 20 7122 350 700 752 1.3 Name and function of parts Facility water outlet Terminal block for signal Facility water inlet (Symbol: W5) (Symbol: W5) R1/2 R1/2 Refer to 6.3 Outer dimensions 6 4 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

IDX-OM-Z004

14~18) 1418) 1375 1,3 -W4 -W4 (-W4) (-W4) Y1/2 Y1/2 () R1/2 R1/2 36 129 20 7122 350 700 752 1,3 -W5 (-W5) -W5 (-W5) R1/2 R1/2 IDF100F150F-W 6 4 IDX-OM-Z004 6 IDF150F-30-W K16K (10, 0.7m) () (10, 2m) JIS 80A 10K (10,0.7m) ) (10 ( (K16K) JIS 80A 10K 2m) 20 18 t 268 217 t 20 18 t 8x23 8x19 A A 8x23 8x19 20 4x 75 A 1056 A 720 9351 1290 160 150 150 160 t K K K K K16K JIS

FGX-OM-R008

Dimensions 1) SFE11 Gasket 2) SFE42/52/53/73 Dimensions: SFE42/52/53/73 Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 3) SFE3A -6- 4) SFE4B/5C/7D Dimensions: SFE4B/5C/7D Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 5) SFE3F Applicable tube O.D. 4 6) SFE4G/5H/7J Applicable tube O.D.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

AS121F-U10/32-03T 31 5/32" 9.3 M50.8 8 9.6 4.5 0.7 27.4 4 9.3 10 0.7 27.4 10-32UNF 8 9.6 4.5 10 31 AS121F-M5-06T AS121F-U10/32-05T 11.7 16.5 3/16" 11.4 21.3 26.1 18.1 22.9 13.5 6 11.6 11.7 AS221F-01-23ST AS121F-U10/32-07T 13.5 12 18.3 23.1 1/4" 3.2 8.4 20 12.7 20 AS221F-01-04ST AS221F-N01-01ST 1/8" 8.4 20.4 27.5 4 9.3 12.7 5/32" 9.3 20.4 27.5 13.4 21 AS221F-01-06ST AS221F-N01-03ST 34.7 R1

15

R1 With shock absorber With bumper bolt Dimensions (mm) Model A B C d G GA HB HC HG HP JJ K NA NB NC D E GB HT L F GP H HA LD M MM CY1S6-Z 6 7.6 25 5 20.5 20.5 15.5 8 15.5 M4 x 0.7 M4 x 0.7 11 14 6.5 3.3 8 5 26 3 19 2 5 40 30 27 3.5 6 CY1S10-Z 7.5 12 31.5 6.5 25 27 17 13.5 17 M4 x 0.7 M4 x 0.7 10.5 16.5 8 4.4 10 5 33 6 28 2.5 6 40 34 45 4.6 6 CY1S15-Z 7.5 9.5 16.6 38 6.5 28 29.5 20.5 15

21

Double Knuckle Joint (mm) Y-020B, Y-032B Material: Iron Y-040B Material: Cast iron R1 R1 ND hole H10 Axis d9 MM MM ND hole H10 Axis d9 E1 E1 NX NZ L NX NZ L A1 U1 L1 A A1 U1 L1 A Retaining ring Split pin Included pin part no.

2-Color Display High Precision

Lead wire length 3 m M12 4-pin pre-wired connector (Lead wire length 100 mm) Symbol X501 Rated pressure range Option 2 ZSE40A ZSE40AF 0.00 to 14.69 psi 14.50 to 14.50 psi Symbol Nil K Calibration certificate Piping specifications X531 R1/8, NPT1/8 R1/8 (With M5 female thread) Option 1 01 Refer to page 17 for details.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

R1/4 (M5 x 0.8 female threaded) ON OFF NPT1/4 (M5 x 0.8 female threaded) G1/4 (M5 x 0.8 female threaded) 1 Red Green Rc1/8 2 Green Red URJ1/4 (VCR fitting compliant) 3 Red Red TSJ1/4 (Swagelok fitting compliant) 4 Green Green Output Output display Analog current output is newly added. It lights when OUT1 or OUT2 outputs. Advantageous when it is wired for a long distance.

VQ4000

Manual override VQC 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2-position double 3-position exhaust center Nil: Non-locking push type (Tool required) B: Locking type (Tool required) C: Locking type (Manual) (A) 4 (B) 2 (A) 4 (B) 2 VQC 4/5 Metal 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQZ 2 2-position double 3-position pressure center (A) 4 (B) 2 (A) 4 (B) 2 Rubber SQ 5 1 (P) 5 (R1) 3 (

VQC4000

(B) 2 VP4 Metal 4 VQ 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 Porting specications 2-position double 3-position pressure center (A) 4 (B) 2 Rubber (A) 4 (B) 2 VQ 4/5 Nil Side ported B Bottom ported 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQC 1/2 Manual override 3-position double check (A) 4 (B) 2 Note) 6 VQC 4/5 VQC 4/5 B: Locking type (Tool required) C: Locking type (Manual) Nil:

155

/4 R3/8 R3/8 R1/2 R1/2 R3/4 R3/4 R1 D H1 A L1 Reference dimension of "R" thread after installation.

Direct Operated

Note) Dew point temperature: 10C or less 4 Direct Operated 3 Port Solenoid Valve Series VX31/32/33 For Air / Single Unit How to Order (Single Unit) For Air Specifications For Water For Oil For Steam For Vacuum Pad Construction Dimensions 1 G G 5 1 VX DC 1 4 31 01 VX 1 4 31 01 R1 AC/Class B coil (Built-in full-wave rectifier type) Model Refer to Table (1) shown below for availability.

S Couplers Series KKH

Dimensions/Socket (S) Male thread type A2 A1 T D H L1 L2 (mm) A1 A2 Effective area mm L2 Body size H Width across flats T Connection male thread Minimum bore Model D Weight g When When L1 connected connected KKH3S-01MS R1/8 33.5 20.4 20.4 6 36 18.2 14 1/8 40 37.5 KKH3S-02MS R1/4 31.5 19.5 21.1 9 34 KKH4S-01MS R1/8 54.1 50.4 46.4 48.8 22.9 6 50.1 KKH4S-02MS R1/4 54.7 51 19 45 45.4 38.9 9 48.7

9.8

/8/Side ported 01 DIN rail adapter Note 5) R1/8 Piping adapter R Note 4) NPT1/8/Side ported N01 Note 3) Not available for piping specifications of 01 and N01.

Precautions 1

R1 Y (Max.)

Cylinder with Lock

Single clevis [mm] Bore size CBH14 CDH9 EB EW L MR UBh14 XD 32 26 10 65 26 0.2 0.6 12 9.5 45 200 40 28 12 75 28 0.2 0.6 15 12 52 226 50 32 12 80 32 0.2 0.6 15 12 60 245 63 40 16 90 40 0.2 0.6 20 16 70 269.5 80 50 16 110 50 0.2 0.6 20 16 90 320 100 60 20 140 60 0.2 0.6 25 20 110 353.5 Pivot Bracket: Double Clevis Pivot Bracket Double clevis pivot bracket XD + Stroke Z + Stroke EM G1 CKH9 R1

Manifold Specifications

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 K plug connector 3-7-15 Series VZS2000 How to Order Manifold Assembly Manifold Specifications Porting specifications 4(A), 2(B) Port 1(P), 5(R1) 3 (R2) Port size Rc 4(A) 2(B) Stations Please indicate manifold base type, corresponding valve, and option parts.

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

ZP

Connection thread size for pad side M5 x 0.8 Rc1/8 M6 x 1 G1/8 M8 x 1.25 NPT1/8 R1/8 No need for switching operation when changing workpieces. Multiple vacuum pads can be operated by one ejector.