Controller Series: Programless Controller, Parallel I/O Type: PNP, I/O Cable Length, m: 1.5, Option: Screw Mounting, Actuator Series: Rotary Table, Table Accuracy: Basic, Size: 30, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Controller Series: Programless Controller, Parallel I/O Type: NPN, I/O Cable Length, m: 1.5, Option: Screw Mounting, Actuator Series: Rotary Table, Table Accuracy: Basic, Size: 30, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Controller Series: Programless Controller, Parallel I/O Type: NPN, I/O Cable Length, m: w/o Cable, Option: Screw Mounting, Actuator Series: Rotary Table, Table Accuracy: Basic, Size: 30, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Controller Series: Programless Controller, Parallel I/O Type: PNP, I/O Cable Length, m: w/o Cable, Option: Screw Mounting, Actuator Series: Rotary Table, Table Accuracy: Basic, Size: 30, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Protocol: EtherNet/IP™, Mounting: DIN Rail Mounting, Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: Basic Type, Body Size: 30, Max Rotating Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Protocol: CC-Link, Mounting: DIN Rail Mounting, Cable Connector: T-branch Type, Actuator: LER, Table Accuracy: Basic Type, Body Size: 30, Max Rotating Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Oscillation Angle A: [180°] External Stopper, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.8, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible

Oscillation Angle A: [180°] External Stopper, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.8, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Standard cable

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

VBA-OM-S006

IN :VBA1 4VBA2 8 O : VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3/8) VBA1 VBA2 () VBA2 24NmM10 VBA1 3NmM5 6 OUT O O

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Note 2) Refer to parts number of Construction on the page 470 for changed part. Number indicates parts number of Construction accordingly. P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1 U1 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

Available tube connections: 5/32", 1/4", 5/16", 3/8", 1/2", 4mm, 6mm, 8mm, 10mm, 12mm; Available threaded connections: M3 x 0.5, M5 x 0.8, 10-32 UNF, R1/8, R1/4, R3/8, R1/2, NPT1/8, NPT1/4, NPT3/8, NPT1/2; Spatter covers available (ASV310F/410F/510F)

Available tube connections: 5/32", 1/4", 5/16", 3/8", 1/2", 4mm, 6mm, 8mm, 10mm, 12mm; Available threaded connections: M3 x 0.5, M5 x 0.8, 10-32 UNF, R1/8, R1/4, R3/8, R1/2, NPT1/8, NPT1/4, NPT3/8, NPT1/2; Spatter covers available (ASV310F/410F/510F)

Available tube connections: 5/32", 1/4", 5/16", 3/8", 1/2", 4mm, 6mm, 8mm, 10mm, 12mm; Available threaded connections: M3 x 0.5, M5 x 0.8, 10-32 UNF, R1/8, R1/4, R3/8, R1/2, NPT1/8, NPT1/4, NPT3/8, NPT1/2; Spatter covers available (ASV310F/410F/510F)

KQ2-G

/8, Rc3/8 04 R1/2, Rc1/2 Thread connection 1: Only for Bulkhead union and Bulkhead male elbow Spare Parts Applicable tubing O.D.

Locations), Actuator Cable Type, Length: R3 (3m), Controller: C9H (JXC9H, EtherNet/IPâ„¢), Mounting: 8 (DIN Rail)

Locations), Actuator Cable Type, Length: R3 (3m), Controller: C9H (JXC9H, EtherNet/IPâ„¢), Mounting: 8 (DIN Rail)

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: N (NPN Output), Unit Specification: M (Fixed SI Unit), Stations: 2, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge; 0.2 MPa)

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: N (NPN Output), Unit Specification: M (Fixed SI Unit), Stations: 2, Cable Option: S (Centralized Lead Wire, Lead Wire Only), Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge;