45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Vacuum System Peripherals:

Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22 1 3 to 1 8 1 2 2.4 to 9.8 Internal pilot solenoid valve 24 1 2 to 2 3

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

VCC

TQ Blanking plug (with O-ring) 1 VVCC12-10A-1 For 2 port valve Hexagon socket head plug (R1/4) 1 Blanking plug (with O-ring) 1 VVCC13-10A-1 For 3 port valve Hexagon socket head plug (R1/4) 2 647 VCC Series Specifications VCC12 VCC13 VCC12D Model Passage number 2 port 3 port Note 3) 2 port (Diaphragm type) Construction (Fluid contact material) Poppet seal (PEEK resin + Stainless steel) + Special

IDX-OM-W031

2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping. 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation

IDX-OM-W032

/www.smcworld.com/ i i-1 . i-1 i-1-1 . i-1 i-2 . i-2 i-2-1 . i-2 i-2-2 . i-3 i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-

VZ3000

2 to 20 stations D side: 2 to 10 stations U side: 2 to 10 stations M Mixed Nil Standard length (Specify a longer rail than the standard length.)

K35-OMW0030

. 18 4-2.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Blanking plug (with O-ring) 1 VVCC12-10A-1 For 2 port valve Hexagon socket head plug (R1/4) 1 Blanking plug (with O-ring) 1 VVCC13-10A-1 For 3 port valve Hexagon socket head plug (R1/4) 2 9 VCC Series Specifications VCC12 VCC13 VCC12D Model Passage number 2 port 3 port Note 3) 2 port (Diaphragm type) Construction (Fluid contact material) Poppet seal (PEEK resin + Stainless steel) + Special

51

D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

CG5-S

(Rod cover side) 2 pcs. (Different sides) 2 pcs.

CG5-S

(Rod cover side) 2 pcs. (Different sides) 2 pcs.

VFA3000

port) 2 x 18 (R1, R2 port) 1764 Series VFA3000 5 Port Air Operated Valve Dimensions: Body Ported 2 position double: VFA3230-01 02 2 x 18 (Pilot port) 2 x 4.3 (Mounting hole for manifold) Max. 3 Max. 3 2 x 4.2 (Mounting hole) 3 x , 14 18 (P , A, B port) 2-3 (Breathing port) 2 x 3 2 x 18 (R1, R2 port) SYA 3 position closed center/exhaust center/pressure center: VFA3 30-X1 3 4 5 01 02 SYJA

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Load Black Blue Relay Black Blue Load Switch 1 Switch 1 Switch 1 Load Relay contact Brown Black Blue Brown Black Blue Brown Black Blue Switch 2 Relay Switch 2 Switch 2 Indication lights up when both switches are ON. 2-wire (2 pcs.)

mlu

Switch 1 Relay contact Blue Brown Brown Brown Relay Black Blue Black Black Switch 2 Switch 2 Switch 2 Blue Blue The indicator lights will light up when both switches are turned ON. 2-wire with 2 switch AND connection 2-wire with 2 switch OR connection (Reed switch) Because there is no current leakage, the load voltage will not increase when turned OFF.

VZA2000

single: VZA4141-01 02 Pilot port (A side) M5 x 0.8 body side 2 x 4.5 Mounting hole Pilot port (A side) (R1, R2 port) (P , A, B port) 2 x Rc 18 3 x Rc , 18 14 2 x M5 x 0.8 sub-plate side 2 position double: VZA4241-01 02 Pilot port (B side) Body side Pilot port (A side) 2 x M5 x 0.8 body side 2 x 4.5 Mounting hole 2 x Rc 18 18 14 3 x Rc , 2 x M5 x 0.8 sub-plate side Pilot port (A side) (R1

VZA2000

VR VH VHS Pilot port (A side) 2-M5 x 0.8 sub-plate side (P , A, B port) (R1, R2 port) 2 position double: VZA4241--01 02 Pilot port (B side) Body side Pilot port (A side) 2-M5 x 0.8 body side 2-4.5 Mounting hole Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 5-3-7 8 Series VZA4000 Dimensions: Base Mounted 3 position closed center

Digital Pressure Switch

Connector pin numbers -18No.PS-OMM0005-J Internal circuit and wiring example Z/ISE10(F)Output specification -A NPN open collector 2 outputs Max. 28 V, 80 mA Residual voltage 2 V or less -B PNP open collector 2 outputs Max. 80 mA Residual voltage 2 V or less -C NPN open collector 1 output Max. 28 V, 80 mA Residual voltage 2 V or less Analogue voltage output Output impedance approx. 1 k -E

PSxx-OMU0005CN

K T 2 X NPN 2 Y PNP 2 A1 A R NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2

IDX-OM-V020

g 390 +/10 530 +/10 630 +/10 780 +/10 Auto drain Float type (Normally open: Min. operating pressure 0.1 MPa) Drain tube O.D. mm 12 Piping port size R1 R1 1/2 R2 Weight kg 49 68 95 110 Coating color Panel: Urban white 1 Base: Urban gray 2 IDFA60/70/80/90 Series 7.1 Specifications 7-1 IDX-OM-V020 Chapter 7 Documents Note 1: The operating range does not guarantee use with normal air flow capacity