, 400, 500600, 700, 800900, 1000, (1100)1200, (1300, 1400)1500, (1600, 1700)(1800, 1900), 200052,00020,000 (Refer to page 81 for limit according to work load and duty ratio.)

, 400, 500600, 700, 800900, 1000, (1100)1200, (1300, 1400)1500, (1600, 1700)(1800, 1900), 20002500, 3000252,00020,000 (Refer to page 81 for limit according to work load and duty ratio.)

, 800900, 1000, (1100)1200, (1300, 1400)1500, (1600, 1700)(1800, 1900), 20002500, 3000252,00020,000 (Refer to page 81 for limit according to work load and duty ratio.)

, 400, 500600, 700, 800900, 1000, (1100)1200, (1300, 1400)1500, (1600, 1700)(1800, 1900), 20002500, 3000252,00020,000 (Refer to page 81 for limit according to work load and duty ratio.)

, 400, 500600, 700, 800900, 1000, (1100)1200, (1300, 1400)1500, (1600, 1700)(1800, 1900), 20002500152,00020,000 (Refer to page 81 for limit according to work load and duty ratio.)

, 800900, 1000, (1100)1200, (1300, 1400)1500, (1600, 1700)(1800, 1900), 20002500, 3000252,00020,000 (Refer to page 81 for limit according to work load and duty ratio.)

, 800900, 1000, (1100)1200, (1300, 1400)1500, (1600, 1700)(1800, 1900), 20002500152,00020,000 (Refer to page 81 for limit according to work load and duty ratio.)

Rotary Table

Warning Do not drop, bump or apply excessive impacts (300m/s2 or more for reed auto switches and 1000m/s2 or more for solid state auto switches) while handling. Although the body of the auto switch may not be damaged, the inside of the auto switch could be damaged and cause malfunction. 2. Observe the proper tightening torque for mounting an auto switch.

ITVH

(Error number 5) Vs : Power supply 24 VDC A : Input signal 4 to 20 mA DC 0 to 20 mA DC Vs : Power supply 24 VDC Vin : Input signal 0 to 5 VDC 0 to 10 VDC 4 points preset input type Brown Blue S1 White Vs Black S2 Vs: Power supply 24 VDC (Negative common) One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2.

IZx-OMX0087

Installation distance [mm] mm 3) Energy saving static neutralization cartridge with air purge 10.0 9.0 Discharge time [s] 8.0 20L/min 60L/min 7.0 s 6.0 5.0 4.0 180L/min 3.0 2.0 1.0 0.0 0 500 1000 1500 Installation distance [mm] mm 5-2.

MB1

When excessive impact (300m/s2 or more) is applied to a reed switch during operation, the contact point will malfunction and generate or cut off a signal momentarily (1ms or less). Consult SMC regarding the need to use a solid state switch depending upon the environment. 7. Do not use in an area where surges are generated.

VCL

(Type H) VCS 20 1 G Series Lead wire length w 20 30 40 Class 2 Class 3 Class 4 300 mm 600 mm 1000 mm 1500 mm 3000 mm Nil L1 L2 L3 L4 Tilt the screwdriver down in direction q so that the clip slides out in direction w. Voltage 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC Electrical entry G C T TL Grommet Conduit Conduit terminal Conduit terminal with indicator light Clip part no.

ZR

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

3 Port Solenoid Valve

Lead wire length 46 -SCSJ3000For single solenoid: Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm 46 -DCSJ3000For double solenoid : Common specifications 46 47 For positive common For negative common For junction common How to Order Indicate the part no. of the connector assembly for the manifold and solenoid valve.

Compact 5-Port Solenoid Valve

unit p. 7 JSY3000 JSY3000 Ejector System JSY1000 JSY5000 Vacuum Unit ZK2 JSY1000/3000/5000 Series CAT.ES11-110B a Plug-in Compact 5-Port Solenoid Valve JSY1000/3000/5000 Series Series Map JSY1000 JSY3000 JSY5000 Valve width 39% reduction 36% reduction 35% reduction 6.4 mm b 10 mm 10 mm b 15.5 mm 15 mm b 24.6 mm 29% reduction 32% reduction 59% reduction 460 g b 650 g 770 g b 1140 g Weight 1500

HRL

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 Read the operation manual completely before operation, and keep this manual where it can be referred to as necessary. 14) In locations where strong impacts or vibrations occur 15)

SJ3A6

type External pilot/Pilot valve individual exhaust Not required Unrestricted 150/30 Dustproof Release pressure port 1(P) Vacuum pressure port 3/5(E) Pilot X port Operating pressure range (MPa) Ambient and fluid temperature (C) Max. operating frequency (Hz) Manual override (Manual operation) Restrictor operation Pilot method Lubrication Mounting orientation Impact/Vibration resistance (m/s2

10 to 50C35 to 85%RH (with no condensation)1500 VAC for 1 min. between external terminals and FG10 M or more (500 VDC) between external terminals and FG10 to 150 Hz with a 0.35 mm amplitude or 49 m/s2 in each X, Y, Z direction for 2 hrs (De-energized)98 m/s2 in each X, Y, Z direction, 3 times (De-energized)CE marking, UL (CSA)120 g

HRX-OM-K003

Table 8-7 Compliance EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC CE Marking Machinery Directive 2006/42/EC SEMATECH S2-93, S8-95 SEMI S2-0703, S8-0701, F47-0200 UL E229305 / UL1995 8.7 Compliance HRW Series 8-14 HRX-OM-K003 Chapter 8 Appendix 8.8 Thermo Chiller Daily Inspection Sheet Serial No. Model: Judgment Circulating fluid supply port cap Looseness IN press.

Free Mount Cylinder Series CU

Do not drop, bump, or apply excessive impacts (300m/s2 or more for reed switches and 1000m/s2 or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 5. Do not allow short circuiting of loads.