New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

FRANCE SMC Pneumatique SA KAZAKHSTAN SMC Kazakhstan, LLC. MALAYSIA SMC Pneumatics(S.E.A.)Sdn.Bhd. SPAIN / PORTUGAL SMC Espaa S.A. TURKEY (Distributor) Entek Pnmatik Sanayi ve. Ticaret S irketi THAILAND SMC (Thailand) Ltd. ITALY SMC Italia S.p.A.

Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series ø 25, ø 32, ø 40

Also, when exceeding the air cushion stroke ranges on page 1211, the piston speed should be 100 to 200 mm/s. Note 2) The piston speed is 100 to 1000 mm/s for centralized piping. Note 3) Use at a speed within the absorption capacity range. Refer to page 1211.

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Also, when exceeding the air cushion stroke ranges on page 1346, the piston speed should be 100 to 200 mm per second. Note 2) The piston speed is 100 to 1000 mm/s for centralized piping. Note 3) Use at a speed within the absorption capacity range. Refer to page 1346.

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

AC Servo Motor Driver (SSCNET Type)

Power supply is AC200V single phase (Note 4) Controller Forced Alarm forced stop stop ON OFF RA1 RA2 MC MC SK Driver Servo amplifier Servo motor NFB MC CNP1 L1 1-phase 200 to 230VAC CNP3 (Note 6) U 2 L2 U Motor [1] V 3 L3 V M N W 4 W 1 P1 (Note 1) P2 PE CNP2 P (Note 2) C [3] [2] D (Note 3) Encoder CN2 Encoder cable L11 L21 CN3 CN3 24VDC Forced stop EM1 DOCOM (Note 5) DOCOM DICOM (Note 5)

AC Servo Motor Driver (SSCNET /H Type)

Power supply is AC200V single phase (Note 4) Malfunction RA1 OFF ON MC MC SK EMG stop switch Driver Servo amplifier Servo motor MC (Note 7) MCCB CNP1 1-phase 200 V AC to 240 V AC (Note 11) L1 CNP3 (Note 6) U U L2 Motor V V L3 M [1] W NW P3 (Note 1) (Note 10) P4 CNP2 P+ [2] (Note 2) C [3] D (Note 11) (Note 3) Encoder CN2 Encoder L11 cable L21 (Note 8) Main circuit power supply CN3 EM2 24 V

mlu

DENMARK SMC Pneumatik A/S FINLAND SMC Pneumatics Finland OY FRANCE SMC Pneumatique SA GERMANY SMC Pneumatik GmbH HUNGARY SMC Hungary Ipari Automatizlsi Kft. IRELAND SMC Pneumatics (Ireland) Ltd. ITALY SMC Italia S.p.A. LATVIA SMC Pneumatics Latvia SIA NETHERLANDS SMC Pnuematics BV. NORWAY SMC Pneumatics Norway A/S POLAND SMC Industrial Automation Polska Sp.z.o.o.

KT10

FRANCE SMC Pneumatique SA KAZAKHSTAN SMC Kazakhstan, LLC. MALAYSIA SMC Pneumatics(S.E.A.)Sdn.Bhd. SPAIN / PORTUGAL SMC Espaa S.A. TURKEY (Distributor) Entek Pnmatik Sanayi ve. Ticaret S irketi THAILAND SMC (Thailand) Ltd. ITALY SMC Italia S.p.A.

VS 8-2/VS 8-4

VSS8-4: 40 msec or less, service life 200 million cycles Outstanding high-speed response and long service life Series Manifold pitch (mm) Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type 4.20 3.40 2.20 1.70 Flow-rate characteristics C Series VS 8-2/VS 8-4 S R S R 0.20 0.10 0.10 0.10 b 1.00 0.70 0.50 0.30 Note) S R S R Cv Applicable cylinder bore size (mm) Up to 80 (S/T

PF-OMN0011_C

.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] A 1-5V 1-5V 4-20mA (Hysteresis) ON OFF 90% () Ka (copy function) () 10 L/min 10 L Sa ON OFF ON OFF , , 2 5 10 L/min 5 ,10550 L ON-OFF 1 L/min ,10 11 12 1 L/min -13No.PF-OMN0011CN-C SI SI Ta ON-OFF Na ON 0 Ha -14No.PF-OMN0011CN-C M38 L(2 ) (ZS-26-B) (ZS-26-01) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC() 2 N.C

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

GERMANY SMC Pneumatik GmbH ITALY SMC ltalia SpA FRANCE SMC Pneumatique SA HOLLAND SMC Controls Bv SWEDEN SMC Pneumatics Sweden AB SWITZERLAND SMC Pneumatik AG AUSTRIA SMC Pneumatik GmbH SPAIN SMC Espafra, S.A. IRETAND SMC Pneumatics (lreland) Ltd. Asia JAPAN Oceania AUSTRALIA SMC Pneumatics (Australia) Pty. Ltd. NEW ZEALAND SMC Pneumatics (N.2.) Ltd.

Series KP/KPQ/KPG

GERMANY SMC Pneumatik GmbH ITALY SMC Italia SpA FRANCE SMC Pneumatique SA HOLLAND SMC Controls BV SWEDEN SMC Pneumatics Sweden AB SWITZERLAND SMC Pneumatik AG AUSTRIA SMC Pneumatik GmbH SPAIN SMC Espana, S.A. IRELAND SMC Pneumatics (Ireland) Ltd. SMC Pneumatics Inc.

Ozone Resistant

DENMARK SMC Pneumatik A/S FINLAND SMC Pneumatics Finland Oy FRANCE SMC Pneumatique SA GERMANY SMC Pneumatik GmbH HUNGARY SMC Hungary Ipari Automatizlsi Kft. IRELAND SMC Pneumatics (Ireland) Ltd. ITALY SMC Italia S.p.A. NETHERLANDS SMC Pnuematics BV. NORWAY SMC Pneumatics Norway A/S POLAND SMC Industrial Automation Polska Sp.z.o.o. ROMANIA SMC Romania s.r.l. RUSSIA SMC Pneumatik LLC.

SRP

DENMARK SMC Pneumatik A/S FINLAND SMC Pneumatiikka OY FRANCE SMC Pneumatique SA GERMANY SMC Pneumatik GmbH HUNGARY SMC Hungary Kft. IRELAND SMC Pneumatics (Ireland) Ltd. ITALY SMC Italia S.p.A. NETHERLANDS SMC Pnuematics BV. NORWAY SMC Pneumatics Norway A/S ROMANIA SMC Romania s.r.l. RUSSIA SMC Pneumatik LLC. SLOVAKIA SMC Slovakia s.r.o. SLOVENIA SMC Slovenia d.o.o.

Series KP/KPQ/KPG

GERMANY SMC Pneumatik GmbH ITALY SMC Italia SpA FRANCE SMC Pneumatique SA HOLLAND SMC Controls BV SWEDEN SMC Pneumatics Sweden AB SWITZERLAND SMC Pneumatik AG AUSTRIA SMC Pneumatik GmbH SPAIN SMC Espana, S.A. IRELAND SMC Pneumatics (Ireland) Ltd. SMC Pneumatics Inc.

SRP

DENMARK SMC Pneumatik A/S FINLAND SMC Pneumatiikka OY FRANCE SMC Pneumatique SA GERMANY SMC Pneumatik GmbH HUNGARY SMC Hungary Kft. IRELAND SMC Pneumatics (Ireland) Ltd. ITALY SMC Italia S.p.A. NETHERLANDS SMC Pnuematics BV. NORWAY SMC Pneumatics Norway A/S ROMANIA SMC Romania s.r.l. RUSSIA SMC Pneumatik LLC. SLOVAKIA SMC Slovakia s.r.o. SLOVENIA SMC Slovenia d.o.o.

KP/KPQ/KPG

DENMARK SMC Pneumatik A/S FINLAND SMC Pneumatiikka OY FRANCE SMC Pneumatique SA GERMANY SMC Pneumatik GmbH HUNGARY SMC Hungary Kft. IRELAND SMC Pneumatics (Ireland) Ltd. ITALY SMC Italia S.p.A. NETHERLANDS SMC Pnuematics BV. NORWAY SMC Pneumatics Norway A/S ROMANIA SMC Romania s.r.l. RUSSIA SMC Pneumatik LLC. SLOVAKIA SMC Slovakia s.r.o. SLOVENIA SMC Slovenia d.o.o.

Clamp Cylinder with Lock

FRANCE SMC Pneumatique SA UK SMC Pneumatics (U.K.) Ltd. ASIA GERMANY SMC Pneumatik GmbH BOLIVIA SMC Pneumatics Bolivia S.R.L. GREECE SMC Hellas EPE CHINA SMC (China) Co., Ltd. BRAZIL SMC Pneumaticos Do Brazil Ltda. HUNGARY SMC Hungary Ipari Automatizlsi Kft. HONG KONG SMC Pneumatics (Hong Kong) Ltd. CHILE SMC Pneumatics (Chile) S.A. IRELAND SMC Pneumatics (Ireland) Ltd.

VQ7-6/7-8

Mounting bolt M6 X 165 with SW M6 X 180 with SW M6 X 185 with SW M6 X 200 with SW Size Option mounting diagram Interface regulator Double check spacer Double check spacer Interface regulator Spacer 1 Throttle valve spacer Spacer 1 Spacer 1 Throttle valve spacer Spacer 1 Spacer 1 Spacer 1 Note 1) A throttle spacer and double check spacer cannot be combined.

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GERMANY SMC Pneumatik GmbH ITALY SMC ltalia SpA FRANCE SMC Pneumatique SA HOLLAND SMC Controls Bv SWEDEN SMC Pneumatics Sweden AB SWITZERLAND SMC Pneumatik AG AUSTRIA SMC Pneumatik GmbH SPAIN SMC Espafra, S.A. IRETAND SMC Pneumatics (lreland) Ltd. Asia JAPAN Oceania AUSTRALIA SMC Pneumatics (Australia) Pty. Ltd. NEW ZEALAND SMC Pneumatics (N.2.) Ltd.