-0.5 3 10.5 10.5 65 40 A (H) (H) 17 85 (Same measurement on 2 sides) (L) (Same measurement on 2 sides) 2 15 3 600.05 (t=1 x 1, t=0.5 x 2) 2 sides x 4 x M10 x 1.5 Depth 15 (Same measurement on 2 sides) 40 (when the shims are attached) 40 (L) 2 sides x 2 x 8H7 400.05 (8) 40 (M10) Depth 13 (Same measurement on 2 sides) With shims 56 P The head side cylinder port (The clamp side port) 32 71 64
Large effective area Low power consumption 1/4 67 111 31 55 40 64 (Max. 73) AVL2000-*02 Manual/Manual solenoid lock out Modular design 1/4 67 20.5 111 31 55 34 40 64 (Max. 73) AVL2000-*02-*DZM 3/8 76 118 36 57 48 64 (Max. 73) AVL3000-*03 How to Order 3/8 76 12.5 118 36 57 34 48 64 (Max. 73) AVL3000-*03-*DZM 1/2 98 133 47 61 52 64 (Max. 73) AVL4000-*04 G 20 00 F DZM R 5 02 AVL 1/2 98
(56) 67 (54) 64 (56) 67 (54) 65 (57) 68 (55) 64 (56) 67 (54) 66 (58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.
Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y 4 4 1.6 Connection thread C N S U F GN GS 6 N4 N6 U4 U6 64 38 15 10 95 41 ZP Y 06 08 B J K A8 Width across flats 12 A 43 15 100 46 25 110 56 Width across flats 7 Dimensions Per Vacuum Inlet Model 30 B D E Fitting part min. hole size Vacuum inlet direction q Pad dia.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 22.5 3.2 52 46 66 10.7 5.8 Y Y X X LG 4-LD LT 25 26 3.2 57 57 71 11.2 5.8 RHC LS + Stroke LX LZ 28 32.5 3.2 64 64 78 11.2 7 A + Stroke MK(2) RS Q G Rod side flange style: MQQTF 10, 16, 20 RS H A RZQ Bore size (mm) Stroke range (mm) A B FD FT FV FX
Export Setting (page 64) for parameters settings subjected to import. Procedure for importing the settings (1) Click the "Import" button. (1) (2) Select the required file and click the Open. Select Yes to execute the import of settings. (2) -66No.EX-OMV0017-C 4.6.
Parallel I/O input type (64-point, NPN) 5 (Enter from the electric actuator part number "LE" Parallel I/O input type (64-point PNP) to "stroke/ rotating angle") U 6 Number of shaft type of power supply Blank controller *1) BC Note 1) Specified software (JXC-BCW) is required. 1 axis, power supply 24 VDC, High performance type H Mounting I/O cable length Nil Screw mounting 7 None 1.5m 1 DIN
Alarm and countermeasures (P.64)" for detailed alarm information. 8-15 Alarm 4 5 Please refer to 20. Handling of sent/received data (P.85) for handling of the data. -37No.
I/O ()1 I/O (8 ) 64 / I/O 12ON 6 - 2.2.
(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8
74 94 113 26 28 32 40 50 60 32.5 38 46.5 56.5 72 89 22 25 27 32 36 41 5 5 5 5 5 5 12 15 15 20 20 25 5.5 5.5 6.5 6.5 10 10 30 35 40 45 45 55 10 12 12 16 16 20 9.5 12 12 16 16 20 6.6 6.6 9 9 11 11 6.5 6.5 8.5 8.5 11 12 48 56 64 75 95 115 45 52 60 70 90 110 26 28 32 40 50 60 32 40 50 63 80 100 C85 C76 CG1 Rear Sngle Clevis DS MB MB1 Bore (mm) E B1 H B2 B3 L3 L1 TG1 T d1 FL d2 d3 CN XD 45 55
specifications Standard specifications With pressure gauge With auto drain Model Port size B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104 85 26 50 AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 87 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 41.5 43 30 24 33 12 5.5 50 29.5 5.5 3.2 65 2 Note 1) 141 123 36 80 126 55 57 41 35 14 7 71 28.5 7 4 64
80 100 112 132 34 36 46 58 61 75 95 60 70 78 100 125 138 155 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Head flange style: (G) 4 x FD B FY FT FZ FX ZZ + Stroke (mm) Stroke range Bore size (mm) B FT FD FX FY FZ ZZ 20 25 32 40 50 63 80 44 48 60 74 78 100 120 5.5 6.6 9 9 9 12 14 8 8 12 12 16 16 16 50 57 64 80 100 112 132 34 36 46 58 61 75 95 60 70 78 100 125
B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 (mm) Standard specifications Accessory specifications With pressure gauge With auto drain Bracket mounting size Model Port size C D B A L 5.5 7 7 9 9 K 12 14 14 18 18 G 30 41 41 50 50 H 24 35 35 40 40 J 33 F 43 57 57 75 80 E 41.5 55 55 72.5 77.5 U Q 65 64
64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle
MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 8 10 10 14 14 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Applicable pin DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Part No.
T VMG Female connector Plug P. 63 DHF P. 64 DP Use to pipe from male thread such as pressure gauge. Use to plug unused fittings. Male branch tee P. 64 DT Use to branch line from female thread in both 90 directions. Swivel elbow L Use to pipe at right angles to female thread. Swiveled at any direction. P. 64 Swivel extended elbow LL Use to pipe at right angles to female thread.
Note 4) Refer to page 64 for details on enclosure. SI Unit output polarity Nil Positive common N Negative common Note) Without SI Unit, the symbol is nil.
to 04 Differential pressure indicator (P22A) (P30) (G80) Case KA00720 KA00107 KA02476 FH34 06 to 08 (P32) (P44) (G105) KA00631M KA00102 KA00104 KA01759 FH44 to 64 03 to 04 (P20) (P30) (G65) w O-ring KA00720 Phosphoric FH44 to 64 06 to 08 FKM-70 FKM-90 KA00107 KA02477 Drain plug (P32) ester KA00722 FH34 to 64 10 to 12 (P44) (G90) (P40) KA00636 KA00636 KA02476 (P28) DRAIN 16 FH341 to 641 (
Compatible motor P Step motor (Servo/24 VDC) Option Number of step data (Points) Nil D Note) Screw mounting DIN rail mounting I/O cable length [m] 6 64 Nil 1 3 5 Without cable 1.5 3 5 Note) DIN rail is not included. Order it separately.