MGP

Lock Specifications Lock position Rear, Front side 32 20 100 550 (123) 40 50 63 215 (48) 25 2140 (481) 80 Holding force (max.) N (lbf) 5390 (1211) 860 (193) 1340 (310) 330 (74) 3450 (775) Backlash 2mm or less Non-locking type, Locking type Manual release Adjust switch positions for operation at both the stroke end and backlash (2mm) movement positions.

NARM Series

14.88 16.54 (84) (126) (168) (210) (252) (294) (336) (378) (420) NARM3000 L1 5.98 8.15 10.31 12.48 14.65 16.81 18.98 21.14 23.31 (152) (207) (262) (317) (372) (427) (482) (537) (592) L2 5.43 7.60 9.76 11.93 14.10 16.26 18.43 20.59 22.76 (138) (193) (248) (303) (358) (413) (468) (523) (578) L3 4.33 6.50 8.66 10.83 12.99 15.16 17.32 19.49 21.65 (110) (165) (220) (275) (330) (385) (440) (495) (550

5 Port Air Operated Valve

5 (EA), 3 (EB) port M5 x 0.8 1 (P) port 1/8 5 (R), 3 (R) port 3/8 VTA EXH port type VGA Common EXH Individual EXH Common EXH Common EXH Common EXH Applicable valve model VFA130 VFA520 VFA330 VPA Applicable stations VPA3 2 to 20 stations 2 to 20 stations 2 to 15 stations 2 to 10 stations Manifold base Weight: W[g] Stations: n W = 29n + 21 W = 51n + 35 W = 63n + 64 W = 97n + 80 W = 139n + 550

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

CNS Lock Specifications CLS Lock position Rear end, Front end, Both ends 20 215 25 330 32 550 40 860 Holding force (Max.)

C92

11250 IN 11250 10130 9000 7880 6750 5630 4500 3380 2250 20100 OUT 20110 18100 16080 14070 12060 10050 8040 6030 4020 40 160 18850 IN 18850 16960 15080 13190 11310 9420 7540 5650 3770 Note) Theoretical force(N) = Pressure (MPa) X Piston area (mm2) Allowable Kinetic Energy ( ) 3000 2000 1000 700 500 300 200 160 140 125 100 80 63 50 40 32 m(Kg) 100 70 50 30 20 10 7 200 250 300 350 400 450 500 550

ASP

Brass Brass Brass No. 1 2 3 4 5 6 7 8 9 10 11 12 13 Body A Elbow body Handle Pilot body Body B Needle Needle guide Guide Lock nut Piston Valve Cover U seal Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Stainless steel, NBR Brass HNBR Black zinc chromated 550

Thermo-con

1.6 (40) 1.6 (40) Fan l3.1 (8.0) 15.9 (404) OUT Air RADIATING WATER 14.2 (361) IN 12.8 (326) Communication connector Alarm output connector HEC 11.0 (281) OUT 17.6 (448) 17.3 (440) Facility water inlet Rc1/2 RECIRCULATING H FLUID RS-232C 7.8 (198) 6.6 (168) L External temperature sensor connector IN ALARM 6.5 (165) EXT.SENSOR 5.0 (128) AC 2.6 (67) Power connector DRAIN 1.1 (28.5) 21.7 (550

e

A Cable length Standard Stroke M L Z 1 m 3 m 5 m Nominal size Standard stroke (mm) Made to Order Long stroke (-XB11) Stroke range (mm) The remote control type can be selected by adding the above symbols. 16, 25 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 601 to 1000 Strokes are manufacturable in increments of 1 mm, up to 1000 strokes.

Air Slide Table/Long Stroke Type Series MXY

150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350, 400 Model MXY6 MXY8 MXY12 Model MXY6 MXY8 MXY12 X39 Fluororubber seal X42 Anti-corrosive guide unit X45 EPDM seal Mass (g) Stroke (mm) Stroke (mm) One side centralized piping, with switch rail One side centralized piping, without switch rail Model 250 300 350 400 250 300 350 400 50 230 410 910 100 280 480 1020 150 330 550

ISG

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 Series

MXW

119 170 EPDM seal R 80 121 161 201 241 281 402 16 8 L 60 91 121 151 181 211 302 R 126 188 251 314 377 440 628 20 10 L 94 141 188 236 283 330 471 R 196 295 393 491 589 687 982 25 12 L 151 227 302 378 454 529 756 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Standard Stroke (mm)/Mass (g) ( g ) Model Standard stroke (mm) 25 50 125 100 75 300 275 150 175 200 250 225 MXW8 550

Motor฀Operated฀Auto฀Drain ADM200 Series

Operatingtime Powersource 100, 200 VAC Hz, Other 4 W 50 60 Powerconsumption OUT: 3 8 IN: 3 8, 1 2 Portsize Weight 550 g If the operating cycle is twice in a minute (operating time 2 sec. x 2) operating time is 4 sec. each minute. SpecificProductPrecautions Lowpowerconsumption:4W Alongpipecanalsobeconnectedto thedischargeport. Canbeconnecteddirectlytoa compressor.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

[UL-compliant products] When conformity to UL is required, the electric actuator and controller/driver should be used with a UL1310 Class 2 power supply. 50 50 to to 1000 1000 * Refer to the applicable stroke table. y Motor option Nil Without option B With lock Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

Applicable Stroke Table : Standard Model Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] LEFS16 50 to 500 LEFS25 50 to 600 LEFS32 50 to 800 LEFS40 150 to 1000 * Please consult with SMC for non-standard strokes as they are produced as special orders. The actuator and controller/driver are sold as a package.

Exhaust Cleaner Series AMC

Body size 2 AMC220 AMC310, 320 AMC510, 520 AMC610 AMC810 AMC910 Refer to page 5-10-14 for Specific Product Precautions. 3 5 6 8 9 Model/Male Thread Type Model Specifications Effective area (mm2) AMC310 AMC510 AMC610 AMC810 AMC910 16 55 165 330 550 Max. air flow (l/min(ANR)) Port size Weight (kg) Element model no.

AP3500

Indicator switch 4) Model No code ISC ISO Maximum operating pressure Code Status 540 550 580 3) Indication of closed status. 4) Indication of opened status. 125 psig (0.9 MPa) 250 psig (1.7 MPa) Normally closed (N.C.) Normally open (N.O.)

Cylinder with Lock Double Acting, Single Rod Series CNG ø20, ø25, ø32, ø40

Condition: Lateral, Supply pressure P = 0.5 MPa Load weight Upper limit of allowed value Solenoid valve for locking: Mounted directly to unlocking port Maximum value of stopping position dispersion from 100 measurements Holding Force of Spring Locking (Maximum static load) 20 25 32 40 Bore size (mm) Holding force (N) 215 335 550 860 9-5-9

Magnetically Coupled Rodless Cylinder: Low Profile Guide Type ø 10, ø 15, ø 25 CY1F Series

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting type X NW Mounting type W NV Mounting type V NU Mounting type U NT Mounting type T NM1 Mounting type M1 NM2 Mounting type M2 * Refer to the applicable stroke table. w Size 25 32 40 Applicable Stroke Table : Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550

FHG

T dimension) None Differential pressure indicator Differential pressure indication switch Note) 0 1 5 1 2 3 4 5 1 2 3 4 1 2 3 4 340 410 480 550 620 430 530 630 730 560 650 750 850 04 (1/2B) 06 (3/4B) 08 (1B) 30 FH FH Note) N.C. and N.O. common Note) When the differential pressure indication 1 or 5 is selected, the connection method is 2 to 5. (0 and 1 cannot be selected.)