VQ4000

R2) 1 (P) 5 (R1) 3 (R2) VFS 3-position double check (A) 4 (B) 2 Light/Surge voltage suppressor Note) 6 VFR Nil Yes E Without light, with surge voltage suppressor 1 (P) 5 (R1) 3 (R2) VQ7 Note) For double check type, refer to page 478.

VQC4000

(B) 2 VP4 Metal 4 VQ 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 Porting specications 2-position double 3-position pressure center (A) 4 (B) 2 Rubber (A) 4 (B) 2 VQ 4/5 Nil Side ported B Bottom ported 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQC 1/2 Manual override 3-position double check (A) 4 (B) 2 Note) 6 VQC 4/5 VQC 4/5 B: Locking type (Tool required) C: Locking type (Manual) Nil:

Series VS

The test was performed in the axial and right angle directions of the main valve and armature for both energized an de-energized conditions. 1 (P) 5 (R1) 3 (R2) 3-position exhaust center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) Flow Rate Characteristics 3-position pressure center (A) 4 (B) 2 VSR/S8-4 Seal 14, 2 (PA, B) 4, 25, 3 (A, BEA, EB) Position 1 (P) 5 (R1) 3 (R2) C 3.10 3.60 3.10 3.60 3.10 3.20

Rotary Actuator

Find the moment of inertia )B around the rotation of shaft (B). 2. )B is converted to the r r2 2 )= m moment of inertia )A around the rotation of shaft (A). )A = ( ) 2)B a b 5.

VZA2000

258-9200-www.stevenengineering.com Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 3 position exhaust center: VZA4441--01 02 Pilot port (B side) Body side 2-4.5 Mounting hole Pilot port (A side) 2-M5 x 0.8 body side Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 5

VER2000/4000

P A (Supply air) B R2 (Exhaust air) A (PA Setting) B R2 (Exhaust air) Thereafter F1 = F2: See figure w. 14-9-19 4 Series VER2000/4000 CurrentPressure Characteristics Selecting Electro-pneumatic Proportional Valve How to Find the Flow Rate Air temperature of 20C The horizontal axis of the characteristics represents the output amperage of the power amplifier VEA25.

1

How to Order Air Output Port: KBV, KBZ (P. 15-2-113) 1 04 KB 1 V Elbow Module: KBV Elbow Socket Module: KBV T Connection thread Applicable tubing O.D. 4 Model Model Model Tube size/ Connecting female thread size Body size KBV1-04 KBV1-06 KBV2-06 KBV1-M5 KBV1-M6 KBV2-M5 M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 6 KBV2-08 KBV3-08 8 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 1 8 Rc Branch Elbow Module

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA7 MSUA7-S, SE Scale: 60% Top ports/MSUA7-SE C 8-M4 x 0.7 depth 8 A port B port 67 13 2-M5 x 0.8 14 B 41 50 33 37 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 +0.030 0 3-4H9 depth 4 ( A , B , C ) 4 3 2-5.5 through 3-R2 3-R2 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2

VZA2000

(A side) 2 x M5 x 0.8 body side 2 x 4.5 Mounting hole 18 14 3 x Rc , 2 x Rc 18 2 x M5 x 0.8 sub-plate side Pilot port (A side) (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 1761

XM, XY

changed part XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (Positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 3-4H9 depth 4 +0.030 0 4 3 ( A , B , C ) 3-R2 3-R2 2-5.5 through 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5 2-5.5

AXTS-OMY0007

Configuration symbol AXTS040*-2(B)-X2 Symbol for internal pilot fluid passage Fig.1 Symbol for internal pilot fluid passage. 1(P) Port:IN Port SUP.Air(for air blow 4(A) Port:OUT Port 3(R2) Port: Released to atmosphere (pilot exhaust port with silencer) AXTS040*-3(B)-X2 Symbol for internal pilot fluid passage Fig.2 Symbol for external pilot fluid passage. 3(R2) port: IN Port SUP. air (

IDX-OM-W028

EVAPORATION WITH LAMP THERMOMETER VENTILATION VENTILATION DRAFT AIR OUTLET BALL VALVE (F) AUTO DRAIN C DRAIN TUBE TERMINAL LENGTH:1m) (O.D.10, BLOCK J P K L2 N1 M 13 4x POWER SUPPLY ENTRY 911)[OPPOSITON] (WIRE H measuremm Model Port size A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 123 5 279 46 50 13 353 85 600 379 1258 64 550 135 0 290 388 680 414 IDU37E R11/2 360 855 IDU55E R2

Interface Regulator for VQ4000 5 Port Solenoid Valve

Pressure gauge SMC 1 P 5 3 R2 R1 D side PE Pressure Setting Caution 1. Set the pressure of an interface regulator using a flat head screw driver. 2. The pressure adjustment is increased by turning clockwise and decreased by turning counter clockwise. Perform pressure setting by increasing from low pressure to the desired setting. 3.

Exhaust Cleaner for Vacuum Pump AMV Series

R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789

CHANGE, ACTUATOR, CKZN SLIM LINE CLAMP CYLINDER, R2, 80MM CKZN SLIM LINE CLAMP CYL, .37830 lb

Industrial Filter

IN of filtered fluid (Port size: R1 or R2) Access to In pressure (Port size: Rp1/4) Access to Out pressure (Port size: Rp1/4) DRAIN Port to discharge accumulated fluid and drain at inlet when replacing the element. (Port size: R3/4) OUT of filtered fluid (Port size: R1 or R2) DRAIN Port to discharge all fluid when replacing the element. (Port size: R3/4) Table 1.

FGE-C

O 1 (O P71) V (V P71) 6/12 FGX-OM-L009-B FGESL Series IN/OUT -0.1MPa (P10) (M12) IN OUT O O V 40 () () () 7/12 FGX-OM-L009-B 1 G1/8 () (R1 R2) IN (Rp1/4) (R3/4) DRAIN OUT (Rp1/4) (R1 R2) (R3/4) 1 1 SUS304 O FGE-OP007 8 NBR FKM O (NBR) (FKM) M10X1.5 1 SUS304 M10 SUS304 SUS304 SUS316WPA FGE-OP005 SUS316 SUS304 SUS304 FGD-OP001 SUS316 FGE-KT001 NBR O FGE-KT002

MHC2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)