MHT2

Bore size 32 mm 32 40 mm 40 50 mm 50 63 mm 63 Action Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Double acting D Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

Proposals for Energy Saving

The switching plate enables conversion to N.C. or N.O. without changing ports. 36.1 2 EXT IN OUT 5.0 7.2 90 130 12.8 15.6 230 280 15.6 31.7 36.1 570 650 5.6 8.9 100 160 1.5 17.2 18.3 310 330 36.1 6.1 11.7 110 210 Cv factor 17.2 280 310 2.0 37.2 650 670 2.8 37.2 650 670 OUT EXT IN OUT OUT EXT Effective area mm Weight kg Note) Can be used in vacuum or with low pressure External pilot type

Direct Operated Precision Regulator Modular Style Series ARP3000 1

0 1315506A 1315516-2 MYN-5 JIS B 2401P6 131545 1315513 131532 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions Panel mounting hole Flow rate (/min (ANR)) Thickness max. 3.5 Caution Pressure gauge (Option) Port size 1.

IC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR Series IC VEX Series ITV AMR External pressure sensor ITV IC VBA Note) Feedback control function is not available.

VER2000/4000

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Weight 1.24 kg Rc 3/8, 1/2: 2.20 kg, Rc 3/4: 2.81 kg Note 1) Set the inlet pressure by 0.05 MPa or larger than the required maximum set pressrue.

Electronic Pressure Switch Series (Separate Type)

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Due to its small size, the sensor can be installed close to a pad.

ZSE2/ISE2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Can be integrated with ZX or ZR ejector system.

VCB

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Compact: Single valve volume reduced by 15% (Class 3) VX3 VXA Clip type VN Ease of maintenance has been improved. Changing of the coil is made easy by means of clip design.

VXZ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Compact, lightweight and large valve capacity Diaphragm VX3 ! VXA VN Wide variations enables a wide range of fluids control.

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Refrigerated Air Dryers Series IDF/IDU

650 650 400 450 450 450 260 300 300 300 300 350 350 350 94 kg 220, 240, 380, 400, 415, 440 V( 50/60 Hz) Threephase Doubleturn (mm) 200 V (50/60 Hz) 109 kg D 4 x F A IDF190D, 240D IDF370B 152 kg 179 kg 50 Optional Accessories Dimensions [Dedicated base for separately installed power transformer] Separately installed power transformer IDF4E to 75E IDU3E to 15E A HAA HAW Dedicated base B AT

Shock Absorbers and Rate Controls

84.000 775 2.0 3.8 250 5 0tnt.0(8) .50 1.00 12.130 650 6n,000 t,000 3.0 6.0 300 l 0 tR0IIt .0(8) .50 1.00 3-50 650 6n.000 1.000 3.0 6.0 450 t0 0tltl.l5xl .63 1.00 l2-130 r,700 670,000 ?.

AMH

Drain cock: Gray Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com One-touch fitting N.C. auto-drain not available for AMH650.

1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MB1 CA2 CS1 C76 Copper-free C85 C95 CP95 NCM NCA DHow to Read the Table -X 1. For copper-free products or standard products for each series, refer to the list below.

IDU/IDF

Dryer A G F E D C B B 7kVA IDF120D 360 30 11 300 260 400 540 IDF-TR7000-8 94 Three phase compound 9kVA IDF150D 400 40 13 350 300 450 650 IDF-TR9000-8 109 220, 240, 380, 400, 415, 440V (50/60Hz) 200V (50/60Hz) 11kVA IDF190D 550 60 13 400 350 600 450 IDF-TR11000-8 131 4-F A 13kVA IDF240D 400 60 13 350 300 450 600 IDF-TR13000-8 138 D 18kVA IDF370B 400 40 13 350 300 450 650 IDF-TR18000-8 179

3 Port Air Operated Valve Series SYJA300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Port size Type of actuation Nil Without sub-plate VH Normally open Normally closed 2 1 M5 port with sub-plate M5 VHS How to Order Manifold Base Same manifolds as Series SYJ300 are prepared. SS3YJA3 Fill the same as SS3YJ3.

TA301

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manifold Model Model VOA301 Applicable manifold model Common/lndividual exhaust Accessory (Part no.)

VT325

V100 SY SYJ VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT Grommet VP Exploded view VG VP (1) Bleed groove Bleed port on main valve (4) S070 (7) VQ Bottom of the solenoid valve (5) VKF 2.

VFRA3000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 3 position pressure center Port size VR W/o sub-plate (Pilot port: Rc) W/o sub-plate (Pilot port: Other than Rc) 1/4 3/8 Nil VH 00 VHS 02 03 How to Order Manifold Base 10 1 2 VV5FRA3 n Port size Thread type Indicate the same part number as VFR3000 manifold

VPA4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VPA4270-14 Port size VR VPA4150-04 Port size Applicable valve model Note) 3 position is not available on Series VPA470.