LEKF-OMZ0035

GR-S-010 (10g) GR-S-020 (20g) -11- LEKFS Motor : Parallel (AC servo motor) Component Parts Description No. Description Material Note No.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

600 600 15 30 76 38 103 9.0 144 3.2 27 13 31 188 9.0 35 19 183 195 127 154 45 50 70 30 12 22 74 12 80 76 18 95 160 1000 (1001 to 1200) 101 (105) 15 (23) 105 (140) 59 (64) 130 (170) 43 (48) 170 (179) 0.032 0.059 63 1200 600 600 600 18 11.5 11.5 110 40 92 49 107 166 3.2 34 16 24 206 40 23 196 212 148 162 50 59 86 40 16 28 90 16 93 92 25 171 1000 (1001 to 1400) 119 (124) 18 (28) 130 (164) 76

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

R Port M5 0.8 R Port M5 0.8 S 20 20 stations A, B Port M3 0.5 P Port P Port M5 0.8 A, B Port M3 0.5 Applicable solenoid valve: SYJ3 30SYJ3 33M5 0.8 Type 32(4 Port / Base mounted type) Applicable blank plate ass'y: SYJ3000-21-2A SS5YJ3-32-05 --M5T Type 32 Type S32 ( ) Single solenoid coil is located on same side as the A, B port.

AZ1000

psig (4.1 MPa) 1.5 (38.1) 80 0.55 0.48 70 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 0.41 60 0.34 50 0.27 40 0.69 (17.5) 0.21 30 0.14 20 2.5 (63.5) 0.07 10 A 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA Inlet pressure: 2 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg) -21 600 Delivery

DOC1023125

PLC *3) (Provided by customer) IO cable *1) Part no.JX-CI-E--S PC *2)*3) (Provided by customer) Communication cable /USB cable *1) Part no.JX-CT-E 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 Setup Communication Power supply for controller cable IO cable 24VDC Power supply cable *1) Part no.JX-CD-E--S Power supply cable *1

PFxx-OMY0005

(2 s or 5 s can be selected) 13 Pressure 0.1 s (Variable at 0 to 30 s/0.01 s step) Temp. 1 s Protection IP65 Environmental Withstand voltage 1000 V AC for 1 minute between terminals and housing resistance Insulation resistance 50 M between terminals and housing (with 500 VDC megger) Operating temperature range Operation: 0 to 50 oC, Storage: -10 to 60 oC (No condensation or freezing) Operating

Thermo-chiller/Rack Mount Type

Applicable model HRR010/012/018/024/030/050-mm-m-DM Measurement range of electric conductivity 0.1 to 48.0 S/cm Set range of target electric conductivity 0.5 to 45.0 S/cm1 Set range of electric conductivity hysteresis 0.1 to 10.0 S/cm 1 Default setting is set to Electric conductivity set value: 25.0 S/cm and Hysteresis: 5.0 S/cm.

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Model T1 T2 (1) (1) (1) Max. number 16 14 16 16 14 8 8 16 16 Note 1) Due to the limitation of internal wiring.

Series AK1000

Option Material Code Specification Standard High inlet pressure (Max. inlet pressure 3000 psig (20.7 MPa)) 5) Ports Diaphragm Nozzle Code Body Brass Poppet No code Material Code S, SH V V V V B S SH Ports 316 SS Hastelloy C-22 Hastelloy C-22 B 316 SS HR Hastelloy C-22 2P 3P 4PL 5PC Refer to the following porting configurations.

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

600 600 15 30 76 38 103 9.0 144 3.2 27 13 31 188 9.0 35 19 183 195 127 154 45 50 70 30 12 22 74 12 80 76 18 95 160 1000 (1001 to 1200) 170 (179) 101 (105) 15 (23) 105 (140) 59 (64) 130 (170) 43 (48) 0.032 0.059 63 1200 600 600 600 18 11.5 11.5 110 40 92 49 107 166 3.2 34 16 24 206 40 23 196 212 148 162 50 59 86 40 16 28 90 16 93 92 25 171 MGZ 1000 (1001 to 1400) 204 (215) 119 (124) 18 (28

Aluminum High Vacuum Angle Valve

The initial exhaust rate is adjusted by turning the adjustment nut counterclockwise. x Opening of the initial exhaust valve (valve S) When the pilot pressure is applied to the pilot port S, the valve S is removed from the valve S seal assembly, and the valve opens the adjusted amount.

3 Port Solenoid Valve Metal Seal Series VZ200 1

DIN terminal 4-15-4 5 3 Port Solenoid Valve Metal Seal, Body Ported/Base Mounted Series VZ200 Dimensions: Body Ported 1 2 1 2 Grommet: VZ2 2-GH(S)-M5 With foot bracket: VZ2 2--M5-F 2-2.8 mounting hole 2-3.5 mounting hole M5 x 0.8 Pilot EXH V100 Manual override (Non-locking) SY Manual override (Locking type (Manual)) Manual override (Locking type (Tool required)) SYJ G: 300 H: 600 Lead wire

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

With light/surge voltage suppressor (Non-polar type) For AC voltage valves there is no S option.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

SMC Electronic Switch Series Variations

10.2 8 10 17.6 10 5.5 2-3.3 Mounting hole 3.10-4 ZSE2/ISE2 Dimensions/Standard: ZSE201 T1 01 T1 01 T1 Grommet style/ZSE2-15 Connector style/ZSE2-15C Pressure setting Pressure setting Indicator light Indicator light trimmer trimmer 15 Lead wire length 600 15 (3000) H H L L 20 20 Lead wire length 600 Lead wire length 600 Lead wire length 600 (3000) 9.5 39 8.5 39 8.5 3.5 3.5 3.5 Mounting hole

Modular F.R.L. Unit

Attachment Port size for intermediate air release Applicable models Attachment mounting position Description Symbol None Nil AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve Thread type AW + [K] + AL AC20A to 40A Metric system thread (M5) Rc NPT G AF + AR + [S] + AL AC20 to 60 Nil AW + [S] + AL AC20A to 40A N Note 1) S Pressure switch AF + [S] + AR AC20B

Modular F.R.L. Unit

Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size AW + [S] + AL AC20A to 40A S Body size Port size Pressure switch AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AF + AFM + [S] + AR AC20C to 40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S] + AFM AC20D to 40D

Best Pneumatics Vol. 14

Applicable model Attachment mounting position Description Symbol Nil None VY1 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve G AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size PPA AW + [S] + AL AC20A to 40A Pressure switch Body size Port size S AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AL AF + AFM + [S] + AR AC20C to