AC Servo Motor Driver (CC-Link Type ）

Position data Speed Dwell Auxiliary Model adaptive control 1 1000 1000 80 80 0 0 Speed control 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 2000 80 80 0 0 1000 6 2000 1000 80 80 0 0 Position 7 1000 1000 80 80 0 0 control 8 1000 1000 100 100 0 0 LEC-MR-J3BAT MR-J3BAT 1000 1000 100 100 0 0 (Note 3) CN4 255 2000 2000 80 80 0 0 Position Optional battery (for absolute

AC Servo Motor Driver (Network card type ）

When CMX 2000, N < 3076.7 r/min When CMX > 2000, N < 3276.7 CMX r/min When the servo motor is operated at a servo motor speed higher than the limit value, [AL. E3 Absolute position counter warning] will occur.

LG1H

) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) L3 a = 3000 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 164

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(Values at the initial period) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature.

ITV

1000 2000 2500 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Supply pressure (MPa) 14-8-21 22 Series ITV1000/2000/3000 Series ITV305 Linearity Hysteresis Repeatability 1.0 1.0 1.0 0.9 0.8 Output deviation factor (%F.S.)

Step Motor Driver （ Pulse input type ）

2000 2000 2000 Step data default Deceleration 2000 2000 2000 2000 Pushing force 100 100 100 100 Trigger LV 100 100 100 100 Pushing speed 20 30 30 30 Moving force 150 150 150 150 Area1 0.00 0.00 0.00 0.00 Area2 0.00 0.00 0.00 0.00 In position 0.50 0.50 0.50 0.50 98 - LEHF Basic parameter default Model LEHF10 LEHF20 LEHF32 LEHF40 Lead [mm] 40 / 15 50 / 15 70 / 16 70 / 16 Controller ID 1 1

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Series IR1000/2000/3000 Precision Regulator. Series Variations. Features. Precautions. Series IR1000/2000/3000 Precision Regulator. Specifications. How to Order. Construction. Dimensions . Made to Order Specifications. Series IRV1000/2000/3000 Vacuum Regulator. Features. Precautions. Series IRV1000/2000/3000 Vacuum Regulator. Specifications. How to Order. Construction. Dimensions .

1

Note) Except SI Unit Manifold Solenoid Valves Manifold Solenoid Valves Series SY3000/5000 Series SV1000/2000/3000 Series S0700 Series VQC1000/2000/4000 IP67 IP40 IP67 IP67 Note) The SY3000/5000, S0700, and VQC1000/2000/4000 are not UL-compatible.

Precision Regulator

0.1 0.194 0.1 0 1000 2000 3000 4000 5000 6000 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 6000 0 1000 2000 3000 4000 5000 1.0 Flow rate (L/min (ANR)) Relief flow rate (L/min (ANR)) Supply pressure P1 (MPa) 818 IR1000/2000/3000 Series Made to Order Please contact SMC for detailed dimensions, specifications, each part number and lead times.

V

Note 4) Grommet type (G) is also available for C-kit, single type of VQ0/1000/2000.

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Note 2) Strokes over 2000 mm are available as made-to-order. (Refer to -XB11 on page 10-21-1.)

IR1000/2000/3000

1 Precision Regulator Series IR1000/2000/3000 G F.R.L.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

Uniaxial Electric Actuator Series LJ1

W: Work load (N) L1, L2, L3: Amount of overhang to work piece center of gravity (mm) a: Table acceleration (mm/s) Mounting position Direction of load movement Model LJ1H10 LJ1H20 LJ1H30 Horizontal/Lateral Horizontal/Lateral Vertical Lateral Horizontal a M1 2000 a=1000 a=1000 2000 2000 a=1000 L1 mm L1 mm L1 mm Pitching W a=2000 a=2000 a=3000 a=3000 a=2000 1000 1000 1000 L1 a=3000 0 2 4 6 8

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ 1000/2000 Plug-in Unit Base Mounted VQ2000 The broken lines indicate DIN rail mounting style [D].

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Socket Hook 1.12-4 VQZ1000/2000/3000 Body Ported Mounting 3 Port Valves on 5 Port Manifolds(VQZ 82 , N.C.

AC Servo Motor Driver (CC-Link Type ）

Position data Speed Dwell Auxiliary Model adaptive control 1 1000 1000 80 80 0 0 Speed control 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 2000 80 80 0 0 1000 6 2000 1000 80 80 0 0 Position 7 1000 1000 80 80 0 0 control LEC-MR-J3BAT 8 1000 1000 100 100 0 0 MR-J3BAT 1000 1000 100 100 0 0 (Note 3) CN4 255 2000 2000 80 80 0 0 Position Optional battery (for absolute

HRX-OM-W002

Facility water temp. 2000 2000 2000 2000 Facility water temp. Facility water temp. 2000 2000 Cooling capacity[W] Cooling capacity[W] Facility water temp.

Mechanically Jointed Rodless Cylinders

However, when exceeding 2000 mm stroke, add -XB11 to the end of the model number. Refer to Made to Order on page 40.

Ionizer

0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance (mm) Distance (mm