Table of Contents

124 200 45 83 121 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 300 172 50 4 104 4.5 44 3 118 6 M8 x 1.25 86 16 106 22 72 48 124 200 46 84 122 300 174 66 5 130 6 60 4 146 8 M10 x 1.5 110 20 130 24 92 48 124 200 48 86 124 300 174 80 5 130 6 70 4 158 8 M10 x 1.5 124 20 142 24 110 52 128 200 50 88 124 MGPM (Slide bearing) A, DB, E Dimensions A E DB Bore size (mm) 25 st 50 st 75 to

A

45 24 33 32 124 84 48 46 24 34 25, 50, 75, 100, 125, 40 124 86 48 48 24 36 150, 175, 200 50 128 88 52 50 28 38 63 MGPM (Slide Bearing) Dimensions A, DB, E Bore Size A DB E 25, 50st Over 50st 25, 50st Over 50st (mm) 97 102 37.5 42.5 20 32 97 102 31 36 20 40 106.5 118 34.5 46 25 50 106.5 118 29.5 41 25 63 MGPL (Ball Bush Bearing) Dimensions A, DB, E Bore Size A E Over Over 25, 75, 25, 75,

Electric Actuator

Belt Drive/Series LEFB Type 1 Size Equivalent lead (mm) Stroke (mm) 2 300, 500, 600, 700, 800, 900, 1000 48 16 Step motor (Servo/24 VDC) 48 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 25 48 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 32 48 300 ,500 ,600, 700, 800, 900, 1000 16 Servo motor (24 VDC) 48 25 300, 500 ,600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000

Air Slide Table

Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ6-10Z 22 18 25 9 23 16 38 10 30 64.5 4 2 50 60 MXQ6-20Z 25 15 15 9 26 26 38 10 30 74.5 4 2 50 60 MXQ6-30Z 21 34 12 20 48 13 40 95.5 6 3 63 73 MXQ6-40Z 26 10 38 24 28 28 48 15 50 107.5 6 3 75 85 MXQ6-50Z 27 20 48 34 28 28 48 15 60 117.5 6 3 85 95 87 Air Slide Table/Height Interchangeable Type MXQ Series Dimensions: MXQ [Adjuster

Table of Contents

Unit: mm -X416 (one side) -X417 (one side) Bore size (mm) Spacer Spacer Adjustment range Adjustment range Length (l) Length (l) MY3B MY3B Head cover 16 25 40 63 10 12 16 24 10 to 20 20 to 30 20 24 32 48 12 to 24 24 to 36 16 to 32 32 to 48 24 to 48 48 to 72 l (X416) Stroke adjusting unit l (X417) Holder mounting bracket 8-14-24 24 Series MY3A/3B Made to Order Specifications 2 Please contact

Table of Contents

21.6 14.9 6 48 55 37 43.5 10 L2 12 12 KQ2W12-99 20.9 Applicable fitting size d d D2 Reducer Elbow: KQ2L Applicable tubing O.D.

AC Servo Motor Driver (Pulse input type/Positioning type ）

) SON (CN1-15) Input signal Light on: on Light off: off Output signals OP (CN1-33) RD (CN1-49) ALM (CN1-48) ZSP (CN1-23) VLC (CN1-25) 4 31 4.

Table of Contents

) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) ZPR25 ZPR32 64 (56) 67 (54) 64 (56) 67 (54) 65 (57) 68 (55) 64 (56) 67 (54) 66 (58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

Table of Contents

16 32 64 20 40 80 19 8 MHW JIS Symbol Double acting MRHQ 48 12 Double acting Misc. 90 16 D20141 20 Note 1) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

2-Color Display Digital Flow Switch Series PFM

Dimensions PFM -C4/C6/C8/N7--X693 7 5 PFM -C4/C6/C8/N7--X694 7 5 10.2 10.2 1 43 A 43 1 IN OUT (34.2) 3 (34.2) 13 3 13 A 18 OUT 2 x 3.4 18 IN B B 48 20 48 20 2 x 3.4 One-touch fitting Applicable tube O.D.

NCG/CG1

80 69.5 49.5 46.5 48 100 ( ): Denotes the dimensions for long stroke, bore size 20 to 100, double rod.

MGP

50 to 124st 48 48 48 52 52 72 125 to 200st 124 124 124 128 128 148 201 to 300st 200 200 200 200 200 220 301 to 400st 300 300 300 300 300 320 25 to 49st 33 34 36 38 42 35 50 to 124st 45 46 48 50 54 47 125 to 200st 83 84 86 88 92 85 201 to 300st 121 122 124 124 128 121 301 to 400st 171 172 174 174 178 171 32 40 50 63 80 100 25 to 400 MGPM (slide bearing)/Dimensions A, E MGPL (ball bushing)

MGP

50 to 124st 48 48 48 52 52 72 125 to 200st 124 124 124 128 128 148 201 to 300st 200 200 200 200 200 220 301 to 400st 300 300 300 300 300 320 25 to 49st 33 34 36 38 42 35 50 to 124st 45 46 48 50 54 47 125 to 200st 83 84 86 88 92 85 201 to 300st 121 122 124 124 128 121 301 to 400st 171 172 174 174 178 171 32 40 50 63 80 100 25 to 400 MGPM (slide bearing)/Dimensions A, E MGPL (ball bushing)

Smooth Cylinder/Low Speed Cylinder

Auto Switch Mounting Height (mm) D-F7/J79 D-F7W/J79W D-F7BA D-F79F/F7NT D-A7H/A80H Auto switch model D-F7V D-F7WV D-J79C D-A7 D-A80 D-A73C D-A80C D-A79W D-M9V D-A9V D-P3DW Bore size U 33 36.5 42 47 55.5 65.5 U 30 32 37.5 42.5 51 59 U 27.5 30 35 40.5 49 57 U 36.5 40 45 50.5 59 67 U 39.5 42.5 48 53.5 61.5 70 U 34 37.5 43 48 56.5 64.5 U 40.5 43.5 49 54.5 62.5 71 U 37.5 40.5 46 51.5 59.5 68 U

AC Servo Motor Driver

When resuming operation after deactivating the alarm, make a home position return. 3 48 3.

Compact Cylinder Series CQS

Foot or Flange style: Body mounting bolt CQM MU D-X Individual -X Technical data 583 Series CQSKW Mass/Without Auto Switch (g) Precautions Bore size (mm) Cylinder stroke (mm) Operating Precautions Warning 50 45 40 35 30 25 20 15 10 5 12 88 80 73 65 56 48 16 115 105 95 84 75 64 1.

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VFN 48 V DC None Z Precautions Plug a connector in or out vertically, never at an angle. How to Calculate the Flow Rate S 6 V For obtaining the flow rate, refer to page 3-1-10.

10

Increased pages from 32 to 48. QV Edition C Added installation options. Added disassembly/assembly procedures. Leakage voltage (AC coil) was corrected from 10% or less to 5% or less. Increased pages from 48 to 52.

LVQ

96 75 153.2 25 150 50.2 78.2 10 7 20 73 38.5 45 128 2 1 42 84 48 96 75 163 32 167 60 88 10 7 20 73 38.5 45 137.5 551 Series LVQ-Z Dimensions With bypass Double acting valve LVQ2 1 2 N M C C A B D D (Max.