Manifold can be mounted to VEX1B33, VEX1230 3. 14-6-2 3 Precision Regulator Series VEX130 3 Specifications VEX1B33M5 01 VEX113 01 02 0 3 VEX123 01 02 0 3 VEX133 02 03 04 0 3 VEX153 04 06 10 0 3 VEX173 10 12 0 3 VEX193 14 20 0 3 VEX1A33M5 01 Model Operation Manual (Push locking slotted type) Manual handle (Push locking slotted type) and Air operated type Internal pilot External pilot can be

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

Table of Contents

Hs Operating Range Applicable bore size (mm) Auto switch model 100 80 63 50 40 32 25 20 16 D-Z7/Z80 12 11.5 11.5 10.5 10.5 10.5 10 10 10 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 10 9.5 8 7 6 6.5 7 7.5 7.5 D-Y7BAL 6.5 6 6 6 6 6 5 5 5 4 4 5 4 4 D-P5DWL Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

ASD

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

LEC-OM02704CN

30 L 10 B0.3 C A 3 6 0.3 -0.2 35 0 24 0 7 24 6 22 ()M4 35 11 .

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

): 10-SYJ5243-D-01 M8 connector (WO): 10-SYJ5243-WO-01 Applicable cable O.D 3.5 to 7 Approx. 300 (Lead wire length) 82.9 125.2 MAX.10 75.4 50.1[57.1] 64.1 34.7 54.6 49 M8 x 1 37.1 61.2[68.2] Approx. 300 (Lead wire length) Pg7 6 6 6 6 107[111.4] 65.2 87.4[91.8] 58.7 18.7 45.5 45.5 45.5 45.5 105.2 17 17 17 17 17 17 17 17 42.7 127 2.7 6 6 6 6 25.2 32.6 8.5 8.5 8.5 42.6 43.5 8.5 21.5 21.5 21.5

Air Suction Filter With One-touch Fittings ZFB Series

IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20

99

0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-06 {Rc3/4} FGH200-06 {Rc3/4} FGH300-06 {Rc3/4} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005

60

10 12 VHS20 VHS30 VHS40 VHS40-06 VHS50 1/4, 3/8, 1/2 3/4 3/4, 1 Options specifications Model Built-in silencer With bracket N Q R S T U V W X Y AA BB 5.4 6.5 8.5 8.5 11 8.4 10 19 19 27.5 27 36.5 43.5 43.5 49.5 40 53 70 70 90 75.4 90.9 119.4 123.4 152.3 31.3 40 53 55 71 25.3 33 44 46 60 53.3 30 41 50 50 70 2.3 2.3 2.8 2.8 3.2 3 3 3 4 4 12 14 19 22 22 VHS20 VHS30 VHS40 VHS40-06 VHS50 67 79

ZFC Series

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

LEC-OM02904

10 () 2 4 8 6 10 LG 8 4 LE-CSE-RA LG MRR MRR 9 SHD 7 5 MR 3 P5 1 1 5 9 1 3 5 7 9 8 6 LG 4 MRR 2 BAT P5 3 7 BAT P5 MR BAT MR LE-CSE-SB . 10 .

SV

SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

MNB

side) 1 10 60 65 75 80 85 2 (Different sides) 2 (Same side) 70 75 80 85 70 75 80 85 35 55 35 + 30 (n 2) n = 2, 3, 4 70 + 30 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2, 4, 6, 8 n (Different

MNB

side) 1 10 60 65 75 80 85 2 (Different sides) 2 (Same side) 70 75 80 85 70 75 80 85 35 55 35 + 30 (n 2) n = 2, 3, 4 70 + 30 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2, 4, 6, 8 n (Different

OMU0023

Acquires the information repeatedly until the received 6 Repeat steps 5-6 information shows that the INP is "1". 7 01 10 9103 0002 04 0 1388 01 10 9103 0002 Direct Operation Step Data No. 20 parameters are configured for: Target position 5 mm, Positioning time 0.1 s. 8 01 06 9105 000A 01 06 9105 000A Instruction to hold current position sent. 9 01 10 9100 0001 02 0 01 10 9100 0 (Preparation

Speed Controller with One-touch Fittings Series AS In-line Type 1

(g) 6 20.7 23.5 4.5 38 8.4 1/8" AS1001F-01 AS1001F-23 6 20.7 23.5 4.5 38.0 8.4 3.2 12.7 10 12.7 10 7 21.4 24.2 5.2 39.2 9.3 5/32" AS1001F-03 AS1001F-04 7 21.4 24.2 5.2 39.2 9.3 4 12 48.7 11.4 16.5 3/16" AS1001F-05 AS1001F-06 8 22.4 25.2 6.2 40.7 11.6 6 13.5 10 6.2 25.2 22.4 9 40.7 12 13.7 1/4" AS1001F-07 AS2001F-04 12 27.6 32.6 5.2 40.7 9.3 4 12.7 11.8 12 27.6 32.6 5.2 40.7 9.3 12.7 5/32"

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

size Thread type Rated voltage Electrical entry Oil-free option Bracket option JSXD51 C N 06 R 1 G None None S F N 2 GS D B E F 3 DN 4 WN 5 6 7 8 B J JSXD51 Series/ Valve type Body material Seal material Port size Thread type Rated voltage Electrical entry Oil-free option Bracket option JSXD61 C N 10 R 1 G None None S F N 2 GS D B E F 3 DN 4 WN 5 6 7 8 B J JSXD61 Series/ Valve type

ALF400 to 900, ALT-5/-9

Tube size 100 O.D. 6 I.D. 4 14-13-10

Check Valve Series AK 1

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

TM

(mm) Mounting screw L2 H2 D W1 H1 P L1 W2 W3 Model (Nominal x Length) 6 3.25 72.5 4.5 5.5 6 6.5 6.5 10 5 7.5 8 12 12 8 10 11 12 12 17 21 23 25 25 6 4 2.2 2.8 2.8 3.2 3.2 2 x 6 2.6 x 8 2.6 x 8 3 x 8 3 x 8 TM-04 TM-06 TM-08 TM-10 TM-12 7.5 9.5 91.5 5.5 77.5 6 7.5 77.5 6 15 9 93 12.5 6.5 4.5 16.3 8.8 14.3 7.5 12 12 10 8 9.8 How to Use 2.