Speed Controller with Indicator

, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Hydraulic Filters

3 3 0.1 0.05 0.05 0.04 5 4 3 3 3 0.1 0.05 06/08 Pressure drop (MPa) 4 4 0.4 0.3 0.03 0.02 03/04 Precautions 1.

Table of Contents

-04 AME450-06 AMF450-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650-14 AME850-20 AME850-20 AMF850-20 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06 AMH550-10 AMH550-10 AMH650-14 AMH850-20 AM850-20 AMH850-20 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF37C1-3 IDF55C-3 IDF75D-3 IDF120D-3 IDF150D-3 IDF240D-3 IDF55C

Table of Contents

LVQ Metric sizes 4 04 06 4 6 N.C.

1

3 SY 3 5 C6 1 0 3 1 SY EX600 Top ported VM !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

) VQ4 75.4 [82.4] VQ5 VQC 34.5 17.5 15.5 VQZ 29.5 29.5 44.5 SQ 3/8, 1/2 [1(P), 5(EA), 3(EB) port] 96.5 VFS L plug connector (L): SY9 40(R)-LM plug connector (M): DIN terminal (D, Y): SY9 40(R)-WO3 4 5 M8 connector (WO): VFR 3 4 5 3 4 5 3 4 5 D Y SY9 40(R)SY9 40(R)-M03 04 03 04 03 04 03 04 VQ7 Applicable cable O.D. 3.5 to 7 109.2 101.7 75.4 [82.4] Max. 10 202.3 64.9 90.4 (Lead wire length)

ZP

04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04 06 ZP2-T 30 WK H Width across flat J (Hexagon) (G) (F) Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 14 (Hexagon) E 13 3 3 M10 x 1 D M5 x 0.8 6 8 Y A a Dimensions common for all three drawings Dimensions

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

10 stations A, B P , EA, EB Symbol 04 06 Thread type Symbol 1 2 Nil Rc 3 4 3 4 Passage Porting specifications (A, B) EA, EB P G F Symbol M Mixed N NPT For bottom ported: 1/2 only.

Modular Design with Uniform Body Style

/4 3/8 1/2 3/4 Size 20 V V Size 30 V V Size 40 V V V Size 40-06 V 3 Modular F.R.L.

Vacuum Pad

04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04 06 ZP2-T 30 WK H Width across flat J (Hexagon) (G) (F) Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 14 (Hexagon) E 13 3 3 M10 x 1 D M5 x 0.8 6 8 Y A a Dimensions common for all three drawings Dimensions

Vacuum Pad

04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04 06 ZP2-T 30 WK H Width across flat J (Hexagon) (G) (F) Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 14 (Hexagon) E 13 3 3 M10 x 1 D M5 x 0.8 6 8 Y A a Dimensions common for all three drawings Dimensions

Vacuum Pad

04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04 06 ZP2-T 30 WK H Width across flat J (Hexagon) (G) (F) Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 14 (Hexagon) E 13 3 3 M10 x 1 D M5 x 0.8 6 8 Y A a Dimensions common for all three drawings Dimensions

Vacuum Pad

04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04 06 ZP2-T 30 WK H Width across flat J (Hexagon) (G) (F) Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 14 (Hexagon) E 13 3 3 M10 x 1 D M5 x 0.8 6 8 Y A a Dimensions common for all three drawings Dimensions

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-04 AME450-06 AMF450-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650-14 AME850-20 AME850-20 AMF850-20 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06 AMH550-10 AMH550-10 AMH650-14 AMH850-20 AM850-20 AMH850-20 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF37C1-3 IDF55C-3 IDF75D-3 IDF120D-3 IDF150D-3 IDF240D-3 IDF55C

Modular/F.R.L. Units Series AC

A 10 B 14 D 14 Port size M5 x 0.8 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/4 Model Note 1) E100-M5 E200-01 E200-02 E200-03 E300-02 E300-03 E300-04 E400-02 E400-03 E400-04 E400-06 30 23.5 28 B Center of F.R.L. body D A 32 30 30 32 36 36 E500-06 3/4 32 40 44 Piping adapter AC50, AC55, AC60, AC50A AC60A, AC50B, AC55B AC60B, AF50, AF60, AR50 AR60, AL50, AL60, AW60 E600-06 3/4 48 53 35 E600-10 1

VFS

Sub-plate Assembly Part No. 03 04 06 03 04 06 q Description No.

V

R T Metric 00 Built-in Silencer 04 4mm 06 6mm Imperial 00 Built-in Silencer 07 1/4 Models O.D size d D1 D2 L1 L2 L3 L4 M1 Weight AQ240F-04-04 4 9.5 8.9 39.3 5 13.7 23.4 13 5.7 AQ240F-06-06 6 11.5 11 43.9 6 14.7 26.5 14 7.3 AQ340F-06-06 6 11.5 11 45.2 6.3 19.6 31.7 14 12.5 Courtesy of Steven Engineering, Inc. !

CG5-S

AS4211FG-04-10 AS3211FG-02-12 -03-12 AS4211FG-04-12 AS1311FG-M5-23 AS2311FG-01-23 AS1311FG-M5-04 AS2311FG-01-04 -02-04 AS1311FG-M5-06 AS2311FG-01-06 -02-06 AS3311FG-02-06 -03-06 AS2311FG-01-08 -02-08 AS3311FG-02-08 -03-08 3.2 4 6 R 1/4 R 3/8 R 1/8 8 R 1/4 R 3/8 R 1/8 AS2301FG-02-10 AS3301FG-02-10 -03-10 AS4301FG-04-10 AS3301FG-02-12 -03-12 AS4301FG-04-12 AS2311FG-02-10 AS3311FG-02-10 -03-

CG5-S

AS4211FG-04-10 AS3211FG-02-12 -03-12 AS4211FG-04-12 AS1311FG-M5-23 AS2311FG-01-23 AS1311FG-M5-04 AS2311FG-01-04 -02-04 AS1311FG-M5-06 AS2311FG-01-06 -02-06 AS3311FG-02-06 -03-06 AS2311FG-01-08 -02-08 AS3311FG-02-08 -03-08 3.2 4 6 R 1/4 R 3/8 R 1/8 8 R 1/4 R 3/8 R 1/8 AS2301FG-02-10 AS3301FG-02-10 -03-10 AS4301FG-04-10 AS3301FG-02-12 -03-12 AS4301FG-04-12 AS2311FG-02-10 AS3311FG-02-10 -03-