HRX-OM-W002

3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22 25 26 27 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 20 20 1 10 12 1 13 4 15 3 16 15 16 18 1 23 4 8 4 3 24 24 3 2 14 (CN6) BL BL BR BR BR BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BR BR BR BR BR BR BL BL BL BL BL

JXCx-OMX0009

Communication Plug Connector . 37 7.1 Wiring . 37 7.2 Electric wire specification . 38 7.3 Wiring of communication plug connector . 38 8. LED display . 39 8.1 LED display . 39 8.2 LED and Controller Status . 39 9.

Modular F.R.L. Units

38 Q 43.9 46 54 55.5 R 5.4 6.5 8.5 8.5 AW20-A AW30-A AW40-A AW40-06-A Note) The total length of C dimension is the length when the filter regulator knob is unlocked. 65 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

VK300

8 R port: Rc 1/8 VP Type 40: Base mounted (A port bottom ported) How to Order Applicable solenoid valve VK334Applicable blanking plate assembly VK300-42-1A Bracket VK300-43-1A VG VV3K3 05 40 01 VP P port: Rc 1/8 Thread type Option Valve stations S070 R port: Rc 1/8 01 Nil None 1 station Port size Nil Rc G NPT NPTF F With bracket (Not mounted) VQ F N T 01 Rc 1 8 20 20 stations A port: Rc

VCA

VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector Mounting screws (2 pcs.)

VK300

[Option] Note) CE-compliant: For DIN terminal only VV3K3-S42-05-01 VV3K3-20-04 Common SUP/Common EXH Type 20: Body ported (A port top ported) How to Order Applicable solenoid valve VK332--M5(-Q) VK332--01(-Q) Applicable blanking plate assembly VK300-42-1A Bracket VK300-43-1A VV3K3 05 20 A port: Rc 1/8, M5 x 0.8 Valve stations Option P, R port thread type 01 1 station Nil None Nil F With

21

A1 E1 L L1 MM ND NX NZ R1 U1 A Part no. size Applicable bore size Type C9 for axis Y-020B Y-032B Y-040B 20 25, 32 40 +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 46 16 20 25 36 M8 x 1.25 9 9 18 5 14 CDP-1 48 18 20 25 38 M10 x 1.25 9 9 18 5 14 CDP-1 Type C9 for axis 68 22 24 49.7 55 M14 x 1.5 12 16 38 13 25 CDP-3 3 x 18 l A knuckle pin and retaining rings (split pins for 40) are included.

Vacuum Regulator

Digital pressure switch IRV20A l31 0 0.4 VAC side 50 22 38 R 31.5 50 48.5 56.5 6 Panel cut Panel plate thickness: Max. 4 One-touch fitting 4 Lead wire with connector (Length 2 m) Vacuum regulator (43) One-touch fitting 4 Tube is prepared by customer. 10 Series IRV10/20 Specific Product Precautions 1 Be sure to read this before handling.

25

Minimum bending radius: Power supply cable: 38 mm Transition wiring cable: 38 mm Sensor cable: 25 mm Note: Shown above is wiring with the fixed minimum allowable bending radius and at a temperature of 20 C. If used under this temperature, the connector can receive excessive stress even though the minimum bending radius is allowable.

VK3000

01 1 station Rc Q CE-compliant Nil CE-compliant F N T G 20 20 stations NPT NPTF A port: M5 x 0.8 B port: M5 x 0.8 Note) Applicable only for DIN terminal type How to Order Type 41: Base mounted (A, B port side ported) Applicable solenoid valve VK3140-(-Q) VK334-(-Q) Type VK3140 VV5K3 M5 05 41 Type VK334 Solenoid direction Valve stations Applicable blanking plate assembly VK3000-7-1A 01 1

Secondary Batteries

CE-certified Symbol EX124D-SMJ1-X182 CC-Link (Negative common) V A, B port size (Metric) A, B port size (Inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C4 C6 C8 C8 C10 C12 M A, B port Symbol N3 N7 N9 N9 N11 M One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12 A, B

3 Port Solenoid Valve Metal Seal Series VZ200 1

Applicable valve model Piping P, E port Port size Symbol VV3Z4-S50: only C6 & C8.

REC

30.0 40 70.0 39.5 64.0 33.5 69.0 38.5 65.5 35.5 67.5 37.0 67.0 36.5 63.5 33.0 Auto Switch Mounting Height (mm) D-C7 D-C8 D-H7 D-H7lW D-H7lF D-H7BAL D-B5 D-B6 D-B59W D-G5NTL D-H7C D-G39 D-K39 D-A33 D-A34 Bore size (mm) D-C73C D-C80C D-A44 HS HS HS HS HS 20 24.5 27 62 69.5 27.5 25 27 29.5 64.5 72 30 32 30.5 33 68 75.5 33.5 40 35 37.5 72.5 80.0 38 4.9-16

ZR

ZR1 V K1 5 M Z Combination of vacuum valve and release valve Manual override With light/surge voltage suppressor Pilot valve Rated voltage Electrical entry 13-3-38 38 Series ZR Large Size Vacuum Module: Vacuum Pump System Vacuum Pressure Switch: ZSE2-0R-15 Specifications Vacuum pressure switch part no.

5 Port Air Operated Valve

Bracket (for VFA1000 double) DXT144-8-1A (With 2 mounting screws) 1501 VFA1000/3000/5000 Series Dimensions: VFA1000 Series/Body Ported 2 position single VFA1120-M5(-F)(-P) 2 position double VFA1220-M5(-F)(-P) (11.7) (11.7) (Distance between ports) (Distance between ports) 38 M5 x 0.8 [4 (A), 2 (B) port] M5 x 0.8 [4 (A), 2 (B) port] 26.4 (4) 6 14.8 5 B 2 B 2 26.4 10 10 1/8 (Pilot port: Upward

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Igm: Leakage current of the servo motor (Found from Table 11.4.) 120 120 100 100 Leakage current Leakage current 80 80 60 60 40 40 [mA] [mA] 20 20 0 2 0 14 100 5.5 38 2 3.5 8 1422 38 80 150 5.5 30 60 100 3.5 8 22 60 150 30 80 Cable size[mm2] Cable size[mm2] a. 200V class b. 400V class Fig. 11.3 Leakage current example (lg1, lg2) for CV cable run in metal conduit 11 30 11.

AC Servo Motor Driver (SSCNET /H Type)

Name Detail Method (Note3, display Detail name 4) 17.1 Board error 1 DB Alarm 17.3 Board error 2 DB 17 Board error 17.4 Board error 3 DB 17.5 Board error 4 DB 17.6 Board error 5 DB 17.8 Board error 6 (Note 5) EDB 19.1 Flash-ROM error 1 DB 19 Memory error 3 (FLASH-ROM) 19.2 Flash-ROM error 2 DB 1A.1 Servo motor combination error DB 1A Servo motor combination error 1A.2 Servo motor control

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A VQZ 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Option Valve stations 01 Nil 1 station None VZ Bracket VK300-43-1A With bracket (Not mounted) F 20 20 stations VS 2(A) port: Rc 1/8 Port size 01 Rc 1/8 VFN Type 42: Base mounted (A port side ported) How to Order Applicable solenoid valve VKF334Applicable blanking plate assembly VK300-

VKF300

Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Base Mounted Type Common SUP, Common EXH Type 40/for base mounted type (Port A bottom ported) How to Order Applicable solenoid valves VKF334VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A Option Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Valve stations None With bracket (not mounted) Nil 1 station 01 Bracket VK300-43-1A F 20 stations 20 Port

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Base Mounted Type Common SUP, Common EXH Type 40/for base mounted type (Port A bottom ported) How to Order Applicable solenoid valves VKF334VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A Option Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Valve stations None With bracket (not mounted) Nil 1 station 01 Bracket VK300-43-1A F 20 stations 20 Port