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0 PE PE e !5 w !3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material PBT ADC Material Note No. q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !

Table 3-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of 3 C between inside Differential temp. of 6 C between inside radiation Model (kW) and outside of and outside of installation area installation area HRR012-A-10/20Approx.2 40 20 HRR018-A-10/20Approx.4 70 40 HRR024-A-10/20Approx.5 90 50 HRR030-A-10/20Approx.6 100 60 3.2 Installation

The tightening torque of the M3 mounting screw should be 0.8 to 1.4 Nm. Unit: Operating range [mm] Series Bore size Auto switch model 20 25 32 40 50 63 HYQ HYC HYG 7.5 7.5 7.5 7.5 7.5 7.5 7.5 7.5 8 6 7 7 7 7.5 7.5 7.5 Rail D-F6 Note) Since this is a guideline including hysteresis, it is not meant to be guaranteed.

-T: 1300/1500 Temperature stability Note 4) C 2 Circulating fluid system Pump capacity (50/60 Hz) Note 5) MPa 0.08 (at 7 L/min)/0.11 (at 7 L/min) For option -T: 0.13 (at 7 L/min)/0.18 (at 7 L/min) Rated flow (50/60 Hz) Note 6) L/min 7/7 Tank capacity L Approx. 5 Port size Rc1/2 Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Bronze, Brass, Ceramic, Carbon, PP , PE

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Heat Differential temp. of 3 oC Differential temp. of 6 oC Radiated Model between inside and outside between inside and outside kW of installation area of installation area HRS012-AApprox. 2 40 20 HRS018-AApprox. 4 70 40 HRS024-A-20 Approx. 5 90 50 The water-refrigerated thermo-cooler discharges heat

Table 3-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of 3 C between inside Differential temp. of 6 C between inside radiation Model (kW) and outside of and outside of installation area installation area HRR010-A-10/20Approx.2 40 20 3.2 Installation HRR Series 3-4 HRX-OM-X084 Chapter 3 Transport and Setting Up The water cooled

For the pilot EXH (PE) port If the solenoid valve and the manifolds pilot EXH (PE) port is restricted extremely or blocked, abnormal operation of the solenoid valve may occur. 5 SX3000-OMM0002-B SX3000/5000/7000 Series Precautions for 5 Port Solenoid Valve 3 Be sure to read before handling. Mounting 1.

PE port EA/EB port Not available with the VF5000. VF1000 > VF3000 > VF5000 > Made to Order 3: Main/Pilot valve common exhaust Nil Rated voltage Pilot exhaust port with piping thread (M3) specification (Refer to page 14.)

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

PE!$cI;i~tj9h ",' Action Double aCllng single rod Double acti ng single rod 'Model i Standard type CS2 iCS~ ,: Smooth cylinder CS2Y How to Order 0 .. c o C I A With rod end bracke t D o a. ..

SYJ7000 M3 0.8Nm Caution Replacement of Pilot Valve Pilot valve in this series are improved to provide excellent energy saving results. However following this improvement, these new valves are no longer compatible with the conventional pilot valve used at the interface.

Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT, LONG STK, ACTUATOR, CQ2 COMPACT CYLINDER, PE, 63MM CQ2 DBL-ACT AUTO-SW, 4.13937 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Heat Differential temp. of 3 oC Differential temp. of 6 oC Radiated Model between inside and outside between inside and outside kW of installation area of installation area HRS030-A-20 Approx. 6 100 60 The water-refrigerated thermo-cooler discharges heat by using facility water.

Stainless (I include heat exchanger brazing), SiC, Carbon, PP, PE, POM, FKM, EPDM, PVC (No. copper used) Circulating fluid wetted materials Servieable conductivity: 0.22S/cm or more. (Resistivity: 4.5Mcm or less.) This option doesnt include a function to maintain high resistivity/conductivity. You need ion exchange resin filter (DI filter) for the purpose.

Stainless (I include heat exchanger brazing), SiC, Carbon, PP, PE, POM, FKM, EPDM, PVC (No. copper used) Circulating fluid wetted materials Servieable conductivity: 0.22S/cm or more. (Resistivity: 4.5Mcm or less.) This option doesnt include a function to maintain high resistivity/conductivity. You need ion exchange resin filter (DI filter) for the purpose.

Stainless (I include heat exchanger brazing), SiC, Carbon, PP, PE, POM, FKM, EPDM, PVC (No. copper used) Circulating fluid wetted materials Servieable conductivity: 0.22S/cm or more. (Resistivity: 4.5Mcm or less.) This option doesnt include a function to maintain high resistivity/conductivity. You need ion exchange resin filter (DI filter) for the purpose.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com