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4 u Section AA Parts list Material Note No. Description No.

Rotary Actuator

[mm] MSZ Size H N U UU 50 39 15 114 134 63 45 17 136 158 80 55 20 165 190 100 60 25 190 220 Size H N U 50 30 15 105 63 33 17 124 80 43 20 153 100 44 25 174 CRQ2X MSQX H MRQ FT F U Double shaft with key: ClRA1FY Double shaft with four chamfers: ClRA1FZ Note) Other dimensions are the same as the basic type.

Table of Contents

Rc G NPT Nil F N Port size 04 1/2 (Female thread) 14-20-51 2 Series ADH4000 Construction Component Parts q o i u !1 No.

Vacuum System Peripherals:

ZZYX3 45 F J Common specifications Ejector mounting position Positive common Negative common Nil N U side D side U D SUP/EXH block assembly specifications Mounting position of connector Standard, Internal pilot specifications External pilot specifications Number of ejectors 1 to 10 stations Nil R S RS U side D side U D Voltage specifications Internal pilot, Built-in silencer External pilot

IIIIIII

36) 1.20 o,24 (6) (30) NV:2il450-N012 U T 4-63 lbs. (2.1 Ko) P.T 0.1 7 in. (4.4 mm) u 0.08 in. (2.0 mm) 0.25 in. (6.4 mm) '75 PSIG (5 Kgflcm2) A B c U E F G H K M N P R 525 t33 4) 4 3 9 1 1 1 4 ) 1 1 8 t30l ) 4 7 t22\ 0 0 6 a1 5l ) l t (3) 0 8 0 20 4\ 1 5 7 r4nl ) 7 1 tlAl 0 9 6 tr^ 5' 1 2 6 (32) 1.42 (36) 1 2 0 J U 5 (6) Millimelers in Parentheses NVAm5GNo13 F U F 4.63lbs. (2.1 Kq) P.T.

Mechanical Valves Series NVM, NVFM, NVZNI

(36) 1.20 o,24 (6) (30) NV:2il450-N012 U T 4-63 lbs. (2.1 Ko) P.T 0.1 7 in. (4.4 mm) u 0.08 in. (2.0 mm) 0.25 in. (6.4 mm) '75 PSIG (5 Kgflcm2) A B c U E F G H K M N P R 525 t33 4) 4 3 9 1 1 1 4 ) 1 1 8 t30l ) 4 7 t22\ 0 0 6 a1 5l ) l t (3) 0 8 0 20 4\ 1 5 7 r4nl ) 7 1 tlAl 0 9 6 tr^ 5' 1 2 6 (32) 1.42 (36) 1 2 0 J U 5 (6) Millimelers in Parentheses NVAm5GNo13 F U F 4.63lbs. (2.1 Kq) P.T.

Plug-in/Plug Lead: Single Unit

U D U D Kit/Electrical entry/Cable length F L Cylinder port kit (D-sub connector) kit (Lead wire cable) 03 04 B CM Rc 3/8 Rc 1/2 Bottom ported Rc 1/2 Mixed Note) Note)In case of mixed specification, indicate on the manifold specification sheet. .

VQC

Kit type Thread type Port size F T Rc G NPT/NPTF 1 2 S Kit T Kit Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B VQC4000 Port size VQC2000 VQC1000 3.2 One-touch fitting 4 One-touch fitting 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported U-side end plate assembly !2 U-side end plate assembly part no.

SYJ300/500/700

For type R and U, DC voltage is only available. Power saving circuit is only available in the Z type. Bracket AC (50/60 Hz) Nil: Without bracket F: With bracket 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 3 port For type W, DC voltage is only available.

Guide Cylinder Series MGG

(mm) 1 300st 1 200st 100st 200st 100st 100st 75st 75st 0 0 20 30 40 50 0 0 10 20 30 40 50 60 70 0 0 10 20 40 60 80 100 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGM 40Stroke 6 (Slide bearing type) 5 800st 700st 4 600st 3 500st 2 300st 400st st: Stroke (mm) 1 200st 100st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM 50Stroke 8 (Slide bearing

MB

H F ZZ + Stroke Standard model no.

45

S 5 VDC R 3 VDC 1-6-130 Made to Order Specifications Series SX3000/5000 Plug-in Type How to Order Manifold How to Order Valve Manifold Assembly Ordering example Type 45 Single solenoid (External pilot specifications) 3 5 C4 R 45 SS5X F U 05 U SX3140R-5LOZ (3 sets) Double solenoid (External pilot specifications) Series SX3240R-5LOZ (1 set) SV 3 SX3000 5 SX5000 Built-in silencer SZ U side Common

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Component Parts No. q w e r t y No. u i o !0 !

Compact Manifold Regulator Series ARM5

V L4=50+T+X 50 SMC H H L L O O S S U U C C P P K K 8 U 57 (at handle locked) DIN rail part no.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

(b) Connection of driver and servo motor 1) The servo motor power supply terminals (U, V, W) of the driver match in phase with the power input terminals (U, V, W) of the servo motor. Driver Servo amplifier Servo motor U U V V M W W 2) The power supplied to the driver should not be connected to the servo motor power supply terminals (U, V, W).

Title not found

Protective Face Cover a i t More usr-f riendly controls a Raised rubber button fil controls are clearly U" set apart. simple to fr operate, soft to the !a toucn. .

Electric Grippers

LEHZ LECP6 LEC-G LECP1 LECPA LEHZJ LEHF LEHS Finger Finger L L L: Gripping point F: Gripping force L: Gripping point F: Gripping force Step Motor (Servo/24 VDC) F F F F Attachment Workpiece Attachment Workpiece LEHF10 LEHF40 Gripping force accuracy: 20% (F.S.)

LG1H

Refer to page 57 for mounting. 30 A B Stroke Model LG1H21NC500-F LG1H21NC600-F LG1H21NC700-F LG1H21NC800-F LG1H21NC900-F LG1H21NC-1000-F 360 460 560 660 760 860 500 600 700 800 900 380 480 580 680 780 880 95 B 95 100 8(4) x 6.2 (170) () () 1000 20 95 A 95 110 (150) () () Positioning Time Guide Positioning time Positioning time (sec.)

Fluoropolymer Piping Equipment

21.5 LQ1R2E-F3/16" 2.9 LQ1R2F-F 1/8" 1.8 LQ1R3A-F 3/8" 1/4" 3.6 21.5 LQ1R24-F 4 2.6 LQ1R2F-F 3 1.8 LQ1R31-F 10 1/4" 5.8 21.5 LQ1R3B-F 1/4" 3.6 LQ1R3C-F 3/8" 3/8" 25.5 5.8 25 LQ1R3D-F 1/4" 3.6 LQ1R3F-F 3/8" 1/8" 34.5 19.7 5.8 18.5 LQ1R4A-F 1/2" 3/8" 24 7.4 5 20 9 18 17 36.5 21.5 LQ1R32-F 8 5.5 LQ1R33-F 6 3.6 LQ1R34-F 10 3/8" 25.5 24 23 5 9 18 36.5 7.4 20 17 23 25 LQ1R35-F 8 5.5 LQ1R36-F 6

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Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !