SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

CQ2

Spring return Spring extend Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l X 55 l M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l

CNG

500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) 1000 1000 Maximum speed: V (mm/s) 9-5-7 Cylinder with Lock Double Acting

Modular F.R.L. Unit

Note1) AC25 to 60 AW+AL+[V] AC20A to 40A Note 1) Applicable tube O.D for auto drain connection should be 3/8" in case NPT thread port is chosen. 3-port valve for AF+AR+[V] AC20B to 50B V residual pressure AF+AFM+AR+[V] AC20C to 40C release AW+AFM+[V] AC20D to 40D When more than one attachment is required, order in alphabetical order.

Air Slide Table Series MXW

V 390.5 415.5 340.5 365.5 290.5 315.5 228.5 240.5 270.5 Solid State Auto Switch: D-M9B (V), D-M9N (V), D-M9P (V) 2-Color Indication Solid State Auto Switch: D-M9BW (V), D-M9NW (V), D-M9PW (V) Stroke (mm) Model 175 150 25 125 200 225 250 275 300 50 75 100 A 23.5 48.5 23.5 27.5 23.5 23.5 B 204.5 83.5 179.5 104.5 129.5 154.5 MXW8 W 11.5 36.5 11.5 15.5 11.5 11.5 V 216.5 95.5 191.5 116.5 141.5

CQM

IC circuit 5 V A76H A96V A96 Yes No A72 A73 A80 A72H A73H A80H 200 V Solid state switch Reed switch Grommet 100 V 12 V IC circuit A90V A93V A90 A93 5 V, 12 V 12 V 12 V Relay, PLC 2-wire No Yes 24 V A73C A80C A79W F7NV F7PV F7BV J79C F7NWV Connector IC circuit 5 V, 12 V Grommet Diagnostic indication (2-color indication) Yes 3-wire (NPN) 3-wire (PNP) F79 F7P J79 M9NV M9PV M9BV M9N M9P M9B 5

Electric Actuators

Other + +V D OUT Warning OV X Relay 1.

LJ1H

L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) U V V Connect to motor cable (U, V, W) Servo motor power (W) W W 101 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAPLC 2 m or less Note 5) FX3U-MT/ES (Manufactured by Mitsubishi Electric) S/S LECSA 24V 0V Note 4) Note 4) CN1 CN1 L Sequencer power

Base Mounted Metal Seal/Rubber Seal Series VQ

G T L S M kit (Flat ribbon cable with terminal block) kit (Terminal box) kit (Lead wire) kit (Serial transmission unit) kit (Multi-connector kit) Number of pins: 20 (VQ2000 only) 2-4-113 Valve Specifications Sonic conductance Type of actuation Voltage Electrical entry Manual override C [dm3/(sbar)] 4/2 5/3 (A/B R1/R2) 12 V 24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz Push type

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

voltage drop 2.4 V or less 2.4 V (to 20 mA)/ 3.5 V (to 50 mA) 0.8 V or less Indicator light Red LED lights when ON.

IDG

temperature (C) 25 25 25 1 l/min (ANR) {In the case of Inlet air pressure 0.7 MPa} Dew point indicator purge air flow rate Regulator construction (Type V only) Relief type Port size (Nominal size B) 1/4, 3/8 3/8, 1/2 2.23 (2.33) 2.26 (2.36) 2.99 (3.09) 3.14 (3.24) 3.29 (3.39) Type M Weight (kg) (With auto-drain) 3.34 (3.45) 3.37 (3.48) 4.10 (4.20) 4.25 (4.35) 4.40 (4.50) Type V Note 1) For

Vacuum Pad

With adapter ZP3P 20 PT T SF A5 Pad diameter Symbol Pad diameter 20 20 25 25 35 35 50 50 Mounting thread size Symbol Mounting 20 25 35 50 Thread size A5 M5 x 0.8 V V A12 M12 x 1.75 V V AG1 G1/8 V V AG2 G1/4 V V AG3 G3/8 V V Male thread Pad material Symbol Material B5 M5 x 0.8 V V B8 M8 x 1.25 V V Female thread SF Silicone rubber Complies with the FDA (USA Food and Drug Administration

CNG

40 32 MLGP 30 40 50 30 40 50 25 40 RLQ Load weight: m (kg) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg

Speed Controller with Indicator

V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS2ll1FSl-G02 1/4 VNote 4) V V V V AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

HRL

ion (SO42) [mg/L] 50 or less v Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v Standard item dV dt = Voltage increase ratio dV Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (

SY

Note 16 Blue White 1.5m 3m 5m AXT100-DS25-015 AXT100-DS25-030 AXT100-DS25-050 17 Purple None 25 core cable x 24AWG Withstand voltage V, 1min., AC 1000 18 Gray None 19 Orange Black Insulation resistance Mkm, 20C 5 or more For other commercial connectors, use a 25 pin type female connector conforming to MIL-C-24308. 20 Red White 21 Brown White 22 Pink Red Note) The minimum bending radius for

21

(NPN) 2-wire 5 V, 12 V 12 V Terminal conduit Relay, PLC Yes Yes No No No Yes Yes Yes 24 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Grommet 12 V 2-wire Water resistant (2-color indication) 4-wire (NPN) With diagnostic output (2-color indication) IC circuit 5 V, 12 V 3-wire (NPN equivalent) A96 IC circuit 5 V A93 A90 B54 B64 C73C C80C A33A

Digital Flow Switch (Integrated display type)

1 V 1.04 V 1.05 V 5 V Current output (4 to 20 mA) 4 mA 4.16 mA 4.19 mA 20 mA F E G PF2M701/702/705/710/750/711/721 PF2M725 Voltage output (0 to 10 V) 1 0 V 0.10 V 0.12 V 10 V 1: The analogue output current from the connected equipment should be 20 A or less when selecting 0 to 10 V.

Pin Clamp Cylinders

(2-color indicator) Grommet Yes 24 V 3-wire (NPN) 5 V,12 V M9NWV V V V v v IC circuit 3-wire (PNP) M9PWV V V V v v 2-wire 12 V M9BWV V V V v v Grommet Yes 2-wire 24 V 12 V 100 V A73 V V V Relay, PLC Diagnostic indication (2-color indicator) A79W V V Reed auto switch * Solid state auto switches marked with v are produced upon receipt of order. * The D-A9l and A9lV cannot be

Modular F.R.L. Unit

port valve for V residual pressure AC20B to 40B AF + AR + [V] release AC20C to 40C AF + AFM + AR + [V] AC20D to 40D AW + AFM + [V] When more than one attachment is required, order in alphabetical order.