energy saving effect

3000 m Circulating fluid Note 1), 2) Tap water, 15 to 40% Ethylene glycol aqueous solution, Deionized water Set temperature range Note 1) C 5 to 35 Cooling capacity Note 3), 9) kW 10.5 15.7 20.5 25 28 Heating capacity Note 4) kW 2.5 3 5.5 7.5 Temperature stability Note 5) C 0.1 Rated flow (Outlet) L/min 45 (0.43 MPa) 45 (0.45 MPa) 125 (0.5 MPa) Maximum flow rate L/min 120 130 180 Maximum

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

50 55 60 35 40 45 50 55 60 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

. : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48 1.1 33 1.6 t: Rotation time (s) 71 71 54 71 71 1.5 54 2.2 74 107 86 74 78 2.4 78 2.9 Rotary actuator 137 166 197 137 137 4.0 147 4.8 197 233 398 197 363 5.3 196 6.4 296 378 517 296 451 9.7 314 12.0 296 476 12.0 333 493

CC

80 86 35 25 1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116

70astamb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

HRX-OM-S004

5.19.1 Alarm buzzer sound setting . 5-45 5.19.2 Setting/checking of alarm buzzer sound . 5-45 5.20 Alarm customizing function . 5-46 5.20.1 Alarm customizing function . 5-46 5.20.2 Setting and checking of the alarm customizing function . 5-50 5.20.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-63 HRS Series HRX-OM-S004 Contents 5.21 Communication function

rep-modular-e

Rotate the assembly 45 degree (right or left) until the lock button is tossed up to mount the bowl assembly. Ensure the lock button is up. Lock button is up.

IDU/IDF

Grommet with waist Power cord outlet Grommet with waist 6 to 12 B A B C C A A 240 240 65 65 30 30 30 30 C 70 70 40 40 50 50 50 50 A 240 240 30 30 50 50 50 50 B 38 38 32 32 45 45 45 45 Model IDU6D IDU8D IDU11C IDU15C IDU22C1 IDU37C1 IDU55C IDU75C B 38 38 50 50 45 45 45 45 C 70 70 49 49 50 50 50 50 Model IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C IDF75C Transformer box (1795) Power cord

Vacuum System Peripherals:

5 45 45 45 M5 x 0.8 ZX 1 8 1 4 , , , , 1 4 3 8 1 4 3 8 1 2 ZR 3 4 3 4 , 1 1 ZM Inlet pressure 0.7 MPa, Pressure drop 0.05 MPa ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Modular, Regulator Series AR Flow rate (l/min (ANR)) Set pressure (MPa) Pressure

Base Mounted Metal Seal/Rubber Seal Series VQ

(Values at the initial period) Vibration resistance No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature.

High Power Cylinder Series RHC

Note) Note) 45 + 45 (n 2) 10 15 45 (n = 2, 4, 6...)

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Rotate the assembly 45 degree (right or left) until the lock button is tossed up to mount the bowl assembly. Ensure the lock button is up. Lock button is up.

Cylinder with Lock Series MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0

High Vacuum Angle Valve, XL Series

80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External 40 45 60 60 95 105 XLG Operating time ms Note 2) 45 50 85 90 132 150 XLGV Flange type KF (NW), K (DN) KF (NW) Body: Aluminum alloy Bellows: Stainless steel Seal: FKM (fluoro rubber

CNA

105 + 45 n = 4, 8, 12, 16 100 + 45 n = 4, 8, 12, 16 95 + 45 n = 4, 8, 12, 16 20 + 45 n = 2, 4, 6, 8 2 (Different sides, Same side), 1 15 120 130 140 n = 4, 8, 12, 16 D-P5DWL (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 140 + 65 n = 4, 8, 12, 16 130 + 65 n = 4, 8, 12, 16 120 + 65 n = 4, 8, 12, 16 15 + 65 n = 2, 4, 6, 8 9-7-21 22 Series CNA Proper Auto Switch Mounting Position (Detection at stroke

CNA

105 + 45 n = 4, 8, 12, 16 100 + 45 n = 4, 8, 12, 16 95 + 45 n = 4, 8, 12, 16 20 + 45 n = 2, 4, 6, 8 2 (Different sides, Same side), 1 15 120 130 140 n = 4, 8, 12, 16 D-P5DWL (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 140 + 65 n = 4, 8, 12, 16 130 + 65 n = 4, 8, 12, 16 120 + 65 n = 4, 8, 12, 16 15 + 65 n = 2, 4, 6, 8 9-7-21 22 Series CNA Proper Auto Switch Mounting Position (Detection at stroke

HRX-OM-M090

Fig 9.4-7 Cooling capacity (HRS018-A-20-G) 3) HRS024-A-20-G 3500 3500 Ambient Ambient temperature temperature 3000 3000 Cooling capacity[W] Cooling capacity[W] 25 25 2500 2500 32 32 2000 2000 40 40 45 45 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Cooling capacity is reduced by 300W if option

Programless controller Step motor (servo 24 VDC)

800 45 800 45 800 45 800 9 50 900 50 900 50 900 50 900 10 55 1000 55 1000 55 1000 55 1000 11 60 1200 60 1200 60 1200 60 1200 12 65 1400 70 1400 70 1400 70 1400 13 70 1600 80 1600 80 1600 80 1600 14 75 1800 90 1800 90 1800 90 1800 15 80 2000 100 2000 100 2000 100 2000 Refer to the table below for the speed / acceleration of LEHS series.

Air Fittings & Tubing

Hexagon socket head male connector 1 4 KQS 3 8 1 2 1 8 45 Male elbow 1 4 KQK 3 8 1 2 1 8 Universal male elbow 1 4 KQV 3 8 1 2 2.5-6

A

90 70 66 35 11 13 90 3.2 90 NAL6000 95 268 45 95 70 66 35 11 13 90 3.2 95 Courtesy of Steven Engineering, Inc. !