SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12

SZ3000

(Station 1) Light/surge voltage suppressor Side A: Orange Side B: Green (7.5) 43.5 Internal pilot manifold L: Dimensions n: Stations External pilot manifold L: Dimensions n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123

0.4

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 420 SV SYJ SZ VF VP4 VQ 1/2 VQ 1/2 VQ 4/5 VQC 1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 421 Construction

Air Slide Table

MXQR-CS16-X11 11 14 5 36 17 M5 x 16 M5 x 16 15 13.5 23 21 13.5 16 33 Q MXQR-CS16-X12 25 43 MXQR-CS20 5 27 J MXQR20 MXQR-CS20-X11 M6 x 16 M6 x 20 15 13 17 6 45 20 M12 x 1.25 37 16 27 25 17 22 H K MXQR-CS20-X12 25 47 MXQR-CS25 5 30 MXQR25 MXQR-CS25-X11 15 M8 x 18 M8 x 20 M14 x 1.5 40 16 19 6 54 22 18 33 31 19 22 MXQR-CS25-X12 25 50 L 1) Size of hexagon socket head bolt 2) Mounting the adjuster

Compressed Air Cleaning Filter Series

N 90 J 31 K 10 U 9 V 9 L 18 M 9 W 15 O 55 P 111 Q 50 R 88 T 3.2 AME450C AME550C 20 105 106 3 106 10 36 1/2, 3/4 151 24 130 122 3 122 15 44 206 100 33 10 9 9 18 9 15 65 126 60 102 3.2 3/4, 1 187 50 Series AME Dimensions AME650/850 Bracket 2 x port size (Accessory) IN OUT Maintenance space (mm) M Bracket related dimensions Model Port size A B C D E F G H I 314 406 J 40 30 K 15 15 L 20 24 N

Compact Type

L k Imaginary stroke L' = (Stroke) + k + L k: Distance between the center and end of the plate 6 (Example) q When using CXSJM6-10 and L = 15 mm: Imaginary stroke L' = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 6 ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 w When using CXSJL25-50 and L = 10 mm: Imaginary stroke L' = 50 + 6 + 15 = 71

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12

AC

50 B610T Bracket For AF/AL For AFM/AFD For AR B340 B240 Mounting thread Model Applicable model A B C D F H J K L M N R t Bracket/ For AF, AL, AFM, AFD, and AR M4 X 8 l AF2000, AL2000 AFM2000, AFD2000 B240A 18 27 8.4 33 3 2.7 27 26 5.4 40 2.3 4.5 14 (Round head Phillips screw) Model File M4 X 8 l (Hexagon socket head cap screw) SAC2000, #15 SAC2503, #15 SAC4000, #15 SAC4006, #15 SAC5000, #15

CM2

Applicable bore size LC LD L LE LF LG LH LR LT LX LY LV CG1 CM-E020B CM-E032B 20/25 32/40 8 6.8 24.5 22 15 30 30 10 3.2 12 59 18.4 CD-S02 10 9 34 25 15 40 40 13 4 20 75 28 CD-S03 MB Clevis Pin (mm) C95 Applicable bore size 20 25/32 40 Part No.

ZP

Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats 8 Hexagon width across flats 12 Hexagon width across flats 8 H: M5 x 0.8 H: M6 x 1 Model A B D K L Y C G F F C G H: M6 x 1 H: M8 x 1 D E Model A B C K L Y E F E F ZPT40B 40 50 43 53 24.4 32.4 48 57 3 15 4.5 ZPT50B 34 38 ZPT10B 10 13 12 15 5.5 8.7 13.8 19 20 25 ZPT13B 16 18 40 44 66 70 25 56 60 16 19 16 18.5 20 21 23.5 25

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

Compact Type Dual-Rod Cylinder Series CXSJ

L k Imaginary stroke L' = (Stroke) + k + L k: Distance between the center and end of the plate 6 (Example) q When using CXSJM6-10 and L = 15 mm: Imaginary stroke L' = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 6 ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 w When using CXSJL25-50 and L = 10 mm: Imaginary stroke L' = 50 + 6 + 15 = 71

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Internal pilot manifold L: Dimensions n: Stations External pilot manifold L: Dimensions n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123 112.5 91 16 4 135.5 125 101.5 17 5 135.5 125 112 12 6 148 137.5 122.5 13 7 160.5 150

Water-cooledThermo-chiller

15 0 0 0 2 4 6 8 10 12 14 16 18 20 0 5 10 15 20 25 30 35 40 45 50 55 60 Flow rate (L/min) Flow rate (L/min) If the circulating fluid flow drops below 0.53 gpm (2 L/min)., the shutdown alarm activates and operation stops.

Rotary Actuator/Vane Style Series CRB2

10 15 T99 L CDRB2 W F 180 S With auto switch Size: 10, 15 CDRB2 W B 180 S T79 L With auto switch Size: 20, 30, 40 Size Made to Order Refer to the table below for details.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 563 Series VQ1000/2000 1021Construction Directional Control Valves Air Grippers Modular F.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 563 Series VQ1000/2000 1021Construction Directional Control Valves Air Grippers Modular F.

HRX-OM-Q026

less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L]

HRS100/150

Water 15% Ethylene Glycol Aqueous Solution Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02