ITV

20 mA DC (Sink type) L N Without cable connector Pipe thread type Nil Rc N NPT F G Note) Bracket Nil Without bracket Flat bracket Note) Complies with ISO1179-1 (2007).

1.1

[mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] 1.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

4 83 73 5 4 x 30 l Polished round 20 CDP-7A 100 250.065 0.117 4 88 78 5 4 x 36 l Polished round 24 Dd9 m l L * Split pins and flat washers are included.

REA/REB

M1 = F x L A M2 = F x L M3 = F x L Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL Note) Deflection: Displacement of section A when force acts on section F REBH15, 25 REBH15, 25 REBH15, 25 REBH15 REBH15 REBH25 REBH15 REBH25 0.08 0.03 REBH25 0.02 Deflection (mm) Deflection (mm) Deflection (mm) 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 5 10 15 20 0 5 10 15 20 0 25 Moment

Air Cylinder

cover shape [mm] Bore size A B C GA H KA L LB LD LH LX MM NA NB X Y 10 15 12 14 16 20 4.2 23 16 3.5 through, 6.5 counterbore depth 4 8 12 M4 x 0.7 20.5 4.8 28 8 16 15 18.3 20 16 20 5.2 26 20 4.5 through, 8 counterbore depth 5 10 16 M5 x 0.8 20.5 4.8 28 8 Dimensions by Stroke: Spring Extend (Dimensions not mentioned in the below table are the same as the above table.)

Series IDG

Outlet air atmospheric pressure dew point C P1 = 0.5MPa P1 = 0.5MPa 10 10 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 0 40 80 120 160 20 40 60 80 0 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG20 IDG30 P1 = 0.3MPa P1 = 0.3MPa 0 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.5MPa 10 P1 = 0.5MPa 10 P1 = 0.7MPa 20 20 P1

2/3 Port Valve

(MPa) : Fluid temperature (C) S : Effective area (mm2) Cv : Cv factor (/) 4.1-70 VXA31/32 Dimensions VX VNl VQ With bracket K 6 7.5 Symbol Model Port size P Rc(PT) , , A B C D E F G H J M 14.5 17 L 29 32 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil

LX

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXS M6 x 1 7.4 13 LXS M6 x 1 7.4 20 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body. Caution 2. Through holes 2.

Integrated Controller

(Excludes when the stroke exceeds 2000 mm) Table Displacement (Reference Value) 0.08 EQFS32 (L = 30 mm) W L EQFS40 (L = 37 mm) 0.06 Displacement [mm] EQFS25 (L = 25 mm) 0.04 EQFS16 (L = 20 mm) 0.02 0 0 100 200 300 400 500 Load W [N] This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table. Check the clearance and play of the guide separately.

ZP

20 124 69 30 134 79 50 179 99 75 32 M14 06 08 A14 H (Buffer body) 19 4 12 10 10 129.5 61.5 x 1 20 126.5 71.5 30 136.5 81.5 50 181.5 101.5 75 50 40 49.5 32.3 18.5 12.5 Width across flats K 2.5 19 5 10 130.5 62.5 J L L 50.5 33.3 19.5 13.5 50 20 127.5 72.5 30 137.5 82.5 50 182.5 102.5 75 50 Dimensions Per Vacuum Inlet: One-touch Fitting A Model R S T Fitting part min. hole size Vacuum inlet

NCM

(A 20 inch tube with a 0.179 inch bore is used for piping between the cylinders and the switching valve.) 0.001 0.001 40 30 20 1.Operating pressure 50 PSI Cylinder stroke 30 inch Bore size 1.25 inch Air consumption 0.5 l(ANR) 2.Operating pressure 50 PSI Piping length 20 inch Bore 0.179 inch Air consumption 0.1 l (ANR) 3.Total air consumption = (0.5 + 0.1) x 10 x 5 = 30 l/min (ANR)

Compressed Air Cleaning Filter Series

O F 34 10 one-touch fitting Combination of D: With auto drain (N.O.) and H: For medium air pressure D I L T (Accessory) Bracket N K J M U V E B IN OUT 20 1/4 female threaded C Option H A J: Drain guide 1/4 female threaded Drain G M5 Maintenance space 20 1/4 female threaded (mm) A Model Port size Bracket related dimensions B C D E F G H 173 I 56 J 20 K 5 T 6 U 6 L 12 M 6 V 10 N 35 O 54 P 70

REA/REB

M1 = F x L A M2 = F x L M3 = F x L Note) Deflection: Displacement of section A when force acts on section F REAH10 REAH10 REAH10 0.08 0.03 Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 0.5 1.0 1.5 0 1.0 2.0 Moment (Nm) 0.5 1.5 2.5 0 0.5 1.5 0 1.0 Moment (Nm) Moment (Nm) REAH15/20/25 REAH15/20/25 REAH15/20/25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25

REA/REB

0.02 0.5 1.0 1.5 0 1.0 2.0 Moment (Nm) 0.5 1.5 2.5 0 0.5 1.5 0 1.0 Moment (Nm) Moment (Nm) REAH15/20/25 REAH15/20/25 REAH15/20/25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 0.08 0.03 REAH25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) Moment (Nm) REAHT25/32 REAHT25

Compact Guide Cylinder

distance L [mm] Eccentric distance L [mm] 13 Model Selection MGPK Series L L Plate Material Aluminum Alloy /MGPKM Horizontal Mounting m m MGPKAM12 to 50 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 100 100 50 50 50 10 10 50 32, 40 32, 40 32, 40 Load mass m [kg] Load mass m [kg] 32, 40 25 25 20 20 25 20 16 25 16 20 12 12 1 1 16 16 12 12 0.1 10 30 50 51 100 200 0.1 10 30

CG1

TT TV ZZ TW Z TX TY TZ Z 20 25 32 3.2 3.2 4.5 35.8 39.8 49.4 43.4 48 59.4 139 146 155 178 (187) 138+l 159+l CD-G02 CD-G25 CD-G03 42 42 48 118 125 131 150 (159) 16 20 22 28 28 28 147+l 168+l 153+l 177+l 198+l 170+l (179+l) 40 4.5 58.4 CD-G04 71.4 56 30 30 (207+l) 225+l 193+l (205+l) 173 (185) 205 (217) 50 6 86 72.4 CD-G05 64 36 36 (237+l) 235+l 198+l (210+l) 178 (190) 215 (227) 63 8 105.4

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Controller side PLC side For 4 Axes JXC73/83 L JXC C2 (Terminal no.) (R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

Slider Type Ball Screw Drive/11-LEFS Series

upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction flow rate: 20 L/min ISO Class 5 upper limit LZ 10 10 LC3F2 Suction flow rate: 40 L/min ISO Class 4 upper limit ISO Class 4 upper limit 1000 1000 Suction flow rate: 20 L/min Suction flow rate: 50 L/min 100 100 Suction flow rate: 30 L/min 10 10 1 1 0 0.1 0.6 0.5

AC

Y50 SAC4006, #12 14 AC4000-06 to AC4040-06 Y50 Y60 SAC5000, #12 AMR AC5000, AC5500, AC6000 15 Y60 AC5020, AC5520, AC6020 AWM L Bracket/ Interface with L Bracket AWD ITV VBA VE VY G AL Interface with L bracket L bracket L bracket Interface with L bracket A B C D E F G R L Applicable model L bracket, Interface with L bracket Model 20 12 4.5 B110L 3 Y10L 25 5 8 2.25 27 AC1000 to AC1020 Interface

Environment

LEY LES Table Displacement (Reference Value) LEPY LEPS 0.08 LER W L LEF32 (L = 30 mm) LEH 0.06 Displacement [mm] LEY -X5 LEF25 (L = 25 mm) 11LEFS 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 11LEJS 0.02 25ALEC 0 0 100 200 300 400 500 LEC S Load W [N] LEC SS-T Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.