Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Deflection MXH MXU 25 8 MXS 0.2 0.3 MXQ Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 25 st MTS8-30 st MTS25-200 st 0.2 175 st MXF 20 st 150 st 125 st 15 st 0.1 10 st 5 st 100 st MXW 75 st 0.1 50 st 25 st MXJ 0 10 20 30 2 1 0 3 MXP Lateral load (N) Lateral load (N) MXY 32 12 MTS 0.3 0.5 MTS32-200 st 0.2 175 st 150st 125 st

AIR SLIDE TABLE

16.5 16.5 16.5 16.5 16.5 16.5 24.1 18.1 18.1 25.1 25.1 31.1 50.1 50.1 MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 33 23 23 23 29 38 63 63 63 MXQ20B 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 30.9 31.9 31.9 31.9 44.9 44.9 46.9 69.9 69.9 Solid state auto switch: D-M9M9 A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 2

MX-OMP0051

8.5 ON 14 2-9 3mm 3mm 2-10 5~6mm 0.05~0.15Nm 90 ( ) 15 D-M9M9W A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(A,C) 16.5 16.5 16.5 16.5 16.5 16.5 16.5 14.1 6.1 6.1 14.1 14.1 33.1 33.1 MXQ16(A) 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20 14 14 21 21 27 46

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Series SY3000/5000/7000 Dimensions 2-One-touch fitting (ports P, R) Applicable tube O.D.: 10 SS5Y5-60Stations U (Station n) (Station 1) 2 3 4 5 6 7 8 9 10 Stations 51.9 (4.9) (Light/surge voltage suppressor) 43.8 (5.5) L1 123 135.5 148 160.5 185.5 198 210.5 235.5 248 L2 112.5 125 137.5 150 175 187.5 200 225 237.5 L3 88 104 120 136 152 168 184 200 216 L4 17.5 15.5 14 12 16.5 15 13 17.5

AC Servo Motor Driver (Pulse input type/Positioning type ）

OUTLINE DRAWINGS 91 to 9-5 9.1 Driver . 92 9.2 Connector. 95 10. CHARACTERISTICS 101 to 10-7 10.

Table of Contents

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6 2 Paddle Style Flow Switch Series IF3 Fluid and Ambient Temperature Range Enclosure Open type Using indoors away from water drop.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

C10 Option 10 10 stations M Mixed D side For bottom ported: Rc 1/4, 3/8 only.

AC Servo Motor Driver

65536 0 Pt 0 Pt S CDV CMX n Pb 10 10 3 1000 125 Hence, set 65538 to CMX and 125 to CDV.

Compact Cylinder Series CQS

Attachable on 4 sides (20, 25) Attachable on 3 sides (12, 16) Auto switch CUJ CU CQS Bore size (mm) Stroke (mm) Page CQ2 Standard stroke Long stroke 12 16 5, 10, 15, 20 25, 30 5, 10, 15, 20 25, 30 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Standard 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 RQ Single rod CQS Double acting Double acting 551 35, 40, 45, 50, 75, 100 125, 150, 175, 200 75, 100, 125

EX120/121/122

k/20 k/50 k/ 125 k/250 k/ 500 k/800 k/ 1 Mbps 156 k/625 k/ 2.5 M/5 M/ 10 Mbps Communication speed 5 Mbps 10 M/100 Mbps 125 k/250 k/500 kbps 167 kbps Specified file Note 3) EDS file EDS file GSD file EDS file EDS file EDS file 48/32 SAS7: 8/8 (2 slave units) SAS9: 4/4 64/64 SAS3: 8/8 (2 slave units) SAS5: 4/4 Occupied area (Number of inputs/outputs) (2 stations, remote device station)

VZ100/300/500

Air Fluid Operating pressure range (MPa) 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time (ms) (at the pressure of 0.5 MPa) (1) 10 to 50 (No freezing. Refer to page 4-18-4.) 20 or less Max. operating frequency (Hz) 10 Flow characteristics Refer to the table below.

ZP

EPR AMJ Material Pad diameter (mm) ZP 40HBN ZP 50HBN ZP 63HBN ZP 80HBN ZP100HBN ZP125HBN 40 1 0 17 +10 +1 50 2 0 33 +19 +1 N NBR Misc. 63 40 3 0 63 +37 +2 40 S Silicon rubber 80 50 6 0 103 +61 +2 50 U Urethane rubber 100 63 12 1 206 +121 +4 63 F Fluoro rubber 125 80 22 3 390 +228 +7 80 E EPR 100 100 Pad type 125 125 HB Large bellows pad Dimensions 40 50 63 80 100 125 ZP 40HB ZP HB ZP HB F

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 32 to 50 25, 50, 75, 100, 125, 150, 175, 200 Manufacturing of Intermediate Strokes Refer to page 24 for cylinders with auto switches.

MGP

15 5 10 5 10 10 5 10 D-A9 D-A9V D-M9V D-M9 10 10 10 10 D-M9W D-M9WV D-M9AVL 15 10 D-M9AL 15 10 5 D-Z7 D-Z80 D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-Y7WV 15 10 10 15 10 5 5 5 10 15 15 10 15 D-Y7BAL 10 20 75 18-3.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

30

B C 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 JC20-8-100 JC20-8-125 JC32-10-100 JC30-10-125 JC25-10-150 JC40-12-125 JC40-12-150 JC40-12-175 JC40-14-150 JC50-16-150 JC63-16-200 JC63-18-150 DA00207 DA00169 DA00141 DA00142 DA00140 DA00145 DA00146 DA00143 DA00148 DA00151 DA00150 DA00153 13 13 17 17 17 19 19 19 22 24 24 27 Spare parts Rod end nut The basic type has one rod end nut

MGQ

, 40, 50, 75, 100, 125, 150, 175, 200 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 26 64 17 10 19 52 74 2 8.5 4 46 36 72 8 30 10 60 37 13 18 47 8 M5 x 0.8 13 M5 x 0.8 7 M5 x 0.8 Rc 1/8 10.5 32 76 21 10 21 62 88 2 9 2 56 42 86 8 38 12 70 37.5 14 26 47.5 9 M6 x 1.0 15 M6 x 1.0 8 M6 x 1.0 Rc 1/8 11.5 MGQM (Slide bearing) A, DB, E Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E

AC Servo Motor Driver (Pulse input type)

No Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 65536 114688 32768 65536 Electronic gear denominator *3 PA07 1 250 125 125 125 250 125 125 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032)/ 0003 (LEC-MR-RB-12) 1 Rotation direction selection *4 PA14 0 0 (+Counter motors side ) (+Counter motors side