RHC

) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5/K59/G5WK 59W/G5BAL/G5NTL 4 (n

C76

..) ( n2 2 15 + 45 (n = 2, 4...) ( n 2) 2 15 10 10 60 60 + 45(n 2) 15 6-10-21 22 Series C76 Construction [First angle projection] Single acting, Single rod C7632/40-50S Spring return 50 mm stroke or less !

PFxx-OMY0005

(When reversed output is selected, the main screen displays [n1]/[n2]).

MHZ2/MHZJ2

2 N2 2 N2 2 N2 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

1

Supply pressure normal Supply pressure drop Supply pressure increase Normal filled pressure Insufficient filled pressure Excessive filled pressure P1 n1 n2 Vacuum Set value n1 n2 P1 Set value P2 n1 n2 P1 P2 P2 Time Normal mode Operating normally Operating normally Operating normally ON Time Reverse mode ON OFF Time OFF Time AUTO-SHIFT terminal When the Auto Shift Function is used.

SMC Electronic Switch Series Variations

Set value Vacuum P1 P2 P1 P2 P2 Time Operating normally Operating normally Operating normally ON Normal filled pressure Insufficient filled pressure Excessive filled pressure OFF Time n1 n2 When autoshift function is used n1 n2 n1 n2 Set value 10[ms] or longer GND Disconnected Time Reverse mode ON OFF Time When autoshift function is used Autoshift terminal 10[ms] or longer GND Disconnected

Digital Flow Switch (Integrated display type)

Only dry air, N2, CO2 and Ar are applicable. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

Digital Flow Switch (Remote type monitor unit)

Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min 0 to 26.2 L/min 0 to 52 L/min Min. setting/display unit 0.01 L/

M Series

Do not use this product when N2 is used as clean dry air. Tubing material Polyurethane Fluid Air, N2 Note3), water Note 1) Note2) Max. operating pressure Note 4) 1 MPa Ambient and fluid temperature -5 to 60OC (No freezing) Water: 0 to 40OC (No freezing) Note 4) Apply the maximum operating pressure to the tubing during the tube connection.

Parallel Style Air Gripper Series MHZ

] 4 x MM through (Thread for mounting attachment) C C B A 4 x H through (Hole for mounting attachment) S S O O B A (mm) (mm) Model A 2.5 3 4 5 6 7 9 Model A 2.5 3 4 5 6 7 9 B 5 5.7 7 9 12 14 17 B 5 5.7 7 9 12 14 17 C 2 2 2.5 4 5 6 7 H 2.4 2.9 3.4 4.5 5.5 6.6 9 MM M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 MHZ2-62 MHZ2-10 MHZ2-6 1 MHZ2-10 2 N2 2 N2 2 N2 2 N2 1 N1 1

High-Precision Digital Pressure Switch

lead wire Symbol Description M5 female thread ZS-46-A1 ZS-46-3L M5 Lead wire with connector (3-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port L Without waterproof cover R1/8 ZS-46-A2 01 R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 Symbol Operation manual*1 Calibration certificate*1 Nil Y K T NPT1/8 N01 NPT1/8 Piping adapter ZS-46-N2

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

1 N1 1 N1 11221122112211222 N2 2 N2 2 N2 2 N2 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D 1 N1 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D Specifications and dimensions other than the above are the same as the basic type (including narrow type).

ZSM1-115/121

ISG Supply pressure normal Supply pressure drop Supply pressure increase ZSM P1 Set value Vacuum P1 P2 Normal filled pressure Insufficient filled pressure Excessive filled pressure P1 P2 n1 n2 n1 n2 P2 Filled pressure Set value Reverse mode AUTO-SHIFT input n1 n2 Time Normal mode Operating normally Operating normally Operating normally ON OFF Time Time ON When the Auto Shift Function is used

Body Size: 20 (1500 L/min), Pressure Range: 50 (0.005 ~0.9Mpa), Fieldbus: SEN (EtherNet/IPâ„¢), Thread: Rc, Port: 2 (1/4", 1000, 2000), Made to Order: X26 (Manifold Mounting)

Body Size: 20 (1500 L/min), Pressure Range: 50 (0.005 ~0.9Mpa), Fieldbus: SEN (EtherNet/IPâ„¢), Thread: Rc, Port: 3 (3/8", 2000, 3000), Made to Order: X400 (Gauge Port)

Body Size: 1500 L/min, Pressure Range: 0.005 ~0.9Mpa, Fieldbus: EtherNet/IPâ„¢, Thread: Rc, Port: 1/4", 1000, 2000, Made to Order: Manifold Mounting

Body Size: 1500 L/min, Pressure Range: 0.005 ~0.9Mpa, Fieldbus: EtherNet/IPâ„¢, Thread: Rc, Port: 3/8", 2000, 3000, Made to Order: Gauge Port

A_HEC-OM-K001

If the fluid also generates corrosive gas, perform N2 supply and exhaust (N2 purge) inside the Heat Exchanger. 9.6 Applicable Fluids 9-19 A_HEC-OM-K001-1.7 Chapter 9 Appendix 9.7 Calculation of Dew Point Temperature (from psychrometric chart) Fig.9-17 Psychrometric chart 1. Measure the ambient temperature and humidity. 2. Plot the ambient temperature on the X axis, Temp.

Table of Contents

Nitrogen gas (N2) Freon 11, 113, 114, Turbine oil , Hydraulic fluid Conduit Carbon dioxide (CO2) (0.7 MPa max.)

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

(Station 1) Light/Surge voltage suppressor Side A: Orange Side B: Green 18.9 (DIN rail dimension) (62.4) ON ON 43.5 OFF OFF (7.5) 34.2 Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5