Vacuum Unit

pressure exhaust port M3 1 82.9 (Ejector system) 87.9 (Vacuum pump system) Vacuum break flow adjusting needle Exhaust (EXH) port Metric size: 08 (8) Inch size: 09 (5/16) 26.4 54.8 2 x Common supply (PD) port4 2.6 PS and PD port dimensions1, 4 For high-noise reduction silencer exhaust 62 53 45.9 D 37.4 38 8.4 B 26.4 2 x Common exhaust (EXH) port2 33.8 10.5 n x Individual exhaust (EXH) port3 (n1

Table of Contents

Applicable shaft types: J, K, T a1 1.5 L1 CRB2 N1 CRBU2 (mm) N1 L1 a1 Size CRB1 0 0.025 0 0.025 20 6.8 10 2h9 30 9.2 14 3h9 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Double Shaft CRA1 Symbol: A39 Symbol: A40 Applicable to single vane type only Applicable

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T a1 1.5 L1 CRB2 N1 CRBU2 (mm) N1 L1 a1 Size CRB1 0 0.025 0 0.025 20 6.8 10 2h9 30 9.2 14 3h9 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Double Shaft CRA1 Symbol: A39 Symbol: A40 Applicable to single vane type only Applicable

Digital Flow Switch ( compatible)

Input of set values Setting of Setting of P1L/n1L Setting of P_1/n_1 P1H/n1H P1/n1 H_1 WH1 (page 44) (page 41) (page 43) 4. Delay time Setting of dtH1(ON) dtL1(OFF) (page 42) 5. Selection of display colour rED/Grn/1SoG/1Sor/2SoG/2Sor (page 45) 6.

Digital Flow Switch ( compatible)

Input of set values Setting of Setting of P1L/n1L Setting of P_1/n_1 P1H/n1H P1/n1 H_1 WH1 (page 40) (page 37) (page 39) 4. Delay time Setting of dtH1(ON) dtL1(OFF) (page 38) 5. Selection of display colour rED/Grn/1SoG/1Sor/2SoG/2Sor (page 41) 6.

PFxx-OMX0002

(When reversed output is selected, the main screen displays [n1]). Refer to the switch output modes list for the relationship between the set values and operation (page 35).

Digital Flow Monitor

(When reversed output is selected, the sub display (left) shows [n1/n2].)

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B (10) Vacuum (V) port Note10) Note 11) C2 Straight type2 One-touch tube fitting Metric size C4 Straight type 4 One-touch tube fitting N1 Straight type 1/8 One-touch tube fitting Inch size N3 Straight type 5/32 One-touch tube fitting L2 Elbow type 2 One-touch tube fitting Metric size L4 Elbow type 4 One-touch tube fitting LN1 Elbow type 1/8 One-touch tube fitting Inch size

MQQ

A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32 For

MQQ

MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x 1.25 97.5 31.5 151 40.5 20.5 33 29 20 Rc 1/8 32 18 10 13 30 8.5 M26 x 1.5 M10 x 1.25 102.5 34.5 160 44.5 20.5 38 32 25

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ~ = Refer to grommet type for other dimensions. 3-2-6 7 5 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VK3000 Type 20 Manifold Body ported (Top ported) n1 = Number of VK3000 n2 = Number of VK300 VV5K3-20Station Grommet: G DIN terminal

Proposals for Energy Saving

Multiple units available with unit switching function Display units can be easily selected. mmHg kPa PSI kgf/cm bar Vacuum Positive Pressure MPa PSI kgf/cm bar Variety of switch output modes Sensors Measuring Instruments ON ON Hysteresis mode OFF OFF P2 P1 n2 n1 (Standard) (Inverted) Window comparator mode ON ON OFF OFF n1 n2 P1 P2 (Standard) (Inverted) Exact detection of atmospheric

Low Friction Cylinders Series MQ

Ball bushing O-ring NBR CX Retaining ring Nickel plated Carbon tool steel Rod end nut Nickel plated Steel MQ Mounting nut Steel RHC RZQ D-X Individual -X 1183 Series MQM Dimensions Basic type: MQMLB 6 Mounting nut M12 x 1 Rod end nut 2 x M5 x 0.8 15 M4 x 0.7 13 4 16 11 21 4.5 11 16 15 8 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut 2 x P G1 G2 NN I NA D J A F N2 N1

ZSE30/ISE30

OFF OFF OFF OFF P1 n1 P2 P1 n2 n1 (Standard: Factory setting) (Reversed) (Standard: Factory setting) (Reversed) Press the SET button to set the mode and proceed to the output type setting. 3 2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 Pressure setting Auto preset setting Manual setting Press the SET button in the measuring mode to display the set value.

ZSE30/ISE30

OFF OFF OFF OFF P1 n1 P2 P1 n2 n1 (Standard: Factory setting) (Reversed) (Standard: Factory setting) (Reversed) Press the SET button to set the mode and proceed to the output type setting. 16-2-6 7 Series ZSE30/ISE30 High Precision, 2-color Display Digital Pressure Switch Pressure setting Auto preset setting Manual setting Press the SET button in the measuring mode to display the set value

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

450 137.5 425 100 387.5 75 362.5 348 635.5 310.5 598 285.5 573 260.5 548 223 510.5 198 485.5 173 460.5 148 435.5 110.5 398 85.5 373 298.8 588.8 269.8 559.8 240.8 530.8 211.8 501.8 182.8 472.8 153.8 443.8 124.8 414.8 95.8 385.8 66.8 356.8 37.8 327.8 4.3-12 Series VQ20/30 For Dry Air, Pilot Operated 2 Port Solenoid Valve Dimensions Plug lead unit manifold (VV2Q32) VX VNl VQ Equation L1= (n1

Valve Single Unit

Triangle mark A COM B + A COM B + A COM B + A COM B + A COM B + Manual override (Press and turn for the locking type.) (1) Stations (n) (2) (Light/Surge voltage suppressor) 75.3 67.7 58.2 60 37.8 26 Connector polarity indication 28.5 8.8 Applicable connector: 26 pins MIL with strain relief (Conforming to MIL-C-83503) SS5X7-20N Connector polarity indication n: Stations (n1 + n2) Stations n

IZSE_X101

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9

Series SY3000/5000 Valve Replacement Parts 1 How to Order Port Block Assembly Mounting screw 0V 6A SY One-touch fitting Series Thread type 3 3000 Nil Rc 5 F 5000 G N NPT T NPTF Pilot type ∗ Except M5 Nil Internal pilot R External pilot A, B port size Thre

x 0.8 1/8 Standard (Valve mounting screw not falling-out-prevention type) Valve mounting screw falling-out-prevention type One-touch fitting (Metric) Applicable series SY3000 SY5000 Port size Symbol C2 C3 C4 C6 C8 2 One-touch fitting 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting One-touch fitting (Inch) Applicable series Port size Symbol SY3000 SY5000 N1

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 ø0.5 Part no. Symbol Applicable tubing O.D. 07 ø0.7 KJS23-M5 ø3.2 (Straight) 1 Solenoid valve combination (Refer to Table (1).) KJS04-

Pilot valve symbol 1 2 3 4 5 6 100 AC 200 AC 110 AC 220 AC 24 DC 12 DC q w e r t y u i Nil Y Nil Y Nil Nil Nil Nil K1 K1 J1 J1 Q1 Q2 N1 N2 Combinations (1) to (8) in the above table are the only possible options. 850