Large Size Vacuum Module: Series ZR

(mm) 1.0 1.3 1.5 1.8 2.0 Maximum suction flow rate (l/min.

CL

l Applicable bore size (mm) Part no.

Compact Cylinder Series CQS

CQSB12-L-PS CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS Contents Set of nos. above , , Seal kit includes , , . Order the seal kit, based on each bore size. (The long stroke type includes 2 tube gaskets.) Since the seal kit does not include a grease pack, order it separately.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Refer to section 11.5 for the wire used for the extension cable. 10m or less 2m 50m or less MR-BKS1CBL2M-A1-L MR-BKS1CBL2M-A2-L MR-BKS1CBL2M-A1-H MR-BKS1CBL2M-A2-H 50m LE-CSBExtension cable (To be fabricated) () Servo motor MR-BKS2CBL03M-A1-L MR-BKS2CBL03M-A2-L (5) LE-CSB24VDC power Electoromagnetic (Note4) Trouble (4) Supply for lock Brake(MBR) DC24V (Note3) (MBR) (3) (ALM) (MBR) AWG20

NVZseies

(M5)) (ln ca8e of % NPTF) M Vpe plug connector(M) L typ plug connector(L) 133S (340) ',3.A3 (3&) lo-32Nom. (Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Grease Volume Part no. 5 g GR-L-005 10 g GR-L-010 150 g GR-L-150 3. Do not wipe out the grease in the sliding part of the air cylinder.

3 Way,3 Port Solenoid Valve NVZ Series

(M5)) (ln ca8e of % NPTF) M Vpe plug connector(M) L typ plug connector(L) 133S (340) ',3.A3 (3&) lo-32Nom. (Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O.

10

Bore size [mm] Dd9 L l m d Part no.

ZP

L J Model A B C D E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.

Flow Sensor Series PFMV

PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) 2 L-type brackets, 2 mounting screws M3 x 25L For 2 stations PF2W 2 L-type brackets, 2 mounting screws M3 x 35L For 3 stations 2 L-type brackets, 2 mounting screws M3 x 45L For 4 stations PF2D 2 L-type brackets, 2 mounting screws M3 x 55L For 5 stations IF 951 Series

Smooth Cylinder

How to Order Standard L 40 150 CM2Y L H7BW S 40 150 CDM2Y With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

Rotary Actuator/Vane Type

E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.

MB1

L (Example) Y69BL 5m .

HEC-OM-S008

sum CR (H) (L) Thermo-con STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) Host SOH UT ENQ COM Check sum CR (H) (L) Thermo-con SOH UT STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) COM indicates communication command.

Rotary Actuator

Size 40 L L 2 K G1 0 0.030 F D B 4 K N V1 Body (B) T V2 M S Body (A) h Key dimensions L1 b C G2 J F h (h9) L1 b (h9) Model L 2 x R A CRB2B;40 4 0 0.030 4 0 20 E 0.030 CRB2B=10-=S CRB2B==-=SE/DE A port B port N W 2 x R 2 x M3 x 0.5 (Depth 4) Size 10 only (for mounting unit) Y X (mm) Q Model A B C D G1 G2 J K L M N P &Q1 E(g7) F(h9)

FSQ seies

l O R RSUIOA32 48 5.5 MOxl 10 G@@-l-qtr-5'i.]

Air Cylinder RSQ Series Stopper Cylinder

N l O R RSUIOA32 48 5.5 MOxl 10 G@@-l-qtr-5'i.]

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

: A29 DA 30 MM DA 30 30 MM DA 30 MM L W MM A L H AL H LB K A AL A H L A H T AL L K H MM Symbol: A30 30 MM W A T H 149 CP96 Series Made to Order Please contact SMC for detailed dimensions, specifications, and lead times.

PFxx-OMK0003CN

PF-OMK0003CN-E A 1L(2) L () M315L L () / ZS-36-A1 1 L (2 ) (M315 L)2 ZS-36-A2 2 L (2 ) (M325 L)2 ZS-36-A3 3 L (2 ) (M335 L)2 ZS-36-A4 4 L (2 ) (M345 L)2 ZS-36-A5 5 L (2 ) (M355 L)2 -11No. PF-OMK0003CN-E DIN -12No. PF-OMK0003CN-E F 15[V]F.S.=5-1=4[V] (1%F.S.=40.01=0.04[V]) F.S. (full spanfull-scale) 90 -13No. PF-OMK0003CN-E 3%F.S.

25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 18 2 x 5.4 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 431 IZS40/41/42 Series Dimensions Ionizer/IZS41, 42 30 44 304 6.8 30 85 9 60 50 A 60 x (n-1) L n (Number of emitter cartridges), L Dimension L (mm) IZS4-340 IZS4-400 IZS4-460 IZS4