EX120/121/122

y t Shown with cover removed.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

PSE54 1 M3 C2 Port size M3 M3 x 0.5 M5 female thread, through type IM5 Note) At the factory, the connector is not attached to the cable, but packed together with it for shipment. M5 M5 x 0.8 M5 female thread, through type (with mounting hole) 01 R 1/8 (with M5 female thread) IM5H Option N01 NPT 1/8 (with M5 female thread) R04 4 reducer R06 Description Part no.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C3: One-touch fitting ass'y for 3 2n-C3, C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5

7.5

0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS NTJ-015SUS SNKJ-016SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Table of Contents

for 4 C6: One-touch fitting for 6 M5: M5 thread Note) 3 position types need two stations.

Fieldbus System

(No.4-40 UNC) 5 Joint bracket Links Units to one another. 6 Connector for Unit (Plug) Transmits signals to the neighboring Unit and supplies power. y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

KR

(mm) Connection thread M thread Uni thread <M5, M6> <M5, M6> A Weight (g) L2 D1 D2 M L1 Model Urethane KAL23-M5 15 9.6 16 15.5 M5 x 0.8 M6 x 1 7 6 Applicable tubing 8 8 15.5 19.5 21 3.4 2.9 8 4 5 1 8 KAL23-M6 KAL23-U01 10 3.2 17.5 10 KAL04-M5 15.5 M5 x 0.8 M6 x 1 8 16 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20.5 20 8 14 10 10 4.2 4.2 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 x 0.8

One-touch Fittings Series KQ2

M5 A D1 L1 D2 M L2 Part No.

Dual Speed Controller with One-touch Fitting Series ASD

4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

Compact Cylinder with Lock Series CLQ

NZ L NX Part no. 20 Y-G02 +0.4 +0.2 +0.4 +0.2 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 16 21 IY-G02 8 25 Y-G03 20 25.6 IY-G03 10 32, 40 Y-G04 36 41.6 IY-G04 18 50, 63 Y-G05 44 50.6 IY-G05 22 80 Y-G08 56 64 IY-G08 28 100 Y-G10 64 72 IY-G10 32 Knuckle pins and retaining rings are included.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

VP300/500/700

Common exhaust: VV3P5-41Stations 1-03 (G) (E) (T) (D, Y) (X port) (M5 x 0.8) N.C.

Electric Actuator with Integrated Guide

Tact time Moving distance: _mm t = Tact time: _s s = Cycle time: _s Time t s z x Example) Projection distance x: _mm y: _mm z: _mm Work piece moment y Environment General, Clean room, Mist environment, Dusty environment 94 98 Series LTF Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Prevents Micro-Bubbles

S) LLA3A 90 127 164 201 118 155 192 229 94 141 188 235 LLA4A 112 159 206 253 144 191 238 285 118 177 236 295 LLA5A 140 199 258 317 178 237 296 355 (mm) Dimensions B C E G H K M U N P Q R V W Y A Model LLA2A LLA3A LLA4A LLA5A M5 x 0.8 M3 x 0.5 50 31 68 20.5 41.5 13 18 4.5 34 35 Rc 1/4, NPT 1/4 19 M4 5.5 47 37 88.5 25.5 52.5 17.5 39 5.5 42.5 51.5 Rc 3/8, NPT 3/8 23.5 M5 6.5 Rc 1/8 NPT 1/8 Rc

reduces flow setting time

AK VCHC ASR ASQ 589 AS-FS Series Construction: Elbow Type Seal method: Gasket seal For M5, 10-32UNF Seal method: Sealant For R, NPT thread o !0 !1 e !3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !

MY1

X m3 x g m2 x g Vertical mounting Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting M3 Static load (m) m1 m2 m3 m4 Note) M1 Static moment M1 m1 x g x X m2 x g x X m4 x g x Z z y M2 m1 x g x Y m2 x g x Y m3 x g x Z Y Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a mass movable by thrust.