0.4

5 w !2 !6 !4 !1 t e r i y 63 Exploded View of Manifold Housing assembly and SI unit no. F kit P kit J kit G kit T kit L kit S kit M kit Construction Semistandard No. Manifold Part no.

Guide Cylinder/Compact Type Series MGC

8 y e $2 !7 i !3 o !6 u !9 w #9 @5 $1 @7 @4 #8 #0 @9 @8 r !4 #6 #7 @3 #5 $0 #4 $4 !1 !2 !0 $5 A View A-A' A' Ball bushing bearing Front mounting flange type B B' @6 @0 !8 $3 y !

KJ

Union Y: KJU D Applicable tubing O.D.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Pilot valve symbol 200 AC 12 DC 100 AC 110 AC 220 AC 24 DC K1 K1 K2 J1 J1 J2 Q1 Q2 N1 N2 Nil Y q w Nil e Nil Y r t Nil y Nil u Nil i Nil o Nil !0 Combinations q to !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

PF2M7 10 C6 L M q w r t y u i e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min w Flow adjustment valve/Piping entry direction With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02, N1, N2, F1, F2 Straight Symbol Port size Rated flow

0.4

2 i o q y !1 !5 !4 w !3 !0 r e u t 426 B Exploded View of Manifold Housing assembly and SI unit no. No. Manifold Part no.

Sine Rodless Cylinder Series REA/REB

0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 @6 REBHT32 Component Parts Component Parts No. Description No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(Size: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering

VQ4000

Function Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R Seal (1) (2) Metal seal Rubber seal 0 1 1 2 3 Stations U side Note 1) Applicable to DC specifications. Note 2) For external pilot specifications, refer to page 2-5-39. Combination of the external pilot and perfect interface is not possible.

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

VCL

Note 2) The mass is the value for the grommet type. 334 Series VCL Direct Operated 2 Port Solenoid Valve For Oil Construction q w VX2 e VXD r VXZ VXE Component Parts t VXP Description Material No. y Option Standard VXR 1 2 3 4 5 6 7 Clip Stainless steel u Tube assembly Stainless steel, Cu Ag VXH Coil assembly Class B Class H IN Armature assembly Stainless steel, FKM, PPS (Class B only)

5 Port Solenoid Valve SY Series

y q e (EB) 3 (EA) 5 (P) 1 t 2 position double JIS Symbol 2 position double (A) (B) 4 2 q w y u r (P) 1 (EB) 3 (EA) 5 t 3 Position Closed center / Exhaust center / Pressure center JIS Symbol 3 position closed center (A) (B) 4 2 q w y u r 3 position exhaust center 3 position pressure center (EB) 3 (EA) 5 (P) 1 t (This figure shows a closed center type.)

7.5

0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !

/

u u y t w e t t y w w e e q q q 1 port 2 port 1 port 2 port 1 port 2 port r r r !

Vacuum Module Series ZX

PV/V port size Nil Y M6 x 1 (Option) M5 x 0.8 Nil L Without lock nut Pilot valve With lock nut DC: 1 W (With indicator light: 1.05 W) AC DC: 0.45 W (With indicator light: 0.5 W) Vacuum switch electrical entry Nil Nil Lead wire length 0.6 m Grommet type L C Lead wire length 3 m Lead wire length 0.6 m Lead wire length 3 m Without connector (Without lead wire) Y Caution CL Only 24 VDC and 12

-fl Seies

, % NPTF Side Ports sPo 1s1 -31 Non Flug-in type o Subplate ass y t sPFo191-s Plug-in type with terminalblock sPFo193-3; sPo193-31 1/8NPTF side & 1/4NPTF bottom Ports @ rExlernal pilot tvpe ordet SPFol9lB-ole) AB ports: 01 i1 /8NPF); 02 (1/4NPIF) 5 Port Pilot Type/Rubber Seal Series NVFR3000 Plug-in Type, Non Plug.in Type Plug-in Type Non Plug-in Type (Addiliona, fqnction achieved by ustng

VZM400

-01-06 VZM450-01-06S Toggle lever VZM450-01-08 VZM450-01-30R VM-30CR Red VM-30CB Black VZM450-01-30B Push button (Mushroom) VM-30CG Green VZM450-01-30G VM-30CY Yellow VZM450-01-30Y VZM450-01-32R VM-32CR Red VM-32CB Black VZM450-01-32B Push button (Extended) VM-32CG Green VZM450-01-32G VM-32CY Yellow VZM450-01-32Y With a set of red, black, green, yellow VM-33C Push button (Flush) VZM450-01

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

, % NPTF Side Ports sPo 1s1 -31 Non Flug-in type o Subplate ass y t sPFo191-s Plug-in type with terminalblock sPFo193-3; sPo193-31 1/8NPTF side & 1/4NPTF bottom Ports @ rExlernal pilot tvpe ordet SPFol9lB-ole) AB ports: 01 i1 /8NPF); 02 (1/4NPIF) 5 Port Pilot Type/Rubber Seal Series NVFR3000 Plug-in Type, Non Plug.in Type Plug-in Type Non Plug-in Type (Addiliona, fqnction achieved by ustng