PFM7 Port size Instruction manual Symbol Description Flow rate range 10 With instruction manual (Leaflet: Japanese and English) None Nil N 25 50 11 01 02 N01 N02 F01 F02 C4 C6 C8 N7 Rc1/8 Rc1/4 NPT1/8 NPT1/4 G1/8 G1/4 Unit specification With unit switching function M Nil Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l 4 (5/32") one-touch fitting 6 one-touch
min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure characteristics Conditions: Upstream pressure 2.0MPa Downstream pressure 0.8MPa Flow rate
Vacuum Pad: Ball Joint Type ZPT/ZPR Series Pad Diameter: 10, 13, 16, 20, 25, 32, 40, 50 on n io on n a io a pt pt s s or la or la ds nt ds nt ed ed a a or or w w l f l f or or ea ea k k id su id su pe rfa pe rfa ty ty ce ce nt nt s s oi oi ac ac l j l j ac ac al al e e B B s s ZP3 ZP3E ZP2 ZP2V ZP ZPT ZPR ZPT ZPR XT661 ZPT Series: Vertical Vacuum Entry Type ZPR Series: Lateral Vacuum Entry
(Refer to Copy function on page 10.) 5 Series ZSE30A(F)/ISE30A Dimensions Z/ISE30A(F) Piping 01 N01 / 25 8 9.5 30 200.1 2 x M3 x 0.5 thread depth 4 Lead wire with connector M5 x 0.8 10 200.1 30 01: R1/8 N01: NPT1/8 1.5 Width across flats 12 C4H C6H N7H One-touch fitting 4 mm 5/32 inch straight One-touch fitting 6 mm straight One-touch fitting 1/4 inch straight 17.95 21.75 17.55 10.3 9.8 14
port Weight Body 24 g 34 g 36 g 27 g 28 g 29 g 30 g 30 g 36 g Lead wire with connector +39g Cable specifications Conductor area 0.15 mm2 (AWG26) Insulator Outside diameter 1.0 mm Color Brown, Blue, Black, White, Gray (5 core) Sheath Finished outside diameter 3.5 -77No.PS-OMU0003-D Dimensions M5 type 01/N01 type Piping specifications Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width
(Refer to Copy function on page 41.) 36 2-Color Display High-Precision Digital Pressure Switch ZSE30A(F)/ISE30A Series Dimensions Z/ISE30A(F) Piping specifications ZSE20 ISE20 ZSE30 ISE30 ZSE30 ISE30 01 N01 / ZSE40 ISE40 25 8 9.5 1.5 30 200.1 2 x M3 x 0.5 thread depth 4 Lead wire with connector ZSE10 ISE10 ISE70 M5 x 0.8 10 ZSE80 ISE80 200.1 30 01: R1/8 N01: NPT1/8 PS ISA3 Width across flats
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)
Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)
Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)
Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)
Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)
Gauge Adaptor (w) P30501 056 NPT Run Tee fitting gauge installation (90") Gauge Adaptor (Y) P30501 057 Branch Tee fitting gauge installation (90") I For SlG, pressure range 0-30psi, 1/8 NPT G43-P2-N01 or KS1OB.SD2 (St. Steel) Pressure Gauge For OUT 1, OUT 2 pressure range 0-150 psi, 1/8 NPT G43-P10-N01 or KSlOB-AD11 (St.
Gauge Adaptor (w) P30501 056 NPT Run Tee fitting gauge installation (90") Gauge Adaptor (Y) P30501 057 Branch Tee fitting gauge installation (90") I For SlG, pressure range 0-30psi, 1/8 NPT G43-P2-N01 or KS1OB.SD2 (St. Steel) Pressure Gauge For OUT 1, OUT 2 pressure range 0-150 psi, 1/8 NPT G43-P10-N01 or KSlOB-AD11 (St.
Regulator for manifold Accessory NARM1000-6A1-N01G Body size Port size (OUT side) None (with plug) Pressure gauge G 01 8 1 1000 2000 Porting Thread Symbol IN OUT A1 A2 B1 B2 N Rc(PT) NPT Number of stations Manifold side Body side Manifold side Body side Common 1 1 station Individual Model Part Name NARM1000 NARM2000 Regulator w/o mfld NARM1000A NARM2000A Pressure gauge G15-P10-N01 G15
Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)
Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)
Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)
Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)
Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)