Series SV

21 22.5 13.5 M5 x 0.8 (External pilot port) 99.2 84.9 23.4 M5 x 0.8 (Pilot EXH port) 2-4.3 (Mounting hole) 21 21.5 A B PE 38 46 A B A B SMC B A X Manual override (non-locking) A side: Orange B side: Green EA EB P 21.5 21 61 69 19.4 (Light/Surge voltage suppressor) (L = 300 to 5000) 134.4 128.8 M12 waterproof connector 60.5 58.7 26.5 13.5 5-Rc 3/8, 1/4 (Piping port

CLQ

16 16 W Dust cover (Manual unlocking unit) L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (Manual unlocking unit) M5 x 0.8 unlocking port (Unlocks when pressurized) Rod end male thread H1 Rod end nut H2 X C1 L1 Stroke range Without auto switch With auto switch Bore size (mm) A G L M U VH VV W E H I K Q S D C A B B 61 68.5 19.5 22.5 51 58.5 10 12 7 12 29.5 32.5 20 25 36

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 21 22.5 13.5 86.2 M5 x 0.8 (External pilot port) 71.9 10.4 21 21.5 M5 x 0.8 (Pilot EXH port) 2 x 4.3 (For mounting) A B PE SMC 38 46 A B A B B A X Manual override P A side: Orange B side: Green EA EB 21.5 21 61 69 6.4 (Light/surge voltage suppressor) (L = 300 to 5000) 121.4 115.8 M12 waterproof connector 60.3 58.5

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(Z) TT QQ (G) D-X T Q 20U R UU (Piping port) (Opposite side: Same) Data N (I) (L) (Z) W C (mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ L plug connector (L): VQZ22(R)-L-C4/C6/M5 DIN terminal (Y): VQZ22(R)-Y-C4/C6/M5 VZ VS Indicator light 84 300 VFN (Lead wire length) 30.5 <35.5> 87 Max. 10 Applicable cable O.D. 3.5 to 7 Pg.7 Cover diameter 1.5 Cross section 0.23 mm2 Indicator light < >: AC 61.5 M plug connector (M): VQZ22(R)-M-C4/C6/M5 54 36 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 89 78 Indicator

Compact Cylinder with Lock Series CLQ

clevis type: CLQD/CDLQD CD hole H10 Shaft d9 4-M5 x 0.8 Cap bolt Double clevis type (mm) S Stroke range Without auto switch With auto switch Bore size (mm) A B 69 78.5 CL CL B 88 98.5 19.5 22.5 78 88.5 A A + Stroke CL + Stroke RR CW CU 5 79 88.5 29.5 32.5 5 to 50 5 to 50 20 25 L G B + Stroke +0.4 +0.2 -0.1 -0.3 CZ CX Bore size (mm) CD CX G S CW CZ L L1 RR CU 12 14 8 10 27 31 39.2 43.2 18

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Bottom Mounting Style / CJ2RA, CJ2RA 10112122X GC Y Relief port M5 x 0.8 GA GB Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 MM C D B 0 0.3 L LX B 0 0.3 LB LH Head cover port location Axial direction (R) NA H A Z + Stroke S + Stroke NB 2 x LD The overall cylinder length does not change.

Auto Switch Guide

switch mounting screw (M4) M5 x 0.8 x 12 l RHC Mounting bracket (A) MK(2) RS Q G Auto switch Auto switch mounting bracket RS H A Set screw (M4) RZQ Mounting bracket (b) Tie-rod MI W S Auto switch mounting screw (With hexagon socket head) M5 x 0.8 CEP1 CE1 Auto switch CE2 Bracket set screw M5 x 0.8 x 12 l ML2B Mounting bracket (A) C J G5-S 1.

C85

F (mm) Bore AM EE KK LD ZZ B C D G1 G2 H K L LH LX N1 N2 NA S SW WH XB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8 15 9.5 7 8 M5 x 0.8 M4 x 0.7 74 16 4 17 16 23 14 58 4 12 12 19 5 3.5, 6.5 depth of counterbore 4 23.5 10 15 9.5 7 8 M5 x 0.8 M4 x 0.7 74 16 4

Compact

L L Model Screw size Maximum tightening torque [Nm] L (Maximum screw-in depth)[mm] LEMBl M5 x 0.8 3 8 LEMC25 LEMH25 M4 x 0.5 1.5 7 LEMC32 LEMH32 M5 x 0.8 3 9 6. Do not dent, scratch or cause other damage to the body and table mounting surfaces. This may cause unevenness in the mounting surface, play in the guide or an increase in the sliding resistance.

3 Port Solenoid Valve Metal Seal Series VZ200 1

length 2-2.8 mounting hole VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP VG VP S070 Pilot EXH Locking type manual override VQ VKF VQZ 1 2 DIN terminal: VZ2 2-D(Z)-M5 1 2 L plug connector: VZ2 2-L(Z)-M5 VZ 300 (Lead wire length) VS VFN With light/surge

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C A 54 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 14 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 25 25 6-M5 x 0.8 thread depth 10 (A, B, C common view) 50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B,

MY1

(A) Black zinc chromated MY-16B-stroke (B) Nickel plated MY-16BW-stroke 4 Series MY1W Dimensions: 16, 20 L (LL) 4-MM with depth M 4-B counterbore with depth C LD through hole bottom side J with depth K PA YW PB QW LW 2 x 2-M5 x 0.8 (Hexagon socket head plug) PG Q + Stroke M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) W CH LH RR SS NE RR SS H QQ NH NC This port is not available for

One-touch Fittings Series KQ2

b a c i l p p A .

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + T When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + T Glossary of Terms Specific Product Precautions 54 JSX/JSXm Series Q : Air flow rate [L/min (ANR)] C : Sonic conductance [dm3/(sbar)], dm3 (Cubic decimeter) of SI units = L (liter) b : Critical pressure

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

MHR2-30R 76 73 B MHR2-30E port position 3-M5 X 0.8 thread depth 10 P.C.D43 (Mounting thread) 80 120 15.5 120 C A 54 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 14 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 25 25 6-M5 X 0.8 thread depth 10 (A, B, C common view) 50 3-5 +0.02 0 depth 10 16h9 0 0.043 (A, B, C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 -0.05 5

One-touch Fittings

[mm] Weight [g] X Y Nylon Urethane 4 M5 x 0.8 KQ2H04-M5G1 8 7.9 7.7 10 17.7 14.7 13.3 4 4 2.5 3.3 6 M5 x 0.8 KQ2H06-M5G1 10 9.9 9.7 12 17.7 14.7 13.3 4 4 2.5 4.1 *1 D Oval type M A L 4, 6 H *1: D is the body diameter.

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

B A B A B A B A B 4.7 35 23.5 44.4 <45.1> 10.2 26 3 R R A A G: Approx. 300 H: Approx. 600 lead wire ( length ) (Pitch) P = 10.5 13.5 24.3 33.2 (M5 port) 2n2-One-touch fitting (ports A, B) Applicable tube O.D.: 4 6 2n1-M5 x 0.8 (ports A, B) L2 [rail mounting hole pitch 12.5] (5) L1 DIN rail holding screw DIN rail (VZ1000-11-1-) L type plug connector M type plug connector Approx. 300 ( ) lead

VQ7-6/7-8

+ 0.77 (n: stations) Rc3/8 Rc1/2 Rc1/2 Rc3/4 22 Series VQ7-8 DIN Connector Type VV72-142 118 142 118 9 2n-Rc3/8, 1/2 67 20 Indicator light 14 34 9 (4-Rc1/8) Port P, R1, R2 for Rc3/4 only U side U side 18 Manual override 23 R4.5 R4.5 P= 56 60 (73) 60 (73) P= 56 B B B B B 14 42 18 13 13 A B SMC SMC SMC B B B A A A A A PA PA PA A B A B L1 L2 L1 L2 A B SMC PA A B PA L side R side L side R side