2

Dimensions P.386 Spare Parts P.390 KQ2 Metric size P.383 KDM6 How to Order P.392 Variations P.393 Dimensions P.394 KDM Metric size P.391 How to Order P.404 Variations P.405 Dimensions P.406 Inch size P.403 How to Order P.414 Variations P.415 Dimensions P.416 Inch size P.413 Gasket Seal (Uni Thread) Connection thread Applicable tubing Rc G NPT NPTF How to Order P.420 Variations P.421 Dimensions

Modular F.R.L. Units

High pressure 2.0 MPa (-X425) P.53 P.77 P.107 Low temperature 30 to 60C (-X430) P.53 P.77 P.106 High temperature 5 to 80C (-X440) P.53 P.77 P.106 Clean series (10-) P.54 P.63 P.80 P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for

Battery-less

/Belt Drive LEFB Series Battery-less Absolute (Step Motor 24 VDC) p. 12 Model Selection p. 13 How to Order p. 43 Specifications p. 45 Weight p. 45 Construction p. 46 Dimensions p. 47 Rod Type LEY Series Battery-less Absolute (Step Motor 24 VDC) p. 54 Model Selection p. 55 How to Order p. 61 Specifications p. 63 Weight p. 64 Construction p. 65 Dimensions p. 67 Guide Rod Type

Step Motor Controller

P Signals and terminal status can be monitored. P Parameters can be set.

Step Motor Controller

P Signals and terminal status can be monitored. P Parameters can be set.

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: w/o Lead Wire, Option 2: Bracket B, Horizontal Mounting, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: w/o Lead Wire, Option 2: Bracket B, Horizontal Mounting, Option 3: -

Modular F.R.L. Units

74 95 A2 61 76 76 99 A3 43.2 57.2 57.2 75.2 A4 43.2 57.2 57.2 75.2 A1 41.6 55.1 55.1 72.6 A1 41.6 55.1 55.1 72.6 A2 43.2 57.2 57.2 75.2 A3 43.2 57.2 57.2 75.2 A2 61 76 76 99 A1 41.6 55.1 55.1 72.6 A1 41.6 55.1 55.1 72.6 77.6 A2 43.2 57.2 57.2 75.2 80.2 A1 41.6 55.1 55.1 72.6 A2 43.2 57.2 57.2 75.2 A3 57 74 74 95 A2 61 76 76 99 104 A1 41.6 55.1 55.1 72.6 77.6 A2 43.2 57.2 57.2

Electric Actuator

Applicable stroke table Manufacturable stroke range [mm] Stroke [mm] Model 30 50 100 150 200 250 300 350 400 450 500 P P P P P P P P P P P P P P P P P P P P P LEY16 LEY25 LEY32 P P P P P P 10 to 300 15 to 400 20 to 500 Consult with SMC for the manufacture of intermediate strokes other than those specified on the above. w For the servo motor (24 VDC) specification, EMC compliance was

AC Servo Motor Driver (Pulse input type/Positioning type ）

SIGNALS AND WIRING (Note 2) I/O signals in control modes Related parameter P P/S S S/T T T/P Pin No.

Electric Actuator/Slider Type

T1 = V/a1 = 300/3000 = 0.1 [s], a1 a2 T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] Time [s] T2 = L 0.5V(T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

(a) LECSSAlways remove the wiring from across P-D and fit the regenerative option across P-C. The G3 and G4 terminals act as a thermal sensor. G3-G4 is disconnected when the regenerative option overheats abnormally. Always remove the lead from across P-D. Driver Servo amplifier Regenerative option P P C C G3 D (Note 2) G4 5m max. (Note 1) Cooling fan Note1.

Modular/F.R.L. Units Series AC

IN OUT IN OUT Bracket A1 A3 A2 A1 A4 K S T V KS KT KV KST A3 43 57 57 75 80 96 Attachment Model A1 41.5 55 55 72.5 77.5 93 A2 43 57 57 75 A3 43 57 57 75 A1 41.5 55 55 72.5 A1 41.5 55 55 72.5 A2 43 57 57 75 A1 41.5 55 55 72.5 A2 48 61 76 76 99 104 124 124 129 A2 43 57 57 75 80 96 A2 61 76 76 99 A2 61 76 76 99 A3 57 74 74 95 A2 43 57 57 75 A3 57 74 74 95 A3 43 57 57 75

Regulator for 2 MPa ARX 20

G46 P10 N02 G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

LEC-OM02904

P-D P P C C G3 D (2) G4 5m 5m (1) 1.

AC Servo Motor Driver (Network card type ）

(factory-wired) When using a driver built-in regenerative resistor, connect P+ and D. (factory-wired) When using a regenerative option, disconnect P+ and D, and connect the regenerative option to P+ and C. P+/C/D Regenerative option Refer to section 11.2 for details. Symbol Connection target (application) Description Supply the following power to L11 and L21.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

(factory-wired) When using a driver built-in regenerative resistor, connect P+ and D. (factory-wired) When using a regenerative option, disconnect P+ and D, and connect the regenerative option to P+ and C. P+/C/D Regenerative option Refer to section 11.2 for details. Supply the following power to L11 and L21.

AC Servo Motor Driver (CC-Link Type ）

` p 0 0 0 1 1 SOH DC1 !

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

PSxx-OMG0005CN

[V] A B C 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0005CN-E PSE5601 PSE56N01 02 N02 PSE56-C01 A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5