External pilot port Without M5 x 0.8 thread: Internal pilot VVEXB-1 With M5 x 0.8 thread: Common external pilot VVEXB-2 P = 31 P(1) port: Rc 1/8, For 6 manifold stations or n-Rc 1 8 more, exhaust from the both sides.

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VF 74.5 VFR 39.5 VP7 VP4 Individual SUP spacer VVQZ1000-P-5-M5 VVQZ2000-P-5-01 VVQZ3000-P-5-02 M5: VQZ1000 Rc(PT)1/8: VQZ2000 Rc(PT)1/4: VQZ3000 VQ VQ4 B VQZ Used to form a separate supply port for an interior manifold station or stations.

Intrinsically Safe Valve

x 0.8 (Pilot EXH port) Manual override 17.6 109.7 33.7 EA P EB PE X A A A A 24 23.6 20 20 65.4 5.3 20 29 7.3 68 39 B B B B 6 x 1/4" {P(1), EA(5), EB(3) port} 46.3 M5 x 0.8 (External pilot port) (Pitch) P = 17.5 21 L1 L2 5 Stations 1 n 2 47.5 53 38 27.3 8.5 9.8 2n x 1/4" {A(4), B(2) port} (Pitch) P = 17.5 19 L (Lead wire length) L-type plug connector

Dedicated Controller

Output reversal command O-NOT General purpose input no., State AND input wait command I-AND General purpose input no., State Input wait 90 OR input wait command I-OR General purpose input no., State AND input time out jump command T-AND Mounting with T-brackets (P-no.) label General purpose input no., State OR input time out jump command Input wait with time out function T-OR (P-no.) label

Shock Absorbers and Rate Controls

P!.l llunbcr llodel (Rell B C .05 t) t t G Eolt Slts w?isl'r t-t 2 300 0lhy4 1 8?.6 6.4 ,7 f9.9 ( o E SC!

VK3000

Applicable blanking plate assembly VK3000-7-1A 01 1 station Solenoid on opposite side of A and B port P port: Rc 1/8 A port: M5 x 0.8 B port: M5 x 0.8 Nil R port: Rc 1/8 Thread type Type S41 20 20 stations Solenoid on same side of A and B port Type VK334 Type VK3140 P port: Rc 1/8 R port: Rc 1/8 S Nil Rc Port size Q CE-compliant Nil CE-compliant F N T G M5 M5 x 0.8 C4 4 cassette NPT B port

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

for body mounting NC LE H7 depth R GB Cushion needle 2-P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 Rc 1/8 Rc 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

CXWM/CXWL

CX D2-M5 x 0.8 Hexagon socket head cap plug 6H7 +0.012 0 2 x 2-5.2 through 2 x 2-9.5 counterbore depth 5 End lock mechanism -X (6H7 hole pitch) 4-M5 x 1.0 thread depth 9 20Data 4 positions for set screws for 6H7 depth 4 +0.012 0 6H7 thread depth 8 +0.012 0 fixing shock absorbers 2-RB1006-X552 Shock absorber (mm) F L P Q S SS Z ZZ Model CXWL20-25R CXWL20-50R CXWL20-75R CXWL20-100R CXWL20-

VEX1

Refer to p.5.3-1 for details. 5.1-36

Series AK1000

Refer to gauge guide (P.94,95). t t r Sample Order Number Port w w w q q q t AK1002S e q 4 4 4 4 4 w 4 4 4 4 4 r 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA 1 w w q q 2) Pressure gauge unit MPa or psig/bar selectable.

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

51

Symbol Foot (mm) A AL D I B B1 C H1 H W GA GB H2 J KA LC LD LH LS LT LX LZ M MM NA P S X Y Z ZZ Bore size (mm) 20 25 32 40 50 63 80 100 12 20 5 12 14 4 33 10 14.5 34 13 8 6 4 26 M4 x 0.7 6 20 (3) 32 44 3 M8 x 1.25 24 M5 x 0.8 57 15 7 32 83 Width across flats 6 length 3.5 12.5 23 6 15 16.5 4 36 10 17.5 38.5 17 10 7 4 31 M5 x 0.8 6 22 (3) 36 49 3.5 M10 x 1.25 29 M5 x 0.8 60 15 7 35 89.5 Width

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

Indicator light With Special function Applicable load Electrical entry Wiring (Output) Type 0.5 () 3 (L) Perpendicular In-line DC AC 3-wire (NPN) Solid state switch F9NV F9N P P 5V 12V IC _ _ Relay, PLC Grommet 3-wire (NPN) 24V F9PV F9P P P 2-wire 12V F9BV F9B P P Lead wire length: 0.5m.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

How to Order Manifold Example/Valve T C VV3QZ15 08 N7 VQZ215R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold VV3QZ25 Rc(PT) 06C6C R N NPT T NPTF F G(PF) External pilot specification Cylinder ports (1) Symbol N1 N3 N7 N9 N11 NM M5 01 02 External pilot port 3/8" 1/8" 5/32" 1/4" 5/16" Mix M5 1/8 Tube O.D.

Non-contact Gripper

P PL M ML C H D L XT661-4C-X321 M5 x 0.8 5 M4 x 0.7 8 32 6 39 XT661-6C-X321 M5 x 0.8 6 M4 x 0.7 6 47 11 59 XT661-8C-X321 M5 x 0.8 6 M4 x 0.7 6 47 17 79 XT661-10C-X321 Rc 1/8 M4 x 0.7 6 47 23 99 XT661-120E-X322 Rc 1/8 M5 x 0.8 7 72 30.5 120 XT661-150E-X322 Rc 1/8 M5 x 0.8 7 72 37.5 150 744 Non-contact Gripper XT661 Series Dimensions [Bernoulli Type] With guide assembly Size: 120 Size

IDG

P) IDG3/5 IDG3H/5H IDG10/20 IDG10H/20H Option specifications With fitting for purge air discharge (Option: P) i t t Plug } IN OUT OUT IN q o q Plug y Purge air for dehumidification u Plug u Purge r Purge Purge air for dehumidification Component Parts Material Description No.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

(2-JJ counterbore, thread depth from bottom KK) Floating bracket mounting thread PC LW 2-T counterbore depth E PD 2-P HG NE H NH C NG G TT UU A N 2 x 2-P (Hexagon socket head taper plug) Z + Stroke (mm) Model MY3B16 MY3B25 MY3B40 MY3B63 A B C E G H HG JJ KK L LD LL LW M MM N 41 28.5 3.5 65 5.0 5.0 27 9.5 M4 x 0.7 2 6 18 61 6.0 M4 x 0.7 13.5 61 41.5 5.5 95 7.5 7.4 37 14.0 M5 x 0.8 2 8 25

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Stroke range Bore size (mm) MM XA Y ZZ MA MB MC NA NB P S M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 6 6 12 12 16 16 20 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 11 11 16 16 16 16 20 10 10 12 12 15 15 23 19 26 21 34 86 107 120 138 150 171 198 4 4 4 4 5 5 6 20 25 32 40 50 63 80 M5 x 0.8